AZO/Ag/AZO透明导电薄膜的制备及其物性分析
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摘要
文章在溶胶燃烧法制备的AZO薄膜的基础上,将银层导入其中,制备出AZO/Ag/AZO三层结构透明导电薄膜。并对得到的透明导电薄膜进行分析研究。最终成功降低了溶胶燃烧法制备的薄膜的电阻率。
In this paper, based on the AZO thin films prepared by sol combustion method, the silver layerwas introduced into it,and the AZO/Ag/AZO three-layer transparent conductive thin films were prepared. The transparent conductive thin films were analyzed and studied. Finally, the resistivity of the films prepared by sol combustion method was successfully reduced.
In this paper, based on the AZO thin films prepared by sol combustion method, the silver layerwas introduced into it,and the AZO/Ag/AZO three-layer transparent conductive thin films were prepared. The transparent conductive thin films were analyzed and studied. Finally, the resistivity of the films prepared by sol combustion method was successfully reduced.
引文
[1]蔡雅欣.超声喷雾热分解法制备ZnO基纳米薄膜及其特性研究[D].长春:吉林大学,2015.
[2]Tabassum S, Yamasue E, Okumura H. Electrical stability of Al-doped ZnO transparent electrode prepared by sol-gel method[J]. Applied Surface Science,2016,377:355-360.
[3]Liu Y, Gorla C R, Liang S, N Emanetoglu, Y Lu. Ultraviolet detectors based on epitaxial ZnO films grown by MOCVD[J]. Journal of Electronic Materials,2000,29(1):69-74.
[2]Tabassum S, Yamasue E, Okumura H. Electrical stability of Al-doped ZnO transparent electrode prepared by sol-gel method[J]. Applied Surface Science,2016,377:355-360.
[3]Liu Y, Gorla C R, Liang S, N Emanetoglu, Y Lu. Ultraviolet detectors based on epitaxial ZnO films grown by MOCVD[J]. Journal of Electronic Materials,2000,29(1):69-74.