YZ-111型压阻真空计的研制
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摘要
介绍了一种基于扩散硅传感器的低真空测量仪表YZ-111型压阻真空计。仪表由传感器单元、信号调理单元、A/D采集单元、中央处理单元、按键和显示单元等组成。该仪器采用进口扩散硅压阻式传感器。信号被调理后由高精度数字采集系统采集、分析,直接输出数字信号。配以温度补偿技术,保证它的高精度。通过用高精度真空计校准,并与之比较,其测量结果达到预期。
A novel type of the piezo-resistive vacuum gauge,model YZ-111,was developed based on the pressure diffusion silicon sensor.The newly-developed low vacuum gauge consists of a US-made piezo-resistive pressure sensor,a signal processing unit,an A/D data acquisition unit,and a microprocessor with a central processing unit,a keyboard,and a display unit.The output signal of the sensor is properly processed before data acquisition,data analysis,and real time display.The original work involved the temperature compensation to the measured pressure to enhance the precision.The measured data with the piezo-resistive vacuum gauge were compared and calibrated with the results evaluated with a conventional,high precision vacuum gauge.The test results live up to the expectation.
A novel type of the piezo-resistive vacuum gauge,model YZ-111,was developed based on the pressure diffusion silicon sensor.The newly-developed low vacuum gauge consists of a US-made piezo-resistive pressure sensor,a signal processing unit,an A/D data acquisition unit,and a microprocessor with a central processing unit,a keyboard,and a display unit.The output signal of the sensor is properly processed before data acquisition,data analysis,and real time display.The original work involved the temperature compensation to the measured pressure to enhance the precision.The measured data with the piezo-resistive vacuum gauge were compared and calibrated with the results evaluated with a conventional,high precision vacuum gauge.The test results live up to the expectation.
引文
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[2]徐言生,李玉春,何钦波,等.大型食品真空冷冻干燥设备控制系统设计与应用研究[J].真空科学与技术学报,2008,28(4):22
[3]罗强,任庆利,罗莉.一种新型智能真空测量仪的研制[J].真空,2000,37(6):40-42
[4]侯俊钦,吴小培,杨一军.微伏信号放大系统设计[M].合肥:安徽大学,2007:198-201
[5]张培仁,孙力.基于C语言C8051F系列微控制器原理与应用[M].北京:清华大学出版社,2007:63-178