锆基金属玻璃电化学特性及微细电解线切割实验研究
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摘要
针对金属玻璃的微加工特性,采用工件运动方式,利用微细电解线切割技术对锆基金属玻璃进行加工试验,探索锆基金属玻璃在不同溶液中的电化学特性,研究了电解质与溶液浓度对加工缝宽与质量的影响。结果表明:Cl-的加入提升了加工过程中钝化膜破裂速率和材料去除速率;电解质浓度越高,所需脉宽越小,加工缝宽越大,但过低浓度的电解质会导致加工无法正常进行。经过筛选,在锆基金属玻璃0.1 mol/L的HCl溶液中加工效果最好,加工出的锆基金属玻璃微缝轮廓光滑,且裂缝单边间隙仅为1.35μm。
For the micro-machining properties of metallic glass,the wire electrochemical micro-machining technology by the mass transfer method of workpiece movement is proposed for Zr-based metallic glass processing. The electrochemical properties of Zr-based metallic glass in different solutions were explored,and the effects of electrolyte and solution concentration on the width and quality of the slit were investigated. The results show that chloride ion could improve the rate of passivation film cracking and material removal. In addition,the higher concentration of electrolyte requires required a smaller pulse width but greater machining seam width,whereas less than a certain concentration will result in the inability to process. After a selection process,the Zr-based metallic glass shows a best processing effect and smooth micro-slit profile in a 0.1 mol/L solution of hydrogen chloride,and a single-sided gap of only 1.35 μm is detected under this condition.
For the micro-machining properties of metallic glass,the wire electrochemical micro-machining technology by the mass transfer method of workpiece movement is proposed for Zr-based metallic glass processing. The electrochemical properties of Zr-based metallic glass in different solutions were explored,and the effects of electrolyte and solution concentration on the width and quality of the slit were investigated. The results show that chloride ion could improve the rate of passivation film cracking and material removal. In addition,the higher concentration of electrolyte requires required a smaller pulse width but greater machining seam width,whereas less than a certain concentration will result in the inability to process. After a selection process,the Zr-based metallic glass shows a best processing effect and smooth micro-slit profile in a 0.1 mol/L solution of hydrogen chloride,and a single-sided gap of only 1.35 μm is detected under this condition.
引文
[1]汪卫华.金属玻璃研究简史[J].物理,2011,40(11):701-709.
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[10] MENG Lingchao,ZENG Yongbin,ZHU Di. Investigation on wire electrochemical micro machining of Ni-based metallic glass[J]. Electrochim Acta,2017,233:274-283.
[11] COLE K,KIRK D,SINGH C V,et al. Optimizing electrochemical micromachining parameters for Zr-based bulk metallic glass[J]. Journal of Manufacturing Processes,2017,25:227-234.
[12] KOZA J A,SUPTITZ R,UHLEMANN M,et al.Electrochemical micromachining of a Zr-based bulk metallic glass using a micro-tool electrode technique[J].Intermetallics,2011,19(4):437-444.
[13]王少华,朱荻,曲宁松,等.微细缝结构电解加工研究[J].中国机械工程,2009(8):965-970.
[14] GEBERT A,GOSTIN P F,SUEPTITZ R,et al.Polarization studies of Zr-based bulk metallic glasses for electrochemical machining[J]. Journal of The Electrochemical Society,2014,161(4):E66-E73.
[15] MENG Lingchao,ZENG Yongbin,FANG Xiaolong,et al.Micro-shaping of metallic glass by wire electrochemical micro-machining with a reciprocating traveling workpiece[J]. Journal of Alloys and Compounds,2018,739:235-248.
[16]夏远亮,焦炜,王志军,等.碱式磷酸铁复合络合物的合成及絮凝作用的研究[J].黑龙江商学院学报(自然科学版),2000(2):90-93.
[2] INOUE A,TAKEUCHI A. Takeuchi. Recent development and application products of bulk glassy alloys[J]. Acta Materialia,2011,59(6):2243-2267.
[3]汪卫华.非晶态物质的本质和特性[J].物理学进展,2013,33(5):177-351.
[4] BAKKAL M,LIU C T,WATKINS T R,et al. Oxidation and crystallization of Zr-based bulk metallic glass due to machining[J]. Intermetallics,2004,12(2):195-204.
[5] QUINTANA I,DOBREV T,ARANZABE A,et al.Investigation of amorphous and crystalline Ni alloys response to machining with micro-second and picosecond lasers[J]. Applied Surface Science,2009,255(13-14):6641-6646.
[6] HUANG Hu,YAN Jiwang. On the surface characteristics of a Zr-based bulk metallic glass processed by microelectrical discharge machining[J]. Applied Surface Science,2015,355:1306-1315.
[7] SCHUSTER R,KIRCHNER V V,ALLONGUE P,et al.Electrochemical micromachining[J]. Science,2000,289(5476):98-101.
[8] SUEPTITZ R,HORN S,STOICA M,et al. Electrochemical micromachining of passive electrodes-application to bulk metallic glasses[J]. Journal of Materials Processing Technology,2015,219:193-198.
[9] HORN S,OSWALD S,STOICA M,et al. Complex microshaping of bulk metallic glass surfaces by electrochemical means[J]. Journal of Materials Research,2015,30(22):3493-3501.
[10] MENG Lingchao,ZENG Yongbin,ZHU Di. Investigation on wire electrochemical micro machining of Ni-based metallic glass[J]. Electrochim Acta,2017,233:274-283.
[11] COLE K,KIRK D,SINGH C V,et al. Optimizing electrochemical micromachining parameters for Zr-based bulk metallic glass[J]. Journal of Manufacturing Processes,2017,25:227-234.
[12] KOZA J A,SUPTITZ R,UHLEMANN M,et al.Electrochemical micromachining of a Zr-based bulk metallic glass using a micro-tool electrode technique[J].Intermetallics,2011,19(4):437-444.
[13]王少华,朱荻,曲宁松,等.微细缝结构电解加工研究[J].中国机械工程,2009(8):965-970.
[14] GEBERT A,GOSTIN P F,SUEPTITZ R,et al.Polarization studies of Zr-based bulk metallic glasses for electrochemical machining[J]. Journal of The Electrochemical Society,2014,161(4):E66-E73.
[15] MENG Lingchao,ZENG Yongbin,FANG Xiaolong,et al.Micro-shaping of metallic glass by wire electrochemical micro-machining with a reciprocating traveling workpiece[J]. Journal of Alloys and Compounds,2018,739:235-248.
[16]夏远亮,焦炜,王志军,等.碱式磷酸铁复合络合物的合成及絮凝作用的研究[J].黑龙江商学院学报(自然科学版),2000(2):90-93.