高性能金属氧化物基气敏材料研究及应用
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摘要
金属氧化物基气敏材料是新型气体传感器的核心组成部分,近年来发展迅速。围绕金属氧化物基气敏材料的作用机理、特征参数、性能强化及工业应用进行了阐述和展望。重点分析了金属掺杂、结构薄膜化以及多元复合技术在强化金属氧化物基气敏材料性能方面的研究。在此基础上,对今后的研究方向和趋势作了展望。
Gas sensing material based on metal oxide is the core component of new type gas sensor and the development about this field is very rapid.In the present paper hereby the principle of gas sensing,reaction mechanism,characteristic parameters,performance enhancement and industrial applications are reviewed.The improvement of gas sensing performance by doping various metals,using thin-film structure and hybrid multiple composites of metal oxide are mainly disscussed.On this basis,the future research directions and trends are prospected.
Gas sensing material based on metal oxide is the core component of new type gas sensor and the development about this field is very rapid.In the present paper hereby the principle of gas sensing,reaction mechanism,characteristic parameters,performance enhancement and industrial applications are reviewed.The improvement of gas sensing performance by doping various metals,using thin-film structure and hybrid multiple composites of metal oxide are mainly disscussed.On this basis,the future research directions and trends are prospected.
引文
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3 Siyama T,Kato A.A new detector for gaseous components using semiconductive thin films[J].Anal Chem,1962,34(11):1502
4 Kreno L E,Leong K,Farha O K,et al.Metal-organic framework materials as chemical sensors[J].Chem Rev,2012,112(2):1105
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6 Telipan G.The structure and gas sensing characteristics ofγ-Fe2O3semiconductor oxide[M].Sci Press,1999:1
7 孙良彦,刘正绣.系列常温气敏元件的研制[J].传感器世界,1996,2(4):27
8 王雪文,张智勇.传感器原理及应用[M].北京:北京航空航天大学出版社,2004
9 Shaver P J.Activated tungsten oxide gas detectors[J].Appl Phys Lett,1967,11(8):255
10 Chandra S R,Hari K S,Vivekchand S R C,et al.Hydrogen and ethanol sensors based on ZnO nanords,nanowires and nantubes[J].Chem Phys Lett,2006,418(4):586
11 Park S,Kim H,Jin C,et al.Enhanced CO gas sensing properties of Pt-functionalized WO3 nanorods[J].Thermochim Acta,2012,542(6):69
12 侯振雨,李芸岭,李延方,等.Ag掺杂SnO2气敏元件性能的研究[J].化工新型材料,2015,42(1):182
13 毛永强,王继仁,李娜,等.钴掺杂二氧化锡溶剂热法制备及其气敏性能研究[J].化工新型材料,2014,41(7):117
14 管自生,蒋文曲,张玉,等.碘修饰多钼酸的制备及其气敏性能[J].材料科学与工程学报,2008,26(3):372
15 徐爽,杨颖,邬洪源,等.一维Pt/SnO2纳米纤维的制备及NOx气敏性研究[J].无机材料学报,2013,28(6):584
16 王晓兵,李培,娄向东,等.铁掺杂In2O3纳米粉体及其气敏性能研究[J].传感器与微系统,2011,30(1):13
17 胡英,周晓华.CuO-ZnO敏感材料气敏机理的研究[J].电子元件与材料,2001,20(4):5
18 薛天锋,胡季帆,秦宏伟,等.掺铝ZnO纳米粉的制备与气敏特性研究[J].金属功能材料,2003,10(8):20
19 裴素华,赛道建,孟繁英,等.Nb2O5对TiO2响TMA气敏特性的改善[J].传感技术学报,2000,13(1):48
20 吴树荣,傅刚,陈环,等.WO3掺杂对NiO基纳米材料VOCs气体气敏性能的影响[J].传感器与微系统,2011,30(10):56
21 牛新书,杜卫平,杜卫民,等.杂稀土氧化物的ZnO材料的制备及气敏性能[J].稀土,2003,24(6):44
22 王晓平.稀土掺杂ZnO半导体气敏传感器的性能研究[J].湘潭大学自然科学学报,1999,21(4):109
23 刘芳.稀土掺杂ZnO纳米纤维的制备及气敏性能研究[D].郑州:郑州大学,2013
24 宋金玲,郭冠铭,周长才,等.水热法制备稀土元素掺杂二氧化锡及其对乙醇气敏性能[J].过程工程学报,2013,38(3):531
25 Gao X Y,Wang S Y,Li J,et al.Study of structure and optical properties of silver oxide films by ellipsometry,XRD and XPS methods[J].Thin Solid Films,2003,455-456:438
26 Zhang D H,Li C,Liu X L,et al.Doping dependent NH3sensing of indium oxide nanowires[J].Appl Phys Lett,2003,83(9):1845
27 Varghese O K,Gong D,Paulose M,et al.Hydrogen sensing using titania nanotubes[J].Sensor Actuat B:Chem,2003,93(1):338
28 刘艳丽,李桂芝.Au纳米粒子对ZnO分级结构的气敏特性影响[J].湖南大学学报,2013,40(6):69
29 Zhuiykov S,Wlodarski W,Li Y.NanocrystallineV2O5-TiO2thin films for prepared by sol-gel process[J].Sensor Actuat B:Chem,2001,77(1):484
30 高兆芬,李辉,徐甲强,等.Pd掺杂SnO2气敏薄膜XPS分析及其气敏性能研究[J].电子元件与材料,2011,30(5):26
31 Han X G,Jin M S,Xie S F,et al.Synthesis of tin dioxide octahedral nanoparticles with exposed high-energy{221}facets and enhanced gas-sensing properties[J].Angew Chem,2009,48(48):9180
32 魏昂,黄维,徐春祥,等.基于水热法制备的ZnO纳米棒的CO传感器[J].发光学报,2007,38(6):880
33 白翠彩,刘秀军,郭玉高.锡掺杂氧化锌薄膜乙醇气敏性的研究[J].天津工业大学学报,2012,31(1):13
34 李艳峰,吴兴惠,王正显,等.MSnO3系气敏材料的研究[J].云南大学学报:自然科学版,1997,19(1):51
35 徐甲强,沈嘉年,王焕新,等.CdSnO3纳米材料的室温固相合成及其气敏特性研究[J].传感技术学报,2004,17(2):265
36 徐甲强,贾晓华,娄向东,等.Zn2SnO4气敏材料的水热合成及其掺杂改性[J].传感技术学报,2005,18(4):693
37 牛新书,杜卫民,杜卫平,等.DyFeO3纳米材料的制备及H2S敏感特性[J].稀有金属材料与工程,2005,34(1):124
38 娄向东,贾晓华,徐甲强,等.固相合成CuFe2O4及其气敏性能[J].硅酸盐学报,2006,34(10):1119
39 Liu Y L,Liu Z M,Yang Y,et al.Simple synthesis of MgFe2O4nanoparticles as gas sensing materials[J].Sensor Actuat B:Chem,2005,107(2):600
40 牛新书,杜卫民,杜卫平,等.纳米晶HoFeO3的合成及其气敏性能研究[J].化学物理学报,2004,17(1):79
41 方少明,彭辉,赵玛,等.钙钛矿型SmFeO3纳米材料的制备及酒敏特性研究[J].功能材料,2007,38(9):3546
42 杨留方,李星,赵鹤云,等.超细MgFe2O4复合氧化物的气敏性能研究[J].传感器技术,2004,23(11):15
43 Yang L F,Xie Y A,Zhao H Y,et al.Preparation and gas-sensing properties of NiFe2O4semiconductor materials[J].Solid-State Electron,2005,49(6):1029
44 Siemons M,Leifert A,Simon U.Preparation and gas sensing characteristics of nanoparticulate p-type semiconducting LnFeO3 and LnCrO3 materials[J].Adv Funct Mater,2007,17(13):2189
45 潘丽华,詹自力,蒋登高,等.ZnIn2O4的制备、结构表征与气敏性能[J].传感器世界,2005,11(12):18
46 Mahanubhav M D,Patil L A.Studies on gas sensing performance of CuO-modified CdIn2O4thick film resistors[J].Sensor Actuat B:Chem,2007,128(1):186
47 Tealdi C,Islam M S,Fisher C A J,et al.Defect and transport properties of the NdCoO3catalyst and sensor material[J].Prog Solid State Chem,2007,35(2):491
48 Delgado E,Michel C R.CO2and O2sensing behavior of nanostructured barium-doped SmCoO3[J].Mater Lett,2006,60(13):1613
49 Litzelman S J,Rothschild A,Tuller H L.The electrical properties and stability of SrTi0.65Fe0.35O3-δthin films for automotive oxygen sensor applications[J].Sensor Actuat B:Chem,2005,108(1):231
50 Zhang L,Hu J F,Song P,et al.Formaldehyde-sensing characteristics of perovskite La0.68Pb0.32FeO3nano-materials[J].Physica B:Condensed Matter,2005,370(1):259
51 Song P,Hu J F,Qin H W,et al.Preparation and ethanol sensitivity of nanocrystalline La0.7Pb0.3FeO3-based gas sensor[J].J Phys Chem Solids,2007,68(4):511
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