基于电容传感器的精密压电微位移系统研究
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摘要
利用高精度的电容传感器设计了一种带有位移反馈的压电陶瓷精密微位移系统,极大地矫正了压电陶瓷的非线性。设计了高精度的位移检测电路,实时采集电容传感器的电容量并转换成数字信号反馈给DSP,形成位移信息的闭环。结合带有前馈补偿的PID闭环控制策略,矫正压电陶瓷的非线性特性,进而实现微位移系统精密定位。对设计研制的微位移系统进行试验测试,结果表明:位移检测电路的电容分辨率可达0.000 1pF,微位移系统定位精度优于5nm,校正后迟滞误差低于1.0%。
A precision micro-displacement system with displacement feedback was designed by high-precision capacitive sensor,which greatly corrects the nonlinearity of piezoelectric ceramics.A high-precision displacement detection circuit was designed to collect the capacitance of the capacitive sensor in real time and convert it into a digital signal to the DSP to form a closed loop of the displacement information.By combining with the PID closed-loop control strategy with feed forward compensation,the nonlinear characteristics of piezoelectric ceramics were corrected,and the precision displacement of micro-displacement system was realized.The results show that the capacitance resolution of the displacement detection circuit can reach 0.000 1 pF,and the positioning accuracy of micro-displacement system is better than 5 nm,and the hysteresis error after correction is less than 1.0%.
A precision micro-displacement system with displacement feedback was designed by high-precision capacitive sensor,which greatly corrects the nonlinearity of piezoelectric ceramics.A high-precision displacement detection circuit was designed to collect the capacitance of the capacitive sensor in real time and convert it into a digital signal to the DSP to form a closed loop of the displacement information.By combining with the PID closed-loop control strategy with feed forward compensation,the nonlinear characteristics of piezoelectric ceramics were corrected,and the precision displacement of micro-displacement system was realized.The results show that the capacitance resolution of the displacement detection circuit can reach 0.000 1 pF,and the positioning accuracy of micro-displacement system is better than 5 nm,and the hysteresis error after correction is less than 1.0%.
引文
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[3]魏强.纳米定位微位移工作台的控制技术研究[D].济南:山东大学,2006.Wei Qiang.Study on control technology of nano positioning micro-displacement stage[D].Jinan:Shandong University,2006.
[4]王希花.基于压电陶瓷迟滞非线性建模及控制系统的研究[D].哈尔滨:哈尔滨工程大学,2010.Wang Xihua.Research on nonlinear modeling and control system based on piezoelectric ceramics hysteresis[D].Harbin:Harbin Eng.University,2010.
[5]王耿,官春林,等.应变式微型精密压电驱动器的一体化设计及其PID控制[J].光学精密工程,2013,21(3):710-716.Wang Geng,Guan Chunlin.Design and control of miniature piezoelectric actuator based on strain gauge sensor[J].Opt.and Precision Eng.,2013,21(3):710-716.
[6]Shiou F J,Chen C J,Chiang C J,et al.Development of a real-time closed-loop micro-/nano-positioning system embedded with a capacitive sensor[J].Measurement Science&Technol.,2010,21(5):54007-54016.
[7]Fabian T,Prinz F B,Brasseur G.Capacitive sensor for active tip clearance control in a palm-sized gas turbine generator[J].IEEE Trans.on Instrumentation&Measurement,2005,54(3):1133-1143.
[8]成晓强.干涉测量中PZT移相伸长量反馈传感器的设计研究[D].南京:南京理工大学,2014.Cheng Xiaoqiang.Design of PZT phase-shift elasticity feedback sensor in interferometry[D].Nanjing:Nanjing University of Science and Technol.,2014.
[9]刘少刚,李芳,赵丹,等.基于AD7746的微电容检测系统设计[J].应用科技,2011,38(10):2-5.Liu Shaogang,Li Fang,Zhao Dan,et al.Design of microcapacitance measurement system based on AD7746[J].Appl.Science and Technol.,2011,38(10):2-5.
[10]任艳娜,冯志慧,闾素红.基于I2C总线的AD7745控制与读取方法[J].计算机测量与控制,2012,20(6):1544-1572.Ren Yanna,Feng Zhihui,Lv Suhong.A method of controlling and reading of AD7745 based on I2C bus[J].Computer Measurement&Control,2012,20(6):1544-1572.
[11]AnalogDevice Inc.AD7745/AD7746Datasheet[M].Texas:Analog Device Inc.,2005:1-13.
[12]刘泊,郭建英,孙永全.压电陶瓷微位移驱动器建模与控制[J].光学精密工程,2013,21(6):1504-1509.Liu Bo,Guo Jianying,Sun Yongquan.Modeling and control for PZT micro-displacement actuator[J].Opt.Precision Eng.,2013,21(6):1504-1509.
[13]李迎,孙亚飞.基于增量PID的压电微位移器驱动控制系统开发[J].测控技术,2011,30(3):40-44.Li Ying,Sun Yafei.Development of actuation control system of piezoelectric micro-displacement device based on increment PID algorithm[J].Measurement and Control Technol.,2011,30(3):40-44.