基于显微数字全息的FPA热机械灵敏度测量
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摘要
焦平面阵列是光学读出非制冷红外成像系统的重要部分。在理论分析的基础上设计了一个显微数字全息系统,测量了一种FPA的热机械灵敏度,结果为0.199deg/K。实验还发现FPA反光板上不同位置处热机械灵敏度是不同的,实验给出了热机械灵敏度随到反光板固定端距离的变化函数关系式。
The focal plane array is the key part of optical readout uncooled infrared imaging system. Based on theoretical analysis,a digital holographic microscopy system was designed for measuring the FPA thermo-mechanical sensitivity,and the experimental result was 0. 199 deg/K. Experiment also shown that the sensitivity on different position of reflector was not the same,and gave out the function of thermo-mechanical sensitivity changing curve based on the distance to the fixed end.
The focal plane array is the key part of optical readout uncooled infrared imaging system. Based on theoretical analysis,a digital holographic microscopy system was designed for measuring the FPA thermo-mechanical sensitivity,and the experimental result was 0. 199 deg/K. Experiment also shown that the sensitivity on different position of reflector was not the same,and gave out the function of thermo-mechanical sensitivity changing curve based on the distance to the fixed end.
引文
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[14]程腾,张青川,高杰,等.光学读出非制冷红外成像技术的光学灵敏度分析[J].光学学报,2012,32(2):44-56.
[15]董凤良,张青川,伍小平,等.双材料微梁阵列非制冷红外成像系统——微梁阵列的设计与制作[J].红外与毫米波学报,2005,24(6):409-413.
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[18]董可平,钱晓凡,张磊,等.数字全息显微术对细胞的研究[J].光子学报,2007,36(11):2013-2016.
[19]钱晓凡,王占亮,胡特,等.用单幅数字全息和剪切干涉原理重构光场相位[J].中国激光,2010,37(7):1821-1826.
[2]张宝华,刘鹤.基于区域定位与轮廓分割的红外目标检测[J].激光技术,2015,39(6):840-844.
[3]王建宇,李春来,姬弘桢,等.热红外高光谱成像技术的研究现状与展望[J].红外与毫米波学报,2015,34(1):51-59.
[4]Rogalski A.Infrared detectors:status and trends[J],Progress in Quantum Electronics,2003,27(2):59-210.
[5]Hunter S R,Amantea R A,Goodman L A et al.,High sensitivity uncooled microcantilever infrared imaging arrays[J],Proceeding of SPIE,2003,5074:469-480.
[6]冯涛,金伟其,司俊杰.非制冷红外焦平面探测器及其技术发展动态[J].红外技术,2015,37(3):177-184.
[7]Dieter Lohrmann,Roy Littleton,Colin Reese,et al.Uncooled long-wave infrared small pixel focal plane array and system challenges[J].Optical Engineering,2013,52(6):061305.
[8]杨宇,郝晓剑,武耀燕,等.基于电热偶动态校准的非线性拟合方法研究[J].激光技术,2014,38(2):145-148.
[9]Varesi J,Lai J,Perazzo T,et al.Photothermal measurements at picowatt resolution using uncooled micro-optomechanical sensors[J],Appl.Phys.Lett.,1997,71(3):306-308.
[10]张勇,程腾,张青川,等,基于光学读出非制冷红外成像系统的无基底FPA等效电学模型[J].红外与毫米波学报2013,32(5):394.
[11]李芮,李晓,王志斌,等.阵列探测器在成像光谱偏振探测技术中的应用[J].激光技术,2014,28(6):822-825.
[12]缪正宇,张青川,陈大鹏,等.双材料微梁阵列室温物体红外成像[J].物理学报,2006,55(7):3208-3214.
[13]马晓燠,樊志华,饶长辉,等.基于哈特曼波前传感器的非制冷红外成像光学读出系统[J].光学学报,2009,29(2):490-495.
[14]程腾,张青川,高杰,等.光学读出非制冷红外成像技术的光学灵敏度分析[J].光学学报,2012,32(2):44-56.
[15]董凤良,张青川,伍小平,等.双材料微梁阵列非制冷红外成像系统——微梁阵列的设计与制作[J].红外与毫米波学报,2005,24(6):409-413.
[16]蒋兴凯,张青川,史海涛,等.基于无基底焦平面阵列红外热像仪的理论模型分析[J].物理学报,2011,60(5):415-424.
[17]谢敬辉,孙萍.全息术的新进展[J].北京理工大学学报,2003,23(2):133-139.
[18]董可平,钱晓凡,张磊,等.数字全息显微术对细胞的研究[J].光子学报,2007,36(11):2013-2016.
[19]钱晓凡,王占亮,胡特,等.用单幅数字全息和剪切干涉原理重构光场相位[J].中国激光,2010,37(7):1821-1826.