压电陶瓷装置微位移的光学测量与控制技术
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摘要
微位移装置是指在外力或者电场、磁场等作用下,直接或间接由微结构杠杆放大产生精密微量移动,实现精密定位的装置,例如采用压电陶瓷的逆压电效应、由电压控制产生微位移蠕动。以干涉仪中移相器为典型微位移装置代表,总结多年来科研工作中对微位移装置伸长量的测量与在线标定方法,实现了干涉仪中步长为λ/8(λ=632.8 nm)的准确移相;通过研究基于电容器件的位移反馈,实现了分辨率优于10 nm的精密定位。
Micro displacement is precisely produced either directly by squirm movement,or indirectly by the enlargement effect from the lever with microstructure,driving by the external force,electric field or magnetic field on the micro displacement devices.For example,the piezoelectric transducer is driven by the voltage,to squirm with micro displacement,based on the converse piezoelectric effect.In this article,we summarize measurement and calibration methods of micro displacement of the PZT used as phase shifter of the interferometer to guarantee a phase-shifting step of λ/8(λ=632.8 nm),based on the researches of our group in recent years.The precise positioning with resolution better than 10 nm is achieved by displacement sensing utilizing the feedback of a capacitor on the PZT.
Micro displacement is precisely produced either directly by squirm movement,or indirectly by the enlargement effect from the lever with microstructure,driving by the external force,electric field or magnetic field on the micro displacement devices.For example,the piezoelectric transducer is driven by the voltage,to squirm with micro displacement,based on the converse piezoelectric effect.In this article,we summarize measurement and calibration methods of micro displacement of the PZT used as phase shifter of the interferometer to guarantee a phase-shifting step of λ/8(λ=632.8 nm),based on the researches of our group in recent years.The precise positioning with resolution better than 10 nm is achieved by displacement sensing utilizing the feedback of a capacitor on the PZT.
引文
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[10]王青,陈进榜,陈磊,等.量块的电脑化测试装置[J].航空计测技术,1997,18(1):30-33.(WANG Q,CHEN J B,CHEN L,et al.Gauge block testing device with computer[J].Aviation Metrology&Measurement Technology,1997,18(1):30-33.)
[2]LIU G,ZHANG S,LI L,et al.A 450MHz frequency difference dual-frequency laser with optical feedback[J].Optics Communications,2004,231(1):349-356.
[3]CHEN J,SONG D,ZHU R,et al.Large-aperture high-accuracy phaseshifting digital flat interferometer[J].Optical Engineering,1996,35(7):1936-1942.
[4]姜文汉,杨泽平,官春林,等.自适应光学技术在惯性约束聚变领域应用的新进展[J].中国激光,2009(7):1625-1634.(JIANG W H,YANG Z P,GUAN C L,et al.New progress on adaptive optics in inertial confinement fusion facility[J].Chinese Journal of Lasers,2009(7):1625-1634.)
[5]段小艳,任冬梅.激光干涉法微位移测量技术综述[J].计测技术,2013,32(6):1-5.(DUAN X Y,REN D M.Review of high-esolution measuring method of displacement using laser interferometer[J].Metrology&Measurement Technology,2013,32(6):1-5.)
[6]朱煜,陈进榜,朱日宏,等.压电陶瓷微位移特性的电脑接触式干涉测量法[J].压电与声光,1998,20(4):283-286.(ZHU Y,CHEN J B,ZHU R H,et al.Measurement of computer contact type interferometer on character of piezoelectric ceramic micro-displacement[J].Piezoelectrics&Acoustooptics,1998,20(4):283-286.)
[7]王军,陈磊.基于空间频域算法的白光干涉微位移测量法[J].红外与激光工程,2008,37(5):874-877.(WANG J,CHEN L.Measurement of micro-displacement using white-light interference based on a spatial frequency domain algorithm[J].Infrared and Laser Engineering,2008,37(5):874-877.)
[8]陈泓波,黄向东,刘立丰,等.高精度调频式电容位移传感器[J].仪表技术与传感器,2011(12):10-11.(CHEN H B,HUANG X D,LIU L F,et al.Hig-precision FM displacement capacitance sensor[J].Instrument Technique and Sensor,2011(12):10-11.)
[9]徐飞飞,纪明,赵创社.快速偏转反射镜研究现状及关键技术[J].应用光学,2010,31(5):847-850.(XU F F,JI M,ZHAO C S.Status of fast steeiring mirror[J].Journal of Applied Optics,2010,31(5):847-850.)
[10]王青,陈进榜,陈磊,等.量块的电脑化测试装置[J].航空计测技术,1997,18(1):30-33.(WANG Q,CHEN J B,CHEN L,et al.Gauge block testing device with computer[J].Aviation Metrology&Measurement Technology,1997,18(1):30-33.)