微结构阵列的超精密偏心加工方法
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摘要
慢刀伺服加工微结构阵列的轨迹特点会影响阵列中各单元误差分布的一致性,并导致单元边缘误差大。为了提高微结构阵列加工的一致性,提出一种针对微结构阵列的超精密偏心加工方法,实现阵列各个子单元的单独加工。采用多体系统理论和对对刀误差影响的分析,建立了刀具轨迹生成算法及表面预测模型。仿真分析结果表明超精密偏心加工方法有利于提高阵列单元的一致性,可避免加工过程中Z轴加速度过大对加工形貌的影响,提高子单元边缘部分的加工质量。
The tool loci of slow tool servo(STS) diamond turning for microstructure arrays affect the error distribution in different elements, and increase the error in the edge of elements. In this paper, an ultra-precision eccentrical machining method is proposed to improve the consistency of the microstructure, which can machine each element individually. Based on the multibody system theory and the analysis of the tool un-alignment, the tool locus generation algorithm and surface generation model are established. The simulation results show that the ultra-precision eccentrical machining method can improve the consistency of microstructure array. It also contributes to avoiding the influence of the Z axis acceleration fluctuation and improving the machining quality in the element boundaries.
The tool loci of slow tool servo(STS) diamond turning for microstructure arrays affect the error distribution in different elements, and increase the error in the edge of elements. In this paper, an ultra-precision eccentrical machining method is proposed to improve the consistency of the microstructure, which can machine each element individually. Based on the multibody system theory and the analysis of the tool un-alignment, the tool locus generation algorithm and surface generation model are established. The simulation results show that the ultra-precision eccentrical machining method can improve the consistency of microstructure array. It also contributes to avoiding the influence of the Z axis acceleration fluctuation and improving the machining quality in the element boundaries.
引文
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[2] Fang F Z, Zhang X D, Hu X T. Cylindrical coordinate machining of optical freeform surfaces[J]. Optics Express, 2008, 16(10): 7323-9.
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[5] 关朝亮,铁贵鹏,尹自强.光学阵列器件的慢刀伺服车削加工技术[J]. 国防科技大学学报, 2009, 31(4): 31-35.
[6] Liu X, Zhang X, Fang F, et al. Influence of machining errors on form errors of microlens arrays in ultra-precision turning[J]. International Journal of Machine Tools & Manufacture, 2015, 96: 80-93.
[7] 田霏,刘现磊,张效栋,等. 微透镜阵列加工误差对光学性能的影响[J]. 光学学报, 2016,36(2): 178-186.
[8] Chen C C, Chao C L, Hsu W Y, et al. Fabrication of Aspheric Micro Lens Array by Slow Tool Servo[J]. Advanced Materials Research, 2009, 76-78: 479-484.
[9] 张效栋,王志诚,曾臻,等. 微透镜阵列超精密切削正弦过渡路径优化设计[J]. 纳米技术与精密工程, 2017, 15(4): 239-245.
[10] 刘德森, 蒋小平. 微小光学与异形孔径微透镜阵列研究[J]. 激光与光电子学进展, 2010, 47(8): 1-16.
[11] 范占斌,戴一帆,关朝亮,等. 圆柱表面微结构阵列超精密车削加工技术[J]. 纳米技术与精密工程, 2014, 12(5): 358-364.
[2] Fang F Z, Zhang X D, Hu X T. Cylindrical coordinate machining of optical freeform surfaces[J]. Optics Express, 2008, 16(10): 7323-9.
[3] Maxwell J. Manufacturing and applications of nonrotationally symmetric optics[J]. Proceedings of SPIE - The International Society for Optical Engineering, 1999, 3739: 94-107.
[4] 王兴盛, 康敏. 基于Hermite插值的复杂光学曲面车削加工路径规划[J]. 机械工程学报,2012,48(11): 191-198.
[5] 关朝亮,铁贵鹏,尹自强.光学阵列器件的慢刀伺服车削加工技术[J]. 国防科技大学学报, 2009, 31(4): 31-35.
[6] Liu X, Zhang X, Fang F, et al. Influence of machining errors on form errors of microlens arrays in ultra-precision turning[J]. International Journal of Machine Tools & Manufacture, 2015, 96: 80-93.
[7] 田霏,刘现磊,张效栋,等. 微透镜阵列加工误差对光学性能的影响[J]. 光学学报, 2016,36(2): 178-186.
[8] Chen C C, Chao C L, Hsu W Y, et al. Fabrication of Aspheric Micro Lens Array by Slow Tool Servo[J]. Advanced Materials Research, 2009, 76-78: 479-484.
[9] 张效栋,王志诚,曾臻,等. 微透镜阵列超精密切削正弦过渡路径优化设计[J]. 纳米技术与精密工程, 2017, 15(4): 239-245.
[10] 刘德森, 蒋小平. 微小光学与异形孔径微透镜阵列研究[J]. 激光与光电子学进展, 2010, 47(8): 1-16.
[11] 范占斌,戴一帆,关朝亮,等. 圆柱表面微结构阵列超精密车削加工技术[J]. 纳米技术与精密工程, 2014, 12(5): 358-364.