阵列光电传感器的非线性校正
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摘要
阵列光电传感器在接近饱和时表现出非线性,但是可以通过阵列传感器的线性区的系数外推得到修正,而且只需在一个波长位置测得曝光量与A/D转换值的响应曲线,将能够推广到任意波长位置。为此,利用最小二乘法进行多项式拟合和软件的非线性校正,在同等硬件配置的条件下,增加了线阵传感器的线性区,延拓了传感器的动态范围。在整个动态范围内,系统测量误差可以减少到±2%。此非线性校正方法也非常适用于光电阵列传感器的光谱仪生产厂的强度定标校正。
Optoelectronic array sensors exhibit nonlinearity near saturation,but can be corrected by extrapolating the coefficients in the linear region of the array sensors. The response curve between exposure and A/D conversion can be extended to any wavelength position as long as the exposure curveis measured at one wavelength position. For this reason,the least square method is used through polynomial fitting and software nonlinearity correction. Under the same hardware configuration,the linear region of linear array sensor is added,and the dynamic range of sensor is extended. In the whole dynamic range,the measurement error of the system can be reduced to ± 2%. This non-linear correction method is also very suitable for intensity calibration correction in spectrometer production factories using photoelectric array sensors.
Optoelectronic array sensors exhibit nonlinearity near saturation,but can be corrected by extrapolating the coefficients in the linear region of the array sensors. The response curve between exposure and A/D conversion can be extended to any wavelength position as long as the exposure curveis measured at one wavelength position. For this reason,the least square method is used through polynomial fitting and software nonlinearity correction. Under the same hardware configuration,the linear region of linear array sensor is added,and the dynamic range of sensor is extended. In the whole dynamic range,the measurement error of the system can be reduced to ± 2%. This non-linear correction method is also very suitable for intensity calibration correction in spectrometer production factories using photoelectric array sensors.
引文
[1]童建平,董少波,杨浩,等.基于S11639的紫外-可见光谱仪的设计[J].光学仪器,2015,37(3):272-277.Tong J P,Dong S B,Yang H,et al.The design of UV-VIS spectrometer based on S11639[J].Optical Instruments,2015,37(3):272-277.
[2]谢印忠,庄松林,张保洲.基于线阵CCD的光谱仪定标研究[J].仪器仪表学报,2011,32(3):546-550.Xie Y Z,Zhuang S L,Zhang B Z.Research on calibration of spectrometers based on linear CCD[J].Chinese Journal of Scientific Instrument,2011,32(3):546-550.
[3]赵发财,王淑荣,曲艺,等.新型高分辨率紫外-可见成像光谱仪波长定标系统设计[J].光电工程,2010,37(7):92-96.Zhao F C,Wang S R,Qu Y,et al.Design of a new-type high spectral resolution UV-VIS spectrometer wavelength calibration system[J].Opto-Electronic Engineering,2010,37(7):92-96.
[4]任建伟,张艳琪,叶钊,等.CCD辐射响应函数矩阵的建立与应用[J].光学精密工程,2012,20(5):957-962.Ren J W,Zhang Y Q,Ye Z,et al.Establishment and application of CCD radiation response function matrix[J].Optics and Precision Engineering,2012,20(5):957-962.
[5]贺元兴,李新阳.CCD光电响应非线性特性对激光远场焦斑测量及光束质量计算的影响[J].中国激光,2012,39(4):139-146.He Y X,Li X Y.Analysis of Influence of CCD's Nonlinear response characterization on measurement results of focal spot and beam quality[J].Chinese Journal of Lasers,2012,39(4):139-146.
[6]刘亚群,唐顺兴,郭亚晶,等.CCD光电响应非线性特性对高功率激光光束质量评价的影响[J].中国激光,2015,42(4):1-10.Liu Y Q,Tang S X,Guo Y J,et al.Analysis of Influence of CCD's nonlinear photoelectric characterization on evaluating the high power laser beam quality[J].Chinese Journal of Lasers,2015,42(4):1-10.
[7]赵友全,江磊,何峰,等.线阵CCD光电响应非线性特性测定与分析[J].光电工程,2015,42(7):19-23.Zhao Y Q,Jiang L,He F,et al.Measurement and analysis of linear CCD nonlinear optical response characteristics[J].Opto-Electronic Engineering,2015,42(7):19-23.
[8]杜瑾,李杰,冯凯强,等.多项式拟合在MEMS陀螺仪零点随机漂移抑制中的应用研究[J].传感技术学报,2016,29(5):729-732.Du J,Li J,Feng K Q,et al.Zero drift random error compensating methods for MEMS gyros based on polynomial fitting algorithm[J].Chinese Journal of Sensors and Actuators,2016,29(5):729-732.
[9]景文博,张汝平,王晓曼,等.CCD的非线性响应特性对光束质量测量的影响及修正[J].红外与激光工程,2017,46(8):127-134.Jing W B,Zhang R P,Wang X M,et al.Impact and correction of CCD nonlinear response on measurement of the laser beam quality[J].Infrared and Engineering,2017,46(8):127-134.
[10]程书博,张惠鸽,王哲斌,等.科学级光学CCD非线性特性测试[J].光学学报,2012,32(4):39-44.Cheng S B,Zhang H G,Wang Z B,et al.Nonlinearity property testing of the scientific grade optical CCD[J].Acta Optica Sinica,2012,32(4):39-44.
[11]张宁,刘宇龙,吴嘉辉,等.微型光谱仪的CCD数据采集系统设计[J].红外与激光工程,2015,44(1):141-147.Zhang N,Liu Y L,Wu J H,et al.Design of CCD data acquisition system of miniature spectrometer[J].Infrared and Laser Engineering,2015,44(1):141-147.
[12]童建平,高建勋,汪飞,等.微型光谱仪中传感器S11639的非线性校正[J].光电工程,2017,44(11),1101-1106.Tong J P,Gao J X,Wang F,et al.Nonlinear correctionof the sensor S11639 in mini-spectrometer[J].Opto-Electronic Engineering,2017,44(11),1101-1106.
[13]Oceanoptics Inc.,Deuteriumtungsten-halogencalibrationlight sourceinstallation and operation manual[EB].http://www.oceanoptics.cn/product/178,2009,8-9.
[2]谢印忠,庄松林,张保洲.基于线阵CCD的光谱仪定标研究[J].仪器仪表学报,2011,32(3):546-550.Xie Y Z,Zhuang S L,Zhang B Z.Research on calibration of spectrometers based on linear CCD[J].Chinese Journal of Scientific Instrument,2011,32(3):546-550.
[3]赵发财,王淑荣,曲艺,等.新型高分辨率紫外-可见成像光谱仪波长定标系统设计[J].光电工程,2010,37(7):92-96.Zhao F C,Wang S R,Qu Y,et al.Design of a new-type high spectral resolution UV-VIS spectrometer wavelength calibration system[J].Opto-Electronic Engineering,2010,37(7):92-96.
[4]任建伟,张艳琪,叶钊,等.CCD辐射响应函数矩阵的建立与应用[J].光学精密工程,2012,20(5):957-962.Ren J W,Zhang Y Q,Ye Z,et al.Establishment and application of CCD radiation response function matrix[J].Optics and Precision Engineering,2012,20(5):957-962.
[5]贺元兴,李新阳.CCD光电响应非线性特性对激光远场焦斑测量及光束质量计算的影响[J].中国激光,2012,39(4):139-146.He Y X,Li X Y.Analysis of Influence of CCD's Nonlinear response characterization on measurement results of focal spot and beam quality[J].Chinese Journal of Lasers,2012,39(4):139-146.
[6]刘亚群,唐顺兴,郭亚晶,等.CCD光电响应非线性特性对高功率激光光束质量评价的影响[J].中国激光,2015,42(4):1-10.Liu Y Q,Tang S X,Guo Y J,et al.Analysis of Influence of CCD's nonlinear photoelectric characterization on evaluating the high power laser beam quality[J].Chinese Journal of Lasers,2015,42(4):1-10.
[7]赵友全,江磊,何峰,等.线阵CCD光电响应非线性特性测定与分析[J].光电工程,2015,42(7):19-23.Zhao Y Q,Jiang L,He F,et al.Measurement and analysis of linear CCD nonlinear optical response characteristics[J].Opto-Electronic Engineering,2015,42(7):19-23.
[8]杜瑾,李杰,冯凯强,等.多项式拟合在MEMS陀螺仪零点随机漂移抑制中的应用研究[J].传感技术学报,2016,29(5):729-732.Du J,Li J,Feng K Q,et al.Zero drift random error compensating methods for MEMS gyros based on polynomial fitting algorithm[J].Chinese Journal of Sensors and Actuators,2016,29(5):729-732.
[9]景文博,张汝平,王晓曼,等.CCD的非线性响应特性对光束质量测量的影响及修正[J].红外与激光工程,2017,46(8):127-134.Jing W B,Zhang R P,Wang X M,et al.Impact and correction of CCD nonlinear response on measurement of the laser beam quality[J].Infrared and Engineering,2017,46(8):127-134.
[10]程书博,张惠鸽,王哲斌,等.科学级光学CCD非线性特性测试[J].光学学报,2012,32(4):39-44.Cheng S B,Zhang H G,Wang Z B,et al.Nonlinearity property testing of the scientific grade optical CCD[J].Acta Optica Sinica,2012,32(4):39-44.
[11]张宁,刘宇龙,吴嘉辉,等.微型光谱仪的CCD数据采集系统设计[J].红外与激光工程,2015,44(1):141-147.Zhang N,Liu Y L,Wu J H,et al.Design of CCD data acquisition system of miniature spectrometer[J].Infrared and Laser Engineering,2015,44(1):141-147.
[12]童建平,高建勋,汪飞,等.微型光谱仪中传感器S11639的非线性校正[J].光电工程,2017,44(11),1101-1106.Tong J P,Gao J X,Wang F,et al.Nonlinear correctionof the sensor S11639 in mini-spectrometer[J].Opto-Electronic Engineering,2017,44(11),1101-1106.
[13]Oceanoptics Inc.,Deuteriumtungsten-halogencalibrationlight sourceinstallation and operation manual[EB].http://www.oceanoptics.cn/product/178,2009,8-9.