基于参考臂低频相位调制的微弱振动光学相干检测
|
摘要
针对纳米级中高频微弱振动检测提出了一种基于参考臂低频相位调制的光学相干检测方法。分析了参考臂低频相位调制情况下,微弱振动相干检测信号的模型及其频谱分布特点,在此基础上提出了振动频率及振幅的解算方法。仿真研究表明所述能够准确解调出纳米级微弱振动的频率及振幅参数,并且表现出较强的抗噪和抗环境扰动的能力。搭建了一套光学外差相干系统对由水下声源激发的纳米级水表面波进行了探测实验,实验结果表明利用所述的方法能够精确测定微弱振动的频率,对其振幅的检测也表现出很高的测量重复性。参考臂低频相位调制相干方法为中高频微弱振动参数的检测提供了新的解决方案。
An optical coherence method based on low-frequency phase modulation of reference arm was proposed to detect nanometer level weak vibrations with medium and high frequencies. The model and its spectral distribution characteristics of weak vibration coherence detection signals were analyzed under condition of low-frequency phase modulation of reference arm. Then,the demodulation calculation method for weak vibration frequency and amplitude was proposed. Simulation study showed that the proposed method can correctly demodulate the frequency and amplitude of weak vibrations with a stronger anti-noise and anti-disturbance capacity. An optical heterodyne coherent system was developed to do tests and detect nanometer level weak water surface waves excited by underwater acoustic source. The test results showed that the proposed method can accurately measure the frequency of weak vibrations; it can detect the amplitude of weak vibration with a good repeatability; the detection method based on low-frequency phase modulation of reference arm provides a new solving scheme for parametric detection of weak vibrations with medium and high frequencies.
An optical coherence method based on low-frequency phase modulation of reference arm was proposed to detect nanometer level weak vibrations with medium and high frequencies. The model and its spectral distribution characteristics of weak vibration coherence detection signals were analyzed under condition of low-frequency phase modulation of reference arm. Then,the demodulation calculation method for weak vibration frequency and amplitude was proposed. Simulation study showed that the proposed method can correctly demodulate the frequency and amplitude of weak vibrations with a stronger anti-noise and anti-disturbance capacity. An optical heterodyne coherent system was developed to do tests and detect nanometer level weak water surface waves excited by underwater acoustic source. The test results showed that the proposed method can accurately measure the frequency of weak vibrations; it can detect the amplitude of weak vibration with a good repeatability; the detection method based on low-frequency phase modulation of reference arm provides a new solving scheme for parametric detection of weak vibrations with medium and high frequencies.
引文
[1]郭维,卜锋斌,李国平.船用离心泵压力脉动与振动信号的相干分析研究[J].船舶工程,2016,38(9):71-74.GUO Wei,BU Fengbin,LI Guoping.Coherence analysis study of pressure fluctuation and vibration signal in centrifugal pump[J].Ship Engineering,2016,38(9):71-74.
[2]晏红文,田红旗,欧阳华,等.大型风力发电机组弹性元件隔振性能分析和试验研究[J].振动与冲击,2016,35(10):212-217.YAN Hongwen,TIAN Hongqi,OUYANG Hua,et al.Vibration isolation performance analysis of the elastic element of large-scale wind turbine and its experimental study[J].Journal of Vibration and Shock,2016,35(10):212-217.
[3]谭天乐,朱春艳,朱东方,等.航天器微振动测试、隔离、抑制技术综述[J].上海航天,2014,31(6):36-51.TAN Tianle,ZHU Chunyan,ZHU Dongfang,et al.Overview of micro-vibration testing,isolation and suppression technology for spacecraft[J].Aerospace Shanghai,2014,31(6):36-51.
[4]孟光,周徐斌.卫星微振动计控制技术进展[J].航空学报,2015,36(8):2609-2619.MENG Guang,ZHOU Xubin.Progress review of satellite micro-vibration and control[J].Acta Aeronautica Astronautica Sinica,2015,36(8):2609-2619.
[5]刘春时,孙伟,李小彭,等.数控机床整机振动测试方法研究[J].中国工程机械学报,2009,7(3):330-335.LIU Chunshi,SUN Wei,LI Xiaopeng,et al.Vibration testing method for CNC machines[J].Chinese Journal of Construction Machinery,2009,7(3):330-335.
[6]黎永前,朱明铨.光干涉技术在纳米精度测量中的应用及发展[J].航空精密制作技术,2002,38(2):32-36.LI Yongqian,ZHU Mingquan.Optical interferometry technology and its development in nanometric accuracy measurement[J].Aviation Precision Manufacturing Technology,2002,38(2):32-36.
[7]朱祥,张志伟,张文静,等.光学外差干涉法检测激光超声振动[J].科学技术与工程,2016,16(29):252-254.ZHU Xiang,ZHANG Zhiwei,ZHANG Wenjing,et al.Detection of laser ultrasonic vibration using optical heterodyne interferometry[J].Science Technology and Engineering,2016,16(29):252-254.
[8]LINK A,MARTENS H J V.Amplitude and phase measurement of sinusoidal vibration in the nanometer range using laser interferometry[J].Measurement,1998,24:55-67.
[9]陆观,梁大开.基于光纤光栅传感器的飞机油箱表面复合材料板振动研究[J].振动与冲击,2012,31(4):34-37.LU Guan,LIANG Dakai.Vibration inspection of aerofoil fuel tank with composite material surface based on optic fiber grating sensors[J].Journal of Vibration and Shock,2012,31(4):34-37.
[10]BAUER A M,RITTER F,SIEGMUND G.High-precision laser vibrometers based on digital Doppler-signal processing[C]∥Proceedings of SPIE-The International Society for Optical Engineering.Washington:SPIE,2002.
[11]王汉斌,夏豪杰,樊宏.相位调制干涉位移测量系统信号处理方法[J].纳米技术与精密工程,2016,14(3):217-222.WANG Hanbin,XIA Haojie,FAN Hong.Signal processing method of phase modulated interference displacement measurement system[J].Nanotechnology and Precision Engineering,2016,14(3):217-222.
[12]RIPPER G P,GARCIA C A,DIAS R S,et al.Primary calibration of single-point laser Doppler vibrometers(LDV)[C]∥Proceedings of International Congress on Noise Control Engineering 2005.New York:Institute of Noise Control Engineering of the USA,2005.
[13]刘彬彬,李立艳,杨军,等.用于纳米测量的单频偏振激光干涉仪的光路集成方法[J].中国激光,2010,39(10):2582-2586.LIU Binbin,LI Liyan,YANG Jun,et al.Optical circuit integrated method of single-frequency polarization laser interferometer for nanometer measurement[J].Chinese Journal of Lasers,2010,39(10):2582-2586.
[14]HUANG Zhen,LI Chengwei,SUN Xiaogang.Piece-wise transition detection algorithm for a self-mixing displacement sensor[J].Chinese Optics Letters,2013,11(9):091203.
[15]CHURNSIDE J H,BRAVO H E,NAUGOLNYKH K A,et al.Effects of underwater sound and surface ripples on scattered laser light[J].Physical Acoustics,2008,54(2):204-209.
[16]BLAMEY J,FRIEND J,YEO L.Acoustically induced micro-scale capillary wave turbulence[C]∥Proceedings of20thInternational Congress on Acoustics.Sydney:International Congress on Acoustics,2010.
[2]晏红文,田红旗,欧阳华,等.大型风力发电机组弹性元件隔振性能分析和试验研究[J].振动与冲击,2016,35(10):212-217.YAN Hongwen,TIAN Hongqi,OUYANG Hua,et al.Vibration isolation performance analysis of the elastic element of large-scale wind turbine and its experimental study[J].Journal of Vibration and Shock,2016,35(10):212-217.
[3]谭天乐,朱春艳,朱东方,等.航天器微振动测试、隔离、抑制技术综述[J].上海航天,2014,31(6):36-51.TAN Tianle,ZHU Chunyan,ZHU Dongfang,et al.Overview of micro-vibration testing,isolation and suppression technology for spacecraft[J].Aerospace Shanghai,2014,31(6):36-51.
[4]孟光,周徐斌.卫星微振动计控制技术进展[J].航空学报,2015,36(8):2609-2619.MENG Guang,ZHOU Xubin.Progress review of satellite micro-vibration and control[J].Acta Aeronautica Astronautica Sinica,2015,36(8):2609-2619.
[5]刘春时,孙伟,李小彭,等.数控机床整机振动测试方法研究[J].中国工程机械学报,2009,7(3):330-335.LIU Chunshi,SUN Wei,LI Xiaopeng,et al.Vibration testing method for CNC machines[J].Chinese Journal of Construction Machinery,2009,7(3):330-335.
[6]黎永前,朱明铨.光干涉技术在纳米精度测量中的应用及发展[J].航空精密制作技术,2002,38(2):32-36.LI Yongqian,ZHU Mingquan.Optical interferometry technology and its development in nanometric accuracy measurement[J].Aviation Precision Manufacturing Technology,2002,38(2):32-36.
[7]朱祥,张志伟,张文静,等.光学外差干涉法检测激光超声振动[J].科学技术与工程,2016,16(29):252-254.ZHU Xiang,ZHANG Zhiwei,ZHANG Wenjing,et al.Detection of laser ultrasonic vibration using optical heterodyne interferometry[J].Science Technology and Engineering,2016,16(29):252-254.
[8]LINK A,MARTENS H J V.Amplitude and phase measurement of sinusoidal vibration in the nanometer range using laser interferometry[J].Measurement,1998,24:55-67.
[9]陆观,梁大开.基于光纤光栅传感器的飞机油箱表面复合材料板振动研究[J].振动与冲击,2012,31(4):34-37.LU Guan,LIANG Dakai.Vibration inspection of aerofoil fuel tank with composite material surface based on optic fiber grating sensors[J].Journal of Vibration and Shock,2012,31(4):34-37.
[10]BAUER A M,RITTER F,SIEGMUND G.High-precision laser vibrometers based on digital Doppler-signal processing[C]∥Proceedings of SPIE-The International Society for Optical Engineering.Washington:SPIE,2002.
[11]王汉斌,夏豪杰,樊宏.相位调制干涉位移测量系统信号处理方法[J].纳米技术与精密工程,2016,14(3):217-222.WANG Hanbin,XIA Haojie,FAN Hong.Signal processing method of phase modulated interference displacement measurement system[J].Nanotechnology and Precision Engineering,2016,14(3):217-222.
[12]RIPPER G P,GARCIA C A,DIAS R S,et al.Primary calibration of single-point laser Doppler vibrometers(LDV)[C]∥Proceedings of International Congress on Noise Control Engineering 2005.New York:Institute of Noise Control Engineering of the USA,2005.
[13]刘彬彬,李立艳,杨军,等.用于纳米测量的单频偏振激光干涉仪的光路集成方法[J].中国激光,2010,39(10):2582-2586.LIU Binbin,LI Liyan,YANG Jun,et al.Optical circuit integrated method of single-frequency polarization laser interferometer for nanometer measurement[J].Chinese Journal of Lasers,2010,39(10):2582-2586.
[14]HUANG Zhen,LI Chengwei,SUN Xiaogang.Piece-wise transition detection algorithm for a self-mixing displacement sensor[J].Chinese Optics Letters,2013,11(9):091203.
[15]CHURNSIDE J H,BRAVO H E,NAUGOLNYKH K A,et al.Effects of underwater sound and surface ripples on scattered laser light[J].Physical Acoustics,2008,54(2):204-209.
[16]BLAMEY J,FRIEND J,YEO L.Acoustically induced micro-scale capillary wave turbulence[C]∥Proceedings of20thInternational Congress on Acoustics.Sydney:International Congress on Acoustics,2010.