摘要
采用自行设计的导模法蓝宝石长晶装备,通过优化模具设计和长晶工艺,成功生长了内/外径分别为31/58 mm和50/65 mm,长度超过300 mm的大尺寸厚壁蓝宝石单晶圆管,无开裂多晶,无肉眼可见气泡,晶体质量优良。
High quality large sapphire tubes were successfully formed via self-designed crystal-growth equipment using Edgedefined Film-fed Growth( EFG) Method. The inner/outer diameters of the tubes were 31/58 mm and 50/65 mm respectively,and the length of the tube exceeded 300 mm. No crack,polycrystalline structure or visible bubble was observed in the tube.
引文