DLC薄膜沉积对不同表面形貌的钛微弧氧化膜层摩擦学性能的影响
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摘要
目的在钛微弧氧化(MAO)膜层表面沉积类金刚石碳(DLC)薄膜,探索DLC薄膜沉积对不同表面形貌微弧氧化膜层摩擦学性能的影响。方法在铝酸盐电解液体系中,通过改变微弧氧化时间(10、60 min)制备表面粗糙度与平均孔径不同的两种微弧氧化膜层MAO_10和MAO_60,而后利用磁控溅射技术在其表面沉积DLC薄膜,获得MAO/DLC复合膜层。通过白光共聚焦显微镜、CSM球盘式摩擦磨损试验机、Mahr轮廓仪和扫描电子显微镜等实验设备,对膜层的表面粗糙度、微孔尺寸、摩擦系数、磨损率和磨痕形貌等进行观察和分析。结果微弧氧化时间增加导致MAO膜层的表面粗糙度增大,表面微孔数目下降但平均孔径增大。DLC沉积可以在MAO_10膜层表面形成较好的DLC覆盖层,但在粗糙度较高和孔径较大的MAO_60膜层表面呈现出明显的不连续分布。MAO/DLC复合膜层的粗糙度和平均孔径明显低于MAO膜层。摩擦学性能测试表明,MAO_10/DLC复合膜层的摩擦系数和磨损率相比于MAO_10膜层均明显下降,MAO_10膜层和MAO_10/DLC复合膜层的稳定摩擦系数分别为0.85和0.24,磨损率分别为12.76×10~(-6) mm~3/(N·m)和3.71×10~(-6) mm~3/(N·m);MAO_60/DLC复合膜层的摩擦系数和磨损率则与MAO_60膜层比较接近,MAO_60膜层和MAO_60/DLC复合膜层的稳定摩擦系数分别为0.77和0.67,磨损率分别为68.02×10~(-6) mm~3/(N·m)和61.81×10~(-6) mm~3/(N·m)。结论在表面较平整且平均孔径较小的钛微弧氧化膜层表面沉积DLC薄膜时,所得MAO/DLC复合膜层在摩擦过程中可以形成较为连续的润滑层,其摩擦学性能良好。相反,在表面粗糙和平均孔径较大的钛微弧氧化膜层表面沉积DLC薄膜时,所得MAO/DLC复合膜层在摩擦过程中难以形成连续的润滑层,其摩擦学性能较差。
The work aims to deposit diamond-like carbon(DLC)film on the surface of micro-arc oxidation films on titanium and explore the influence of DLC film deposition on the tribological property of micro-arc oxidation(MAO)films with different surface morphologies.Two kinds of MAO films(MAO_10 and MAO_60)with different surface roughness and micro-pore sizes were fabricated in the aluminate electrolytes with the MAO time of 10 min and 60 min,respectively.Then,a DLC film was deposited on the surface of the MAO film by magnetron sputtering to obtain MAO/DLC composite films.The surface roughness,micro-pore size,friction coefficient,wear rate and wear scar morphology of the MAO and MAO/DLC films were observed and studied by confocal microscope,CSM friction tester,Mahr surface profiler and scanning electron microscopy(SEM).The increasing MAO time increased surface roughness and average micro-pore size,but decreased micro-pore number of MAO films.After the DLC deposition,a relatively good DLC top layer was formed on the surface of MAO_10 film.However,the DLC top layer on the MAO_60 film exhibited a discontinuous distribution due to the high surface roughness and large micro-pore size of MAO_60 film.The surface roughness and average micro-pore size of MAO/DLC composite films were lower than that of MAO films.The tribological test results showed that the friction coefficient and wear rate of MAO_10/DLC composite film were significantly lower than that of MAO_10 film.The stable friction coefficient of MAO_10 film and MAO_10/DLC composite film was 0.85 and 0.24,and the wear rate was 12.76×10~(-6) mm~3/(N·m)and 3.71×10~(-6) mm~3/(N·m),respectively.In contrast,the stable friction coefficient and average wear rate of MAO_60/DLC composite film were near to that of MAO_60 film.The stable friction coefficient of MAO_60 film and MAO_60/DLC composite film was 0.77 and 0.67,and the wear rate was 68.02×10~(-6) mm~3/(N·m)and 61.81×10~(-6) mm~3/(N·m),respectively.When the DLC film is deposited on the MAO film with relatively smooth surface and small micro-pore size,the fabricated MAO/DLC composite film has good tribological property due to the formation of a continuous lubricating layer.In contrast,when the DLC film is deposited on the MAO film with rough surface and large micro-pore size,the continuous lubricating layer is difficult to form,thus leading to a relatively poor tribological property.
The work aims to deposit diamond-like carbon(DLC)film on the surface of micro-arc oxidation films on titanium and explore the influence of DLC film deposition on the tribological property of micro-arc oxidation(MAO)films with different surface morphologies.Two kinds of MAO films(MAO_10 and MAO_60)with different surface roughness and micro-pore sizes were fabricated in the aluminate electrolytes with the MAO time of 10 min and 60 min,respectively.Then,a DLC film was deposited on the surface of the MAO film by magnetron sputtering to obtain MAO/DLC composite films.The surface roughness,micro-pore size,friction coefficient,wear rate and wear scar morphology of the MAO and MAO/DLC films were observed and studied by confocal microscope,CSM friction tester,Mahr surface profiler and scanning electron microscopy(SEM).The increasing MAO time increased surface roughness and average micro-pore size,but decreased micro-pore number of MAO films.After the DLC deposition,a relatively good DLC top layer was formed on the surface of MAO_10 film.However,the DLC top layer on the MAO_60 film exhibited a discontinuous distribution due to the high surface roughness and large micro-pore size of MAO_60 film.The surface roughness and average micro-pore size of MAO/DLC composite films were lower than that of MAO films.The tribological test results showed that the friction coefficient and wear rate of MAO_10/DLC composite film were significantly lower than that of MAO_10 film.The stable friction coefficient of MAO_10 film and MAO_10/DLC composite film was 0.85 and 0.24,and the wear rate was 12.76×10~(-6) mm~3/(N·m)and 3.71×10~(-6) mm~3/(N·m),respectively.In contrast,the stable friction coefficient and average wear rate of MAO_60/DLC composite film were near to that of MAO_60 film.The stable friction coefficient of MAO_60 film and MAO_60/DLC composite film was 0.77 and 0.67,and the wear rate was 68.02×10~(-6) mm~3/(N·m)and 61.81×10~(-6) mm~3/(N·m),respectively.When the DLC film is deposited on the MAO film with relatively smooth surface and small micro-pore size,the fabricated MAO/DLC composite film has good tribological property due to the formation of a continuous lubricating layer.In contrast,when the DLC film is deposited on the MAO film with rough surface and large micro-pore size,the continuous lubricating layer is difficult to form,thus leading to a relatively poor tribological property.
引文
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[19]乌迪,刘向东,吕凯.负向电压与氧化时间对AZ91D微弧氧化膜层形成特性的影响[J].特种铸造及有色合金,2008(7):564-566.WU Di,LIU Xiang-dong,LV Kai.The influence of negative voltage and oxidation time on the formation characteristics of AZ91D micro-arc oxidation film[J].Special-cast and non-ferrous alloys,2008(7):564-566.
[20]郭宝刚,梁军,陈建敏,等.氧化时间对Ti-6Al-4V微弧氧化膜结构与性能的影响[J].中国有色金属学报,2005(6):981-986.GUO Bao-gang,LIANG Jun,CHEN Jian-min,et al.Effects of oxidation time on microstructure and performance of micro-arc oxidation coatings formed on Ti-6Al-4V alloy[J].Transactions of nonferrous metals society of China,2005(6):981-986.
[21]郭宝刚,梁军,田军,等.阳极电压对钛合金微弧氧化膜性能的影响[J].电镀与精饰,2005(3):1-4.GUO Bao-gang,LIANG Jun,TIAN Jun,et al.The effect of anodic voltage on the performance of micro-arc oxidation film on titanium alloy[J].Plating&finishing,2005(3):1-4.
[22]YANG W,DENG Z N,YANG Z,et al.Characterization and properties of duplex a-C:H/MAO coatings on magnesium alloy using combined microarc oxidation and hybrid magnetron sputtering[J].Journal of Wuhan University of Technology-Mater sci ed,2015,30(4):822-826.
[23]郝康达,苗景国,陈秋荣,等.铝酸钠浓度对7075铝合金微弧氧化膜层特性的影响[J].表面技术,2013,42(3):49-51.HAO Kang-da,MIAO Jing-guo,CHEN Qiu-rong,et al.Effect of sodium aluminate concentration on properties of micro-arc oxidation coatings on aluminum alloy 7075[J].Surface technology,2013,42(3):49-51.
[24]李振东,詹华,王亦奇,等.干摩擦条件下基体粗糙度对Cr-DLC薄膜摩擦磨损性能的影响[J].摩擦学学报,2016,36(6):741-748.LI Zhen-dong,ZHAN Hua,WANG Yi-qi,et al.Effect of substrate roughness on friction and wear properties of Cr-DLC films under dry-sliding condition[J].Tribology,2016,36(6):741-748.
[25]LIU Y,MELETIS E I.Evidence of graphitization of diamond-like carbon films during sliding wear[J].Journal of materials science,1997,32(13):3491-3495.
[2]CESCHINI L,LANZONI E,MARTINI C,et al.Comparison of dry sliding friction and wear of Ti6Al4V alloy treated by plasma electrolytic oxidation and PVD coating[J].Wear,2008,264(1):86-95.
[3]SHOKOUHFAR M,DEHGHANIAN C,MONTAZERIM,et al.Preparation of ceramic coating on Ti substrate by plasma electrolytic oxidation in different electrolytes and evaluation of its corrosion resistance:Part II[J].Applied surface science,2012,258(7):2416-2423.
[4]郭超飞,郝建民,陈永楠,等.电压对TiAl合金含ZrO2微弧氧化膜生长特性的影响[J].表面技术,2017,46(5):1-5.GUO Chao-fei,HAO Jian-min,CHEN Yong-nan,et al Effect of voltage on growth characteristics of ceramic coating containing ZrO2 prepared by microarc oxidation on TiAl alloy[J].Surface technology,2017,46(5):1-5.
[5]DOU J H,CHEN Y,YU H J,et al.Research status of magnesium alloys by micro-arc oxidation:A review[J].Surface engineering,2017,33(10):731-738.
[6]AO N,LIU D X,WANG S X,et al.Microstructure and tribological behavior of a TiO2/hBN composite ceramic coating formed via micro-arc oxidation of Ti-6Al-4V alloy[J].Journal of materials science&technology,2016,32(10):1071-1076.
[7]MU M,LIANG J,ZHOU X J,et al.One-step preparation of TiO2/Mo S2 composite coating on Ti6Al4V alloy by plasma electrolytic oxidation and its tribological properties[J].Surface&coatings technology,2013,214(2):124-130.
[8]霍晓迪,王青,梁军,等.微弧氧化一步制备石墨-PTFE共添加的自润滑膜层[J].摩擦学学报,201232(2):133-138.HUO Xiao-di,WANG Qing,LIANG Jun,et al.One-step preparation of graphite/PTFE co-containing self-lubricating coating by plasma electrolytic oxidation[J].Tribology,2012,32(2):133-138.
[9]REN L M,WANG T C,CHEN Z X,et al.Self-lubricating PEO-PTFE composite coating on titanium[J].Metals,2019,9(2):170.
[10]王志虎,张菊梅,白力静,等.AZ91镁合金表面微弧氧化与化学镀铜复合处理层的微观组织与性能[J].中国腐蚀与防护学报,2018,38(4):391-396.WANG Zhi-hu,ZHANG Ju-mei,BAI Li-jing,et al.Microstructure and property of composite coatings on AZ91Mg-alloy prepared by micro-arc oxidation and electroless Cu-layer[J].Journal of Chinese society for corrosion and protection,2018,38(4):391-396.
[11]杨巍,汪爱英,蒋百灵,等.MAO层厚度对MAO/DLC复合膜层力学性能与摩擦学特性的影响[J].真空科学与技术学报,2012,32(10):878-883.YANG Wei,WANG Ai-ying,JIANG Bai-ling,et al.Growth and mechanical property characterization of microwave oxidized Mg O/diamond-like carbon composite coatings[J].Chinese journal of vacuum science and technology,2012,32(10):878-883.
[12]XUE W B,TIAN H,DU J C,et al.Duplex Al2O3/DLCcoating on 15SiCp/2024 aluminum matrix composite using combined microarc oxidation and filtered cathodic vacuum arc deposition[J].Surface review and letters,2012,19(4):1250036.
[13]LIANG J,WANG P,HU L T,et al.Tribological properties of duplex MAO/DLC coatings on magnesium alloy using combined microarc oxidation and filtered cathodic arc deposition[J].Materials science and engineering:A,2007,454-455:164-169.
[14]SUKUROGLU E E,TOTIK Y,ARSLAN E,et al.Analysis of tribo-corrosion properties of MAO/DLC coatings using a duplex process on Ti6Al4V alloys[J].Journal of bio-and tribo-corrosion,2015,1(3):22.
[15]CHEN Z X,REN X P,REN L M,et al.Improving the tribological properties of spark-anodized titanium by magnetron sputtered diamond-like carbon[J].Coatings2018(8):83.
[16]YANG W,DENG Z Z,ZHANG D,et al.Microstructure and tribological behavior of self-lubricating(Si:N)-DLC/MAO coatings on AZ80 magnesium substrate[J].Acta metallurgica sinica(English letters),2013,26(6):693-698.
[17]JIANG J R,ARNELL R D.The effect of substrate surface roughness on the wear of DLC coatings[J].Wear,2000,239(1):1-9.
[18]张柄楠,魏刚,尤社社,等.TC4钛合金微弧氧化膜层成膜机理及特性分析[J].热加工工艺,2018(24):123-125.ZHANG Bing-nan,WEI Gang,YOU She-she,et al.Film forming mechanism and characteristic analysis of TC4 titanium alloy micro-arc oxide film[J].Hot working technology,2018(24):123-125.
[19]乌迪,刘向东,吕凯.负向电压与氧化时间对AZ91D微弧氧化膜层形成特性的影响[J].特种铸造及有色合金,2008(7):564-566.WU Di,LIU Xiang-dong,LV Kai.The influence of negative voltage and oxidation time on the formation characteristics of AZ91D micro-arc oxidation film[J].Special-cast and non-ferrous alloys,2008(7):564-566.
[20]郭宝刚,梁军,陈建敏,等.氧化时间对Ti-6Al-4V微弧氧化膜结构与性能的影响[J].中国有色金属学报,2005(6):981-986.GUO Bao-gang,LIANG Jun,CHEN Jian-min,et al.Effects of oxidation time on microstructure and performance of micro-arc oxidation coatings formed on Ti-6Al-4V alloy[J].Transactions of nonferrous metals society of China,2005(6):981-986.
[21]郭宝刚,梁军,田军,等.阳极电压对钛合金微弧氧化膜性能的影响[J].电镀与精饰,2005(3):1-4.GUO Bao-gang,LIANG Jun,TIAN Jun,et al.The effect of anodic voltage on the performance of micro-arc oxidation film on titanium alloy[J].Plating&finishing,2005(3):1-4.
[22]YANG W,DENG Z N,YANG Z,et al.Characterization and properties of duplex a-C:H/MAO coatings on magnesium alloy using combined microarc oxidation and hybrid magnetron sputtering[J].Journal of Wuhan University of Technology-Mater sci ed,2015,30(4):822-826.
[23]郝康达,苗景国,陈秋荣,等.铝酸钠浓度对7075铝合金微弧氧化膜层特性的影响[J].表面技术,2013,42(3):49-51.HAO Kang-da,MIAO Jing-guo,CHEN Qiu-rong,et al.Effect of sodium aluminate concentration on properties of micro-arc oxidation coatings on aluminum alloy 7075[J].Surface technology,2013,42(3):49-51.
[24]李振东,詹华,王亦奇,等.干摩擦条件下基体粗糙度对Cr-DLC薄膜摩擦磨损性能的影响[J].摩擦学学报,2016,36(6):741-748.LI Zhen-dong,ZHAN Hua,WANG Yi-qi,et al.Effect of substrate roughness on friction and wear properties of Cr-DLC films under dry-sliding condition[J].Tribology,2016,36(6):741-748.
[25]LIU Y,MELETIS E I.Evidence of graphitization of diamond-like carbon films during sliding wear[J].Journal of materials science,1997,32(13):3491-3495.