微束XRF系统中X射线聚焦光学元件研究
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摘要
高性能X射线聚焦光学元件是实现亚微米分辨率微束X射线荧光分析系统(XRF)的关键器件。给出一种新型的微束XRF系统设计结构,介绍两种典型的X射线聚焦光学元件:X射线聚焦毛细管透镜和X射线组合折射透镜的结构与光学参数。数值计算比较了X射线聚焦毛细管透镜和X射线组合折射透镜的光学聚焦性能。分析结果体现了X射线聚焦组合透镜作为聚焦光学元件在焦斑大小、透过率、强度增益和检测范围等方面的优势。
High performance optical components for focusing X-ray are the crucial part to realize the micro X-ray fluorescence system with the sub-microns spatial resolution.A novel structure of micro XRF is given and the optical parameters for both X-ray focusing capillary lens and X-ray compound refractive lens(CRL)are introduced.Main works of this paper focus on the numerical computing for the optical performance of capillary and CRL.Analysis results show that the X-ray CRL has the advantages in terms of focal spot size,transmittance,etc,when compared with capillary.
High performance optical components for focusing X-ray are the crucial part to realize the micro X-ray fluorescence system with the sub-microns spatial resolution.A novel structure of micro XRF is given and the optical parameters for both X-ray focusing capillary lens and X-ray compound refractive lens(CRL)are introduced.Main works of this paper focus on the numerical computing for the optical performance of capillary and CRL.Analysis results show that the X-ray CRL has the advantages in terms of focal spot size,transmittance,etc,when compared with capillary.
引文
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[2]金芳,林斌,曹向群.定量光敏荧光技术在牙齿龋病诊断中的应用[J].光学仪器,2008,30(2):44-47.
[3]WEST M,ELLIS A T,POTTS P J,et al.Atomic Spectrometry update X-ray fluorescence Specctrometry[J].Journal of Analytical Atomic Spectrometry,2011,26(10):1919-1963.
[4]WEST M,ELLIS A T,POTTS P J,et al.Atomic Spectrometry update-X-ray fluorescence Specctrometry[J].Journal of Analytical Atomic Spectrometry,2012,27(10):1603-1644.
[5]滕玥鹏,孙天希,刘志国,等.一种新型的单毛细管X光学器件[J].光学学报,2010,30(2):542-545.
[6]SNIGIREV A,KOHN V,SNIGIREVA I,et al.A compound refractive lens for focusing high-energy X-ray[J].Nature,1996,384(6604):49-51.
[7]乐孜纯,刘巍.抛物面型X射线组合折射透镜光学性能分析[J].光电工程,2009,36(3):52-56.
[8]乐孜纯,董文,刘巍,等.抛物面型X射线组合折射透镜聚焦性能的理论与实验研究[J].物理学报,2010,59(3):1977-1984.
[9]乐孜纯,张明,董文,等.制作工艺误差对X射线组合折射透镜聚焦性能影响研究[J].物理学报,2010,59(9):6284-6289.
[10]YONEHARA T,ORITA D,NAKANO K,et al.Development of a transportableμ-XRF spectrometer with polycapillary half lens[J].X-Ray Spectrometry,2010,39(2):78-82.
[11]SUN T X,LIU Z G,DING X L.Characterization of a polycapillary focusing X-ray lens for application in spatially resolved EXAFS experiments[J].Chemical physics Letters,2007,439(4/6):412-414.
[12]吉昂,陶光仪,卓尚军,等.X射线荧光光谱分析[M].北京:科学出版社,2003:263-295.