掺杂元素对TiAlN涂层结构及性能的影响
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摘要
TiAlN涂层具有良好的化学稳定性、高的热硬性、良好的抗氧化性、高的膜/基结合力以及优异的耐磨性,是目前应用范围最广的工具表面硬质涂层之一,适合各种干切削场合并逐步替代Ti N涂层。随着高速切削的快速发展,TiAlN涂层逐渐难以满足现代刀具高速切削的要求,针对TiAlN基多元涂层的研究在近几年得到了国内外广泛的关注,通过掺杂微量元素对TiAlN涂层结构及性能进行优化是提升TiAlN涂层综合性能的有效方法。本文重点讨论Si、Cr、Y、V和B等元素对TiAlN涂层结构和性能的影响,为TiAlN硬质涂层进一步开发应用提供一定的依据。
The TiAlN coatings is one of the most widely used coatings in hard tools and molds,which have excellent chemical stability,high red hardness,splendid oxidation resistance and wear resistance,and suitable for dry cutting occasion. TiAlN coating is regarded as a new kind of coating material with excellent performance which has been replaced Ti N coating successfully,and has a very broad application prospect. However,with the rapid development of high speed cutting,the TiAlN coatings become more and more difficult to meet the requirements of modern cutting tools. The research of multcoatings based on TiAlN has attracted wide spread attention at home and abroad in recent years. This paper introduces the influence of Si,Cr,Y,V and B alloying elements on the structure and properties of TiAlN coatings,and provides some basis for the diversification of TiAlN hard coating.
The TiAlN coatings is one of the most widely used coatings in hard tools and molds,which have excellent chemical stability,high red hardness,splendid oxidation resistance and wear resistance,and suitable for dry cutting occasion. TiAlN coating is regarded as a new kind of coating material with excellent performance which has been replaced Ti N coating successfully,and has a very broad application prospect. However,with the rapid development of high speed cutting,the TiAlN coatings become more and more difficult to meet the requirements of modern cutting tools. The research of multcoatings based on TiAlN has attracted wide spread attention at home and abroad in recent years. This paper introduces the influence of Si,Cr,Y,V and B alloying elements on the structure and properties of TiAlN coatings,and provides some basis for the diversification of TiAlN hard coating.
引文
[1]朱丽慧,胡涛,彭笑,等.Al含量对Ti Al N涂层结合强度的影响[J].材料热处理学报,2015,36(3):154-158.
[2]刘爱华.PVD氮化物涂层的高温摩擦磨损特性及机理研究[D].济南:山东大学,2012.
[3]刘建华,邓建新,张庆余.Ti Al N涂层刀具的发展与应用[J].工具技术,2006,40(4):9-13.
[4]张雨萌,朱丽慧,倪旺阳,等.Al含量对Ti Al N涂层热稳定性能的影响[J].中南大学学报(自然科学版),2013,44(7):2696-2701.
[5]王目孔,马瑞新,林炜,等.Ti Al N硬质薄膜/涂层材料的研究进展[J].硬质合金,2008(3):186-191.
[6]金犁.多弧离子镀制备Ti_(1-x)Al_x N涂层的工艺及其性能研究[D].武汉:武汉科技大学,2006.
[7]胡志杰,李争显,王宝云,等.工艺参数对Ti合金表面电弧离子镀Ti Al N涂层的性能影响[J].热加工工艺,2008,37(12):109-112.
[8]蒋涛.40Cr表面多弧离子镀Ti Al N_Ti N复合膜层的工艺及性能研究[D].镇江:江苏科技大学,2009.
[9]曹娅.多弧离子镀Ti Al N涂层的研究进展[J].科技创新与应用,2014(5):24-25.
[10]王新.炮钢表面磁控溅射制备Ti Al VN膜层及性能的研究[J].沈阳:沈阳工业大学,2017.
[11]Tillmann W,Momeni S,Hoffmann F.A study of mechanical and tribological properties of self-lubricating Ti Al VN coatings at elevated temperatures[J].Tribology International,2013(66):324-329.
[12]李德元,王新,金浩,等.V元素对Ti Al VN膜层组织和抗热震性能的影响[J].沈阳工业大学学报,2017,39(2):137-141.
[13]毛延发,唐为国,刘金良,等.Ti Al N纳米复合涂层的技术进展[J].工具技术,2006,40(4):20-24.
[14]李超,王健,强力,等.反应磁控溅射制备Ti Al VN薄膜及性能研究[J].甘肃科学学报,2016,28(3):40-43.
[15]宋庆功,辛慧.磁控溅射Ti Al VN薄膜中V含量对其结构和抗腐蚀性能的影响[J].材料保护,2011,44(2):61
[16]程立军,宋庆功.磁控溅射制备Ti Al Cr N硬质薄膜及其抗腐蚀性能[J].材料保护,2009,42(9):16-18.
[17]陈灵,曾德长,邱万奇,等.Ti Al Cr N和Ti Al Cr N/Cr N复合膜的微观组织与力学性能[J].中国有色金属学报,2009(9):1608-1612.
[18]Santana A E,Karimi A,Derflinger V,et al.Microstructure and mechanical behavior of Ti Al Cr N multilayer thin films[J].Surface and Coatings Technology,2004(177):334-340.
[19]胡涛,朱丽慧,刘振宇,等.Si、Cr的加入对Ti Al N涂层抗氧化性能的影响[J].硬质合金,2014(3):155-160.
[20]王赛玉,蔺绍江,陈肖.Ti Al Cr N涂层的高温氧化行为[J].中国有色金属学报,2013(8):2267-2273.
[21]汝强,胡社军,黄拿灿,等.电弧离子镀Ti Al Cr N多元涂层的性能研究[J].金属热处理,2008,33(3):51-54.
[22]Qiang R U,Shejun H U,N Huang,et al.Properties of Ti AlCr N coatings prepared by vacuum cathodic arc ion plating[J].Rare Metals,2008,27(3):251-256.
[23]Wang S,Chen K,Chen L,et al.Effect of Al and Si addtions on microstructure and mechanical properties of Ti N coatings[J].Journal of Central South University of Technology,2011(18):310-313.
[24]王成蹊.合金化对Ti Al N涂层结构稳定性及性能影响的研究[D].广州:华南理工大学,2013.
[25]朱鹏志,朱颖,李刘合.Ti Al Si N涂层刀具的发展与应用[J].新技术新工艺,2014(5):105-110.
[26]Wang S Q,Chen L,Yang B,et al.Effect of Si addition on microstructure and mechanical properties of Ti-Al-N coating[J].International Journal of Refractory Metals and Hard Materials,2010,28(5):593-596.
[27]Belous V A,Vasyliev V V,Goltvyanytsya V S,et al.Structure and properties of Ti-Al-Y-N coatings deposited from filtered vacuum-arc plasma[J].Surface and Coatings Technology,2011,206(7):1720-1726.
[28]Belous V A,Vasyliev V V,Luchaninov A,et al.Cavitation and abrasion resistance of Ti-Al-Y-N coatings prepared by the PIII&D technique from filtered vacuum-arc plasma[J].Surface and Coatings Technology,2013(223):68-74.
[29]王均涛,刘平,李伟,等.Ti Al N硬质涂层的研究进展[J].热加工工艺,2010,39(20):104-109.
[30]余东海,王成勇,张凤林.刀具涂层材料研究进展[J].工具技术,2007(41):25-32.
[31]Baker M A,Monclus M A,Rebholz C,et al.A study of the nanostructure and hardness of electron beam evaporated Ti Al BN coatings[J].Thin Solid Films,2010,518(15):4273-4280.
[2]刘爱华.PVD氮化物涂层的高温摩擦磨损特性及机理研究[D].济南:山东大学,2012.
[3]刘建华,邓建新,张庆余.Ti Al N涂层刀具的发展与应用[J].工具技术,2006,40(4):9-13.
[4]张雨萌,朱丽慧,倪旺阳,等.Al含量对Ti Al N涂层热稳定性能的影响[J].中南大学学报(自然科学版),2013,44(7):2696-2701.
[5]王目孔,马瑞新,林炜,等.Ti Al N硬质薄膜/涂层材料的研究进展[J].硬质合金,2008(3):186-191.
[6]金犁.多弧离子镀制备Ti_(1-x)Al_x N涂层的工艺及其性能研究[D].武汉:武汉科技大学,2006.
[7]胡志杰,李争显,王宝云,等.工艺参数对Ti合金表面电弧离子镀Ti Al N涂层的性能影响[J].热加工工艺,2008,37(12):109-112.
[8]蒋涛.40Cr表面多弧离子镀Ti Al N_Ti N复合膜层的工艺及性能研究[D].镇江:江苏科技大学,2009.
[9]曹娅.多弧离子镀Ti Al N涂层的研究进展[J].科技创新与应用,2014(5):24-25.
[10]王新.炮钢表面磁控溅射制备Ti Al VN膜层及性能的研究[J].沈阳:沈阳工业大学,2017.
[11]Tillmann W,Momeni S,Hoffmann F.A study of mechanical and tribological properties of self-lubricating Ti Al VN coatings at elevated temperatures[J].Tribology International,2013(66):324-329.
[12]李德元,王新,金浩,等.V元素对Ti Al VN膜层组织和抗热震性能的影响[J].沈阳工业大学学报,2017,39(2):137-141.
[13]毛延发,唐为国,刘金良,等.Ti Al N纳米复合涂层的技术进展[J].工具技术,2006,40(4):20-24.
[14]李超,王健,强力,等.反应磁控溅射制备Ti Al VN薄膜及性能研究[J].甘肃科学学报,2016,28(3):40-43.
[15]宋庆功,辛慧.磁控溅射Ti Al VN薄膜中V含量对其结构和抗腐蚀性能的影响[J].材料保护,2011,44(2):61
[16]程立军,宋庆功.磁控溅射制备Ti Al Cr N硬质薄膜及其抗腐蚀性能[J].材料保护,2009,42(9):16-18.
[17]陈灵,曾德长,邱万奇,等.Ti Al Cr N和Ti Al Cr N/Cr N复合膜的微观组织与力学性能[J].中国有色金属学报,2009(9):1608-1612.
[18]Santana A E,Karimi A,Derflinger V,et al.Microstructure and mechanical behavior of Ti Al Cr N multilayer thin films[J].Surface and Coatings Technology,2004(177):334-340.
[19]胡涛,朱丽慧,刘振宇,等.Si、Cr的加入对Ti Al N涂层抗氧化性能的影响[J].硬质合金,2014(3):155-160.
[20]王赛玉,蔺绍江,陈肖.Ti Al Cr N涂层的高温氧化行为[J].中国有色金属学报,2013(8):2267-2273.
[21]汝强,胡社军,黄拿灿,等.电弧离子镀Ti Al Cr N多元涂层的性能研究[J].金属热处理,2008,33(3):51-54.
[22]Qiang R U,Shejun H U,N Huang,et al.Properties of Ti AlCr N coatings prepared by vacuum cathodic arc ion plating[J].Rare Metals,2008,27(3):251-256.
[23]Wang S,Chen K,Chen L,et al.Effect of Al and Si addtions on microstructure and mechanical properties of Ti N coatings[J].Journal of Central South University of Technology,2011(18):310-313.
[24]王成蹊.合金化对Ti Al N涂层结构稳定性及性能影响的研究[D].广州:华南理工大学,2013.
[25]朱鹏志,朱颖,李刘合.Ti Al Si N涂层刀具的发展与应用[J].新技术新工艺,2014(5):105-110.
[26]Wang S Q,Chen L,Yang B,et al.Effect of Si addition on microstructure and mechanical properties of Ti-Al-N coating[J].International Journal of Refractory Metals and Hard Materials,2010,28(5):593-596.
[27]Belous V A,Vasyliev V V,Goltvyanytsya V S,et al.Structure and properties of Ti-Al-Y-N coatings deposited from filtered vacuum-arc plasma[J].Surface and Coatings Technology,2011,206(7):1720-1726.
[28]Belous V A,Vasyliev V V,Luchaninov A,et al.Cavitation and abrasion resistance of Ti-Al-Y-N coatings prepared by the PIII&D technique from filtered vacuum-arc plasma[J].Surface and Coatings Technology,2013(223):68-74.
[29]王均涛,刘平,李伟,等.Ti Al N硬质涂层的研究进展[J].热加工工艺,2010,39(20):104-109.
[30]余东海,王成勇,张凤林.刀具涂层材料研究进展[J].工具技术,2007(41):25-32.
[31]Baker M A,Monclus M A,Rebholz C,et al.A study of the nanostructure and hardness of electron beam evaporated Ti Al BN coatings[J].Thin Solid Films,2010,518(15):4273-4280.