A Silicon Shallow-Ridge Waveguide Integrated Superconducting Nanowire Single Photon Detector Towards Quantum Photonic Circuits
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摘要
A silicon shallow-ridge waveguide integrated superconducting nanowire single photon detector is designed and fabricated.At the bias current of 11.6μA,4% on-chip detection efficiency near 1550 nm wavelength is achieved with the dark count rate of 3 Hz and a timing jitter of 75 ps.This device shows the potential application in the integration of superconducting nanowire single photon detectors with a complex quantum photonic circuit.
A silicon shallow-ridge waveguide integrated superconducting nanowire single photon detector is designed and fabricated.At the bias current of 11.6μA,4% on-chip detection efficiency near 1550 nm wavelength is achieved with the dark count rate of 3 Hz and a timing jitter of 75 ps.This device shows the potential application in the integration of superconducting nanowire single photon detectors with a complex quantum photonic circuit.
A silicon shallow-ridge waveguide integrated superconducting nanowire single photon detector is designed and fabricated.At the bias current of 11.6μA,4% on-chip detection efficiency near 1550 nm wavelength is achieved with the dark count rate of 3 Hz and a timing jitter of 75 ps.This device shows the potential application in the integration of superconducting nanowire single photon detectors with a complex quantum photonic circuit.
引文
[1]Chen T Y et al 2010 Opt.Express 18 27217
[2]Sun Q C et al 2016 Nat.Photon.10 671
[3]Liao S K et al 2017 Nature 549 43
[4]Metcalf B J et al 2014 Nat.Photon.8 770
[5]Xiong C et al 2015 Optica 2 724
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[11]Zhang W,You L,Li H,Huang J,Lv C,Zhang L,Liu X,Wu J,Wang Z and Xie X 2017 Sci.Chin.Phys.Mech.60120314
[12]Zadeh I E,Los J W N,Gourgues R B M,Steinmetz V,Bulgarini G,Dobrovolskiy S M,Zwiller V and Dorenbos SN 2017 APL Photon.2 111301
[13]Zhang W J,Yang X Y,Li H,You L X,Lv C L,Zhang L,Zhang C J,Liu X Y,Wang Z and Xie X M 2018 Supercond.Sci.Technol.31 035012
[14]Shibata H,Shimizu K,Takesue H and Tokura Y 2015 Opt.Lett.40 3428
[15]Yang X Y,Li H,Zhang W J,You L X,Zhang L,Liu XY,Wang Z,Peng W,Xie X M and Jiang M H 2014 Opt.Express 22 16267
[16]Sprengers J P,Gaggero A,Sahin D,Jahanmirinejad S,Frucci G,Mattioli F,Leoni R,Beetz J,Lermer M,Kamp M,H?fling S,Sanjines R and Fiore A 2011 Appl.Phys.Lett.99 181110
[17]Pernice W H,Schuck C,Minaeva O,Li M,Goltsman G N,Sergienko A V and Tang H X 2012 Nat.Commun.3 1325
[18]Kahl O,Ferrari S,Kovalyuk V,Goltsman G N,Korneev Aand Pernice W H P 2015 Sci.Rep.5 10941
[19]Rath P,Kahl O,Ferrari S,Sproll F,Lewes-Malandrakis G,Brink D,Ilin K,Siegel M,Nebel C and Pernice W 2015Light:Sci.Appl.4 e338
[20]Schuck C,Guo X,Fan L,Ma X,Poot M and Tang H X2016 Nat.Commun.7 10352
[21]Sibson P,Kennard J E,Stanisic S,Erven C,O’Brien J Land Thompson M G 2017 Optica 4 172
[22]Vlasov Y A and McNab S J 2004 Opt.Express 12 1622
[23]Dong P,Qian W,Liao S,Liang H,Kung C C,Feng N N,Shafiiha R,Fong J,Feng D and Krishnamoorthy A V 2010Opt.Express 18 14474
[24]Annunziata A J,Quaranta O,Santavicca D F,Casaburi A,Frunzio L,Ejrnaes M,Rooks M J,Cristiano R,Pagano S,Frydman A and Prober D E 2010 J.Appl.Phys.108084507
[25]Zhang C,Sun J H,Xiao X,Sun W M,Zhang X J,Chu T,Yu J Z and Yu Y D 2013 Chin.Phys.Lett.30 014207
[2]Sun Q C et al 2016 Nat.Photon.10 671
[3]Liao S K et al 2017 Nature 549 43
[4]Metcalf B J et al 2014 Nat.Photon.8 770
[5]Xiong C et al 2015 Optica 2 724
[6]Santagati R,Silverstone J W,Strain M J,Sorel M,Miki S,Yamashita T,Fujiwara M,Sasaki M,Terai H,Tanner M G,Natarajan C M,Hadfield R H,O’Brien J L and Thompson M G 2017 J.Opt.19 114006
[7]Paesani S,Ding Y,Santagati R,Chakhmakhchyan L,Vigliar C,Rottwitt K,Oxenl?we L K,Wang J,Thompson M G and Laing A 2018 arXiv:1812.03158[quant-ph]
[8]Sibson P,Erven C,Godfrey M,Miki S,Yamashita T,Fujiwara M,Sasaki M,Terai H,Tanner M G,Natarajan C M,Hadfield R H,O’Brien J L and Thompson M G 2017 Nat.Commun.8 13984
[9]Gol’tsman G N,Okunev O,Chulkova G,Lipatov A,Semenov A,Smirnov K,Voronov B,Dzardanov A,Williams C and Sobolewski R 2001 Appl.Phys.Lett.79 705
[10]Marsili F,Verma V B,Stern J A,Harrington S,Lita A E,Gerrits T,Vayshenker I,Baek B,Shaw M D,Mirin R Pand Nam S W 2013 Nat.Photon.7 210
[11]Zhang W,You L,Li H,Huang J,Lv C,Zhang L,Liu X,Wu J,Wang Z and Xie X 2017 Sci.Chin.Phys.Mech.60120314
[12]Zadeh I E,Los J W N,Gourgues R B M,Steinmetz V,Bulgarini G,Dobrovolskiy S M,Zwiller V and Dorenbos SN 2017 APL Photon.2 111301
[13]Zhang W J,Yang X Y,Li H,You L X,Lv C L,Zhang L,Zhang C J,Liu X Y,Wang Z and Xie X M 2018 Supercond.Sci.Technol.31 035012
[14]Shibata H,Shimizu K,Takesue H and Tokura Y 2015 Opt.Lett.40 3428
[15]Yang X Y,Li H,Zhang W J,You L X,Zhang L,Liu XY,Wang Z,Peng W,Xie X M and Jiang M H 2014 Opt.Express 22 16267
[16]Sprengers J P,Gaggero A,Sahin D,Jahanmirinejad S,Frucci G,Mattioli F,Leoni R,Beetz J,Lermer M,Kamp M,H?fling S,Sanjines R and Fiore A 2011 Appl.Phys.Lett.99 181110
[17]Pernice W H,Schuck C,Minaeva O,Li M,Goltsman G N,Sergienko A V and Tang H X 2012 Nat.Commun.3 1325
[18]Kahl O,Ferrari S,Kovalyuk V,Goltsman G N,Korneev Aand Pernice W H P 2015 Sci.Rep.5 10941
[19]Rath P,Kahl O,Ferrari S,Sproll F,Lewes-Malandrakis G,Brink D,Ilin K,Siegel M,Nebel C and Pernice W 2015Light:Sci.Appl.4 e338
[20]Schuck C,Guo X,Fan L,Ma X,Poot M and Tang H X2016 Nat.Commun.7 10352
[21]Sibson P,Kennard J E,Stanisic S,Erven C,O’Brien J Land Thompson M G 2017 Optica 4 172
[22]Vlasov Y A and McNab S J 2004 Opt.Express 12 1622
[23]Dong P,Qian W,Liao S,Liang H,Kung C C,Feng N N,Shafiiha R,Fong J,Feng D and Krishnamoorthy A V 2010Opt.Express 18 14474
[24]Annunziata A J,Quaranta O,Santavicca D F,Casaburi A,Frunzio L,Ejrnaes M,Rooks M J,Cristiano R,Pagano S,Frydman A and Prober D E 2010 J.Appl.Phys.108084507
[25]Zhang C,Sun J H,Xiao X,Sun W M,Zhang X J,Chu T,Yu J Z and Yu Y D 2013 Chin.Phys.Lett.30 014207