基于介观压光效应的MEMS陀螺研究
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摘要
依据介观压光效应原理,设计出了一种新型高灵敏谐振式MEMS陀螺,其利用镜像异质三周期光子晶体的介观压光效应代替传统压阻式微陀螺中的力敏电阻器,当光子晶体受轴向应力作用时,其透射率随之发生变化,因此,通过检测透射光强可解算出输入角速度的大小。陀螺结构采用4对梳齿电容驱动,驱动模块与检测模块相互独立,其具有耦合效应小,机械灵敏度高的特点。经数值计算与仿真分析,得到该微陀螺频率匹配率为0.6%,透射率灵敏度达到73μcd/(°)/s,证明了其频率匹配良好,可实现高灵敏度的角速度的测量。
According to the theory of mesoscopic calender effect,a novel high-sensitive resonant MEMS gyroscope is designed. The mesoscopic calender effect of mirror heterotrimer periodic photonic crystal is used as the basic principle instead of the varistor of traditional piezoresistive microgyroscope. When the axial stress is loaded on photonic crystal,its transmission rate will change,and the angular velocity can be calculated by detecting the intensity of the transmitted light. The structure of the gyroscope is driven by four pairs of comb-capacitance,the drive module and detection module are independent,the coupling coefficient is pretty small,and the mechanical sensitivity are quite high. By numerical calculation and simulation analysis,the micro-gyro frequency matching rate is 0. 6 % and sensitivity of transmissivity is 73μcd /( °) / s are obtained which demonstrate the frequency-match is good and the angular measurement with high sensitivity can be realized.
According to the theory of mesoscopic calender effect,a novel high-sensitive resonant MEMS gyroscope is designed. The mesoscopic calender effect of mirror heterotrimer periodic photonic crystal is used as the basic principle instead of the varistor of traditional piezoresistive microgyroscope. When the axial stress is loaded on photonic crystal,its transmission rate will change,and the angular velocity can be calculated by detecting the intensity of the transmitted light. The structure of the gyroscope is driven by four pairs of comb-capacitance,the drive module and detection module are independent,the coupling coefficient is pretty small,and the mechanical sensitivity are quite high. By numerical calculation and simulation analysis,the micro-gyro frequency matching rate is 0. 6 % and sensitivity of transmissivity is 73μcd /( °) / s are obtained which demonstrate the frequency-match is good and the angular measurement with high sensitivity can be realized.
引文
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[6]Li Qianli,XU Liping,Wang Zhibin,et al.Effect of uniaxial stress on photon localization of one-dimensional photonic crystals with a mirror symmetry[J].Acta Physica Sinica,2013,18:249-254.
[7]李锡广,李孟委,王莉,等.MEMS陀螺中带孔结构空气阻尼建模分析[J].微纳电子技术,2012(11):009.
[2]成宇翔,张卫平,陈文元,等.MEMS微陀螺仪研究进展[J].微纳电子技术,2011,48(5):277-285.
[3]李红梅,许丽萍,温延敦.介观压光型加速度传感器[J].传感器与微系统,2013,32(11):112-114.
[4]黄堃,温廷敦,许丽萍,等.光量子阱结构中的介观压光效应[J].硅谷,2011(6):31-33.
[5]Wang Hui,Li Yongping.An eigen matrix method for obtaining the band structure of photonic crystals[J].Acta Physica Sinica,2001,50(11):2172-2178.
[6]Li Qianli,XU Liping,Wang Zhibin,et al.Effect of uniaxial stress on photon localization of one-dimensional photonic crystals with a mirror symmetry[J].Acta Physica Sinica,2013,18:249-254.
[7]李锡广,李孟委,王莉,等.MEMS陀螺中带孔结构空气阻尼建模分析[J].微纳电子技术,2012(11):009.