MEMS无线无源电容压力传感器结构设计及制备
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摘要
设计了一种无线无源电容压力传感器。传感器采用MEMS工艺由硅-玻璃浆料-硅键合而成,独特的三层结构设计用以实现高温环境下的测量。应用有限元分析软件对传感器结构进行了仿真分析,并详细介绍了其加工工艺;引进了一种新型的非接触无源测量技术,用于检测传感器压敏电容极板间距的变化。测试结果表明,传感器可以实现外界压力信号与谐振频率信号之间的转化,传感器在0~200 kPa压力下,谐振频率随压力变化近似成线性关系且谐振频率随压力的增大逐渐减小,灵敏度约为10.6 kHz/kPa。
A wireless passive capacitive pressure sensor was designed and fabricated. This sensor was proposed to operate under high temperature due to its unique silicon-glass paste-silicon sandwiched structure. The structural parameters was determinated by finite element analysis,as well as the detailed process flow was introduced. Furthermore,a non-contact passive measurement technology was presented to detect the change of the embed capacitance of the sensor in a distance. The test results show that the relation between an applied pressure signal and the shift of the resonance frequency is successfully located,the resonance frequency drops linearly as the applied pressure rises from 0 to 200 kPa with a sensitivity of10. 6 kHz / kPa approximately.
A wireless passive capacitive pressure sensor was designed and fabricated. This sensor was proposed to operate under high temperature due to its unique silicon-glass paste-silicon sandwiched structure. The structural parameters was determinated by finite element analysis,as well as the detailed process flow was introduced. Furthermore,a non-contact passive measurement technology was presented to detect the change of the embed capacitance of the sensor in a distance. The test results show that the relation between an applied pressure signal and the shift of the resonance frequency is successfully located,the resonance frequency drops linearly as the applied pressure rises from 0 to 200 kPa with a sensitivity of10. 6 kHz / kPa approximately.
引文
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[2]吕浩杰,胡国清,邹卫,等.高性能MEMS电容压力传感器的设计及其热分析[J].光学精密工程,2010,18(5):1166-1174.
[3]FONSECA M A,ENGLISH J M,ARX M,et al.Wireless micromachined ceramic pressure sensor for hightemperature applications[J].Journal of Microelectro Mechanical Systems,2002,8(4):337-343.
[4]种传波.基于MEMS技术的压力传感器研究[D].北京:北京工业大学机械工程,2008.
[5]HSU T R.MEMS和微系统:设计与制造[M].王晓浩,译.北京:机械工业出版社,2004:91-96.
[6]谢龙汉,耿煜,邱婉.ANSYS电磁场分析[M].北京:电子工业出版社,2012:1-3.
[7]张凯,顾豪爽,胡光,等.MEMS中硅的深度湿法刻蚀研究[J].湖北大学学报(自然科学版),2007,29(3):255-257.
[8]陈骁,罗乐.采用精密印刷技术的玻璃浆料圆片级气密封装[J].功能材料与器件学报,2010,16(3):227-232.
[9]ARSHAK K,JAFER E.Modeling of wireless based sensors data acquisitions systems used for esophagus monitoring[J].Sensors and Actuators:A,2008,142(1):390-397.
[10]杨芳.电容变化的无线读取方法及其关键技术研究[D].太原:中北大学电子与科学技术学院,2012.