N含量对ZrCuAl(N)涂层结构及抗腐蚀性能的影响
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摘要
采用磁控溅射方法在ZrCuAl非晶涂层中掺杂不同含量N,采用X射线衍射仪、扫描电子显微镜、透射电子显微镜、原子力显微镜等对涂层的显微结构进行表征,采用纳米压痕仪、显微硬度仪、划痕仪评估涂层的力学性能,通过极化试验评估涂层的抗腐蚀性能。结果表明,N掺杂可将涂层的硬度提高约3倍,弹性模量提高约2倍,结合力从1.51 N增加到22.76 N,但涂层的韧性有所下降。同时,N掺杂可使涂层发生钝化现象,提高涂层的耐腐蚀能力。当掺杂N原子数分数为35.8%时,涂层经极化试验后无点蚀现象,表面保持良好的形貌,无腐蚀迹象。因此,一定含量的N掺杂能同时提高Zr基非晶涂层的力学性能和耐蚀能力。
Different N content were added into the ZrCuAl amorphous coating by magnetron sputtering. X-ray diffractometry,scanning electron microscopy, transmission electron microscopy and atomic force microscopy were performed to analyze the microstructure of the coatings. Meanwhile, the mechanical properties of the coatings were measured by nanoindentation,scratch tester as well as microhardness tester, and the corrosion behaviors of the coatings were evaluated by polarization experiments as well as salt spray tests. The results show that the hardness and elastic modulus of ZrCuAlN coatings increase by about 3 times and 2 times, respectively, and the adhesive strength increases from 1.51 N to 22.76 N; however, the toughness decreases slightly. Moreover, the coatings containing N atom occur passivate behavior and have better pitting resistance. When the N content is 35.8%, the coating does not exhibit pitting behavior after the polarization test, and the surface maintains good morphology without signs of corrosion. Therefore, a certain amount of N addition can simultaneously improve the mechanical properties and corrosion resistance of zirconium-based amorphous coatings.
Different N content were added into the ZrCuAl amorphous coating by magnetron sputtering. X-ray diffractometry,scanning electron microscopy, transmission electron microscopy and atomic force microscopy were performed to analyze the microstructure of the coatings. Meanwhile, the mechanical properties of the coatings were measured by nanoindentation,scratch tester as well as microhardness tester, and the corrosion behaviors of the coatings were evaluated by polarization experiments as well as salt spray tests. The results show that the hardness and elastic modulus of ZrCuAlN coatings increase by about 3 times and 2 times, respectively, and the adhesive strength increases from 1.51 N to 22.76 N; however, the toughness decreases slightly. Moreover, the coatings containing N atom occur passivate behavior and have better pitting resistance. When the N content is 35.8%, the coating does not exhibit pitting behavior after the polarization test, and the surface maintains good morphology without signs of corrosion. Therefore, a certain amount of N addition can simultaneously improve the mechanical properties and corrosion resistance of zirconium-based amorphous coatings.
引文
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[2]CHU C W,JANG J S C,CHIU S M,et al.Study of the characteristics and corrosion behavior for the Zr-based metallic glass thin film fabricated by pulse magnetron sputtering process[J].Thin Solid Films,2009,517:4930-4933.
[3]LEE J,HUANG K H,HSU K C,et al.Applying compostition control to improve the mechanical and thermal properties of Zr-Cu-Ni-Al thin film metallic glass by magnetron[J].Surface&Coatings Technology,2015,278:132-137.
[4]CHEN P S,CHEN H W,DUH J G,et al.Characterization of mechanical properties and adhesion of Ta-Zr-Cu-Al-Ag thin film metallic glasses[J].Surface&Coatings Technology,2013,231:332-336.
[5]CHANG J-C,LEE J-W,LOU B-S,et al.Effects of tungsten contents on the microstructure,mechanical and anticorrosion properties of Zr-W-Ti thin film metallic glasses[J].Thin Solid Films,2015,584:253-256.
[6]LI Y H,ZHANG W,DONG C,et al.Effects of addition on the glass-forming ability,mechanical properties and corrosion resistance of Zr-Cu-Al bulk metallic glasses[J].Materials Science and Engineering A,2011,528:8551-8556.
[7]GREEN B A,MEYER H M,BENSON R S,et al.A study of the corrosion behavior of Zr50Cu(40-X)Al10Pd X bulk metallic glasses with scanning Auger microanalysis[J].Corrosion Science,2008,50:1825-1832.
[8]SCULLY J R,GEBERT A,PAYER J H.Corrosion and related mechanical properties of bulk metallic glasses[J].Journal of Materials Research,2007,22(2):302-313.
[9]CHUANG C Y,LEE J W,LI C L,et al.Mechanical properties study of a magnetron-sputtered Zr-based thin film metallic glass[J].Surface&Coatings Technology,2013,215:312-321.
[10]CHEN P S,CHEN H W,DUH J G,et al.Mechanical and thermal behaviors of nitrogen-doped Zr-Cu-Al-Ag-Ta--An alternative class of thin film metallic glass[J].Applied Physics Letters,2012,101:181902.
[11]LEE J,TUNG H C,DUH J G.Enhancement of mechanical and thermal properties in Zr-Cu-Ni-Al-N thin film metallic glass by compositional control of nitrogen[J].Materials Letters,2015,159:369-372.
[12]HUANG H H,HUANG H M,LIN M C,et al.Enhancing the bio-corrosion resistance of Ni-free ZrCuFeAl bulk metallic g l a s s t h r o u g h n i t r o g e n p l a s m a i m m e r s i o n i o n implantation[J].Journal of Alloys and Compounds,2014,615:S660-S665.
[13]LEE J,LIOU M L,DUH J G.The development of a Zr-CuAl-Ag-N thin film metallic glass coating in pursuit of improved mechanical,corrosion,and antimicrobial property for bio-medical application[J].Surface&Coatings Technology,2017,310:214-222.
[14]王军勇.离子渗氮用气对后续磁控溅射镀层性能的影响[J].中国表面工程,2011,24(3):24-27.WANG J,CHEN B,SUN H.Efffect of plasma nitriding gas on the subsequent magnetron sputtered coatings[J].China Surface Engineering,2011,24(3):24-27(in Chinese).
[15]HUANG F,GE F,ZHU P,et al.Superhard V-Si-N coatings(>50 GPa)with the cell-like nanostructure prepared by magnetron sputtering[J].Surface&Coatings Technology,2013,232:600-605.
[16]CONSTABLE C P,YARWOOD J,MüNZ W-D.Raman microscopic studies of PVD hard coatings[J].Surface&Coatings Technology,1999,116-119:155-159.
[17]SINGH A,P.K,KHAN S,et al Influence of nitrogen flow rate on microstructural and nanomechanical properties of ZrN thin films prepared by pulsed DC magnetron sputtering[J].Applied Surface Science,2013,280.
[18]SINGH A,KUMAR N,KUPPUSAMI P,et al.Tribological properties of sputter deposited ZrN coatings on titanium modified austenitic stainless steel[J].Wear,2012,280-281:22-27.
[19]MUSIL J.Hard nanocomposite coatings:Thermal stability,oxidation resistance and toughness[J].Surface&Coatings Technology,2012,207:50-65.
[20]LIN J G,WANG W W,WU X Q,et al.Crystallization and corrosion resistance of as-spun(Al86Ni9La5)98Zr2 amorphous alloy[J].Journal of Alloys and Compounds,2009,478:763-767.
[21]HUANG C H,LAI J J,WEI T Y,et al.Improvement of biocorrosion resistance for Ti42Zr40Si15Ta3 metallic glasses in simulated body fluid by annealing within supercooled liquid region[J].Materials Science and Engineering C,2015,52:144-150.
[22]CHUANG C Y,LIAO Y C,LEE J W,et al.Electrochemical characterization of Zr-based thin film metallic glass in hydrochloric aqueous solution[J].Thin Solid Films,2013,529:338-341.
[23]NKOU BOUALA G I,ETIEMBLE A,LOUGHIAN C D,et al.Silver influence on the antibacterial activity of multi-functional Zr-Cu based thin film metallic glasses[J].Surface&Coatings Technology,2018,343:108-114.
[24]NAN L,YANG K.Cu ions dissolution from Cu-bearing antibacterial stainless steel[J].Journal of Materials Science and Technology,2010,26(10):941-944.
[25]LEE P Y,CHENG Y M,CHEN J Y,et al.Formation and corrosion behavior of mechanically-alloyed Cu-Zr-Ti bulk metallic glasses[J].Metals,2017,7:148.
[26]CHOU W-J,YU G-P,HUANG J-H.Corrosion resistance of ZrN films on AISI 304 stainless steel substrate[J].Surface&Coatings Technology,2003,167:59-67.
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