探针卡在芯片产业化中的应用分析
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摘要
芯片产业化过程中,涉及到大量探针卡的应用,探针卡对芯片测试非常重要;根据不同的标准对探针及探针卡进行分类;针对不同应用环境,分析了探针卡的选取方法;最后给出了探针卡的存放和使用相关规范,对探针卡的设计、加工及芯片的中测测试应用具有一定的参考作用。
Probe card is widely used in chip industrialization, It is very important for the chip testing; In this paper,the probe and probe card are classified according to different standards; The selection method of probe card is analyzed according to different application environment; Finally, the relevant rules for the storage and use about probe card are given. This paper has reference function for the design, manufacture and test of probe card.
Probe card is widely used in chip industrialization, It is very important for the chip testing; In this paper,the probe and probe card are classified according to different standards; The selection method of probe card is analyzed according to different application environment; Finally, the relevant rules for the storage and use about probe card are given. This paper has reference function for the design, manufacture and test of probe card.
引文
[1]杨跃胜.探针卡维护检修标准[S].深圳市远望谷信息技术股份有限公司.企业标准Q/SY 0612-2014.
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[4]蔡瑾.晶圆探针卡的分类和设计参数[J].科学技术,2014(1):174-174.
[5]黄荣堂,赖文雄.晶圆级探针卡简介[Z],台北科技大学机电整合研究所.2010.
[6]刘晓兰,朱政强,党元兰等.基于体硅MEMS技术的悬浮微结构加工工艺研究[J].电子与封装,2015(7):34-70.
[7]李健,孙兵.半自动弯针机的设计与实现——悬臂式环氧树脂探针卡的制造[J].工业控制计算机.2007,20(11):35-35.
[2]张革平,蔡军.探针卡设计与技术改进[J].微电子技术,1995(2):51-53.
[3]牛刚.一种探针卡[P].中国实用新型专利:CN204269692U,2015.4.15.
[4]蔡瑾.晶圆探针卡的分类和设计参数[J].科学技术,2014(1):174-174.
[5]黄荣堂,赖文雄.晶圆级探针卡简介[Z],台北科技大学机电整合研究所.2010.
[6]刘晓兰,朱政强,党元兰等.基于体硅MEMS技术的悬浮微结构加工工艺研究[J].电子与封装,2015(7):34-70.
[7]李健,孙兵.半自动弯针机的设计与实现——悬臂式环氧树脂探针卡的制造[J].工业控制计算机.2007,20(11):35-35.