P20钢等离子体氮化/DLC双重处理研究
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摘要
为了提高DLC膜与P20塑料模具钢基体间的结合强度,采用高功率大电流脉冲电源,实现P20钢氮化及氮化/DLC连续双重处理。采用SEM、XRD和显微硬度仪对其表面结构、相组成及显微硬度进行测试分析,结果表明:氮化处理增大试样表面粗糙度,氮化层由γ'-Fe4N相和ε-Fe(2,3) N相组成,硬度由240HV0.05上升到830HV0.05;压痕法结合力测试和摩擦磨损实验结果表明,氮化处理提高DLC膜基结合力和摩擦磨损性能。
In order to improve the adhesion of DLC film with plastic die steel P20,duplex treatment of plasma nitriding/DLC on P20 steel was achieved successfully by Meshed Plasma Immersion Ion Deposition Technical for the first time. The nitriding layer is composed of γ'-Fe4 N phase and ε-Fe( 2,3) N phase. The nitriding treatment increases the surface roughness of the sample and the hardness increases from 240HV0.05 to 830HV0.05. DLC film was prepared on the surface of polished and nitrided samples,and the test results of indentation method and friction and wear experiment indicated that nitriding treatment improved the adhesion and the friction and wear resistance of P20 steel.
In order to improve the adhesion of DLC film with plastic die steel P20,duplex treatment of plasma nitriding/DLC on P20 steel was achieved successfully by Meshed Plasma Immersion Ion Deposition Technical for the first time. The nitriding layer is composed of γ'-Fe4 N phase and ε-Fe( 2,3) N phase. The nitriding treatment increases the surface roughness of the sample and the hardness increases from 240HV0.05 to 830HV0.05. DLC film was prepared on the surface of polished and nitrided samples,and the test results of indentation method and friction and wear experiment indicated that nitriding treatment improved the adhesion and the friction and wear resistance of P20 steel.
引文
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[2]B.Feng,D.M.Cao,W.J.Meng,et al.Characterization of microstructure and mechanical behavior of sputter deposited Ticontaining amorphous carbon coatings[J].Surface and Coatings Technology.2001,148:153-162.
[3]K.Bewilogua,U,C.V.Cooper,C.Specht,et al.Effect of target material on deposition and properties of metal-containing DLC(Me-DLC)coatings[J].Surface and Coatings Technology.2000,127:224-232.
[4]T.Michler,M.Grischke,K.Bewilogua,et al.Continuously deposited duplex coatings consisting of plasma nitriding and aC:H:Si deposition[J].Surface and Coatings Technology.1999,111:41-45.
[5]H.Mori,H.Tachikawa.Increased adhesion of diamond-like carbon-Si coatings and its tribological properties[J].Surface and Coatings Technology.2002,149:225-230.
[6]K.Nakanishi,H.Mori,H.Tachikawa,et al.Investigation of DLC-Si coatings in large-scale production using DC-PACVDequipment[J].Surface and Coatings Technology.2006,200:4277-4281.
[7]Li C X,Georges J,Li X Y.Active screen plasma nitriding of austenitic stainless steel[J].Surface Engineering.2002,18(6):453-458.
[8]Ronghua Wei,Chris Rincon,Edward Langa.U.S.Patent20090286012A1.2009.
[9]Ronghua Wei.Development of new technologies and practical applications of plasma immersion ion deposition(PIID)[J].Surface and Coatings Technology.2010,204(18-19):2869-2874.
[10]Figueroa CA,Wisnivesky Daniel,Alvarez F.Effect of hydrogen and oxygen on stainless steel nitriding[J].Journal of Applied Physics.2004,92(2):764e70.
[11]S.Corujeira Gallo.Active screen plasma surface engineering of austenitic stainless steel for enhanced tribological and corrosion properties[J].Metallurgy and Materials,2009,292.
[12]Per Hedenqvist,Mikael Olsson,?Staffan Jacobson.Failure mode analysis of Ti N-coated high speed steel:?In situscratch adhesion testing in the scanning electron microscope[J].Surface and Coatings Technology.1990,41(1):31-49.
[13]Mansoureh Ebrahimi,Farzad Mahboubi,M.Reza Naimi-Jamal.Wear behavior of DLC lm on plasma nitrocarburized AISI4140 steel by pulsed DC PACVD:Effect of nitrocarburizing temperature[J].Diamond&Related Materials.2015,52:32-37.
[14]薛群基,王立平.类金刚石碳基薄膜材料[M].北京,科学出版社,2012:238.
[15]Ali Erdemir.Genesis of superlow friction and wear in diamondlike carbon lms[J].Tribology International.2004,37:1005-1012.