基于纳米划痕仪的单晶锗纳米沟槽加工实验研究
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摘要
为了提高纳米锗器件的制造精度,使用纳米划痕仪对单晶锗进行纳米沟槽刻划加工实验,采用扫描电子显微镜对沟槽形貌进行观察,并通过三维白光干涉表面形貌仪测量其三维形貌尺寸,研究了切削速度、施加的垂直载荷及刻划次数对单晶锗纳米沟槽形貌的影响。建立了垂直载荷和刻划次数与沟槽深度及宽度的线性拟合曲线和幂函数拟合曲线,并进行分析。结果表明,单晶锗纳米沟槽的宽度和深度随切削速度的变化非常小,随着垂直载荷的增大,刻划次数的增多而逐渐增大。曲线的拟合度很高,能够对制造纳米沟槽的深度和宽度进行较为准确的预测,从而可以降低工件表面粗糙度,提高工件表面质量。
In order to improve the manufacturing precision of nanoscale germanium, nano-scratch instrument was used to process thenanogrooves of single crystal germanium. The morphology of the groove was observed by scanning electron microscope, and thethree-dimensional morphology was measured by the three-dimensional white light interferometer. The effects of the cutting speed, the appliedvertical load and scratching number on the morphology of single crystal germanium nanogrooves were studied. Linear fitting curves and powerfunction fitting curves of vertical load and number of scratches with groove depth and width were established and analyzed. The results showthat the width and depth of single crystal germanium nanogrooves increases slightly with the cutting speed, and with the increase of vertical load,the scratching number increases. The fitting degree of the curve is very high. It can predict the depth and width of the nanoscale groove moreaccurately, which can reduce the surface roughness of the workpiece and improve the surface quality of the workpiece.
In order to improve the manufacturing precision of nanoscale germanium, nano-scratch instrument was used to process thenanogrooves of single crystal germanium. The morphology of the groove was observed by scanning electron microscope, and thethree-dimensional morphology was measured by the three-dimensional white light interferometer. The effects of the cutting speed, the appliedvertical load and scratching number on the morphology of single crystal germanium nanogrooves were studied. Linear fitting curves and powerfunction fitting curves of vertical load and number of scratches with groove depth and width were established and analyzed. The results showthat the width and depth of single crystal germanium nanogrooves increases slightly with the cutting speed, and with the increase of vertical load,the scratching number increases. The fitting degree of the curve is very high. It can predict the depth and width of the nanoscale groove moreaccurately, which can reduce the surface roughness of the workpiece and improve the surface quality of the workpiece.
引文
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[2]Okazaki S.Microelectronic Engineering[J],2015,133(5):23
[3]Geng Yanquan,Emmanuel B Brousseau.Precision Engineering[J],2018,51:536
[4]Geng Yanquan,Yan Yongda.Journal of Materials Processing Technology[J],2017,248:236
[5]Geng Yanquan,Yan Yongda.Applied Surface Science[J],2014,313(15):615
[6]Jiang Xiaohong,Wu Guoyun.Nanoscale Research Letters[J],2011,6:518
[7]Dong Zhuxin,Uchechukwu C Wejinya.Applied Surface Science[J],2012,258(22):8689
[8]Vieira L,Lucas F L C.Surface&Coatings Technology[J],2014,260(15):205
[9]Wang Z Q,Tung S.Wear[J],2012,278-279(8):71
[10]Wang Yongguang,Chen Yao,Zhao Dong et al.Applied Surface Science[J],2018,447(31):100
[11]Chen L,Persson J,Stahl J E et al.Journal of Superhard Materials[J],2017,39(5):365
[12]Liu Xiaoming,Liu Zhanli,Wei Yueguang.Computational Materials Science[J],2015,110:54
[13]Josefina Ballarrea,Damian A López,Ana L Cavalieri.Wear[J],2009,11-12:1165
[14]Beake B D.Surface&Coatings Technology[J],2017,309(15):671
[15]Beake B D,Liskiewicz T W,Smith J F.Surface&Coatings Technology[J],2011,25(7):1921
[16]Auezhan Amanov,Shinya Sasaki,In-Sik Cho.Materials and Design[J],2013,47:386
[17]Shota Higashino,Masao Miyake.Surface&Coatings Technology[J],2017,325(25):346
[18]Tseng A A.Applied Surface Science[J],2010,256(13):4246
[19]Tseng A A.Small[J],2011,7(24):3409