灵敏度可调的光学读出非制冷热像元设计
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摘要
设计了一种可见光反射型光学读出非制冷热像元结构。理论分析表明热像元的热-机械灵敏度达到0.043deg·K-1,在热像元面积比已有报道减小75%的情况下,热-机械灵敏度反而提高至少79%。通过改变弯折梁底层金膜的面积来调节热像元的灵敏度,使其可在2.36×10-6rad·m2·W-1和9.21×10-6rad·m2·W-1之间变化。ANSYS仿真结果和理论结果吻合较好,验证了设计的正确性。
A design of optical readout uncooled thermal imaging pixel is proposed. The theoretical analysis shows that,thermal-mechanical sensitivity reaches 0. 043deg·K- 1and increases by 79% at least when the pixel size decreased by 75% compared with reported ones. Sensitivity can be adjusted from 2. 36 × 10- 6rad · m2· W- 1to9. 21 × 10- 6rad·m2·W- 1by changing the size of the bottom gold layer on the folded cantilever. Finite element simulations by ANSYS are in good agreement with theoretical results,which verifies the validity of the design.
A design of optical readout uncooled thermal imaging pixel is proposed. The theoretical analysis shows that,thermal-mechanical sensitivity reaches 0. 043deg·K- 1and increases by 79% at least when the pixel size decreased by 75% compared with reported ones. Sensitivity can be adjusted from 2. 36 × 10- 6rad · m2· W- 1to9. 21 × 10- 6rad·m2·W- 1by changing the size of the bottom gold layer on the folded cantilever. Finite element simulations by ANSYS are in good agreement with theoretical results,which verifies the validity of the design.
引文
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[4]Rogalski A.Hg Cd Te infrared detector material:history,status and outlook[J].Reports on Progress in Physics,2005,68(10):2267.
[5]Li Y L,Zhou H,Li T,et al.CMOS-compatible 8 x 2 thermopile array[J].Sensor Actuat a-Phys,2010,161(1-2):120-126.
[6]BAI Yu,XING Tingwen,YANG Jianfeng,et al.Design of uncooled infrared step-zoom optical system with optics passive athermalisation[J].Laser&Infrared,2010,40(7):748-751.(in Chinese)白瑜,邢廷文,杨建峰,等.实现光学被动热补偿的非制冷红外双焦光学系统[J].激光与红外,2010,40(7):748-751.
[7]WANG Weibing,CHEN Dapeng,MING Anjie,et al.Integration of uncooled diode infrared focal plane array[J].Infrared and Laser Engineering,2011,40(6):997-1000.(in Chinese)王玮冰,陈大鹏,明安杰,等.二极管原理非制冷红外焦平面阵列的集成设计[J].红外与激光工程,2011,40(6):997-1000.
[8]FAN Taijun,XU Xiangdong,WANG Zhi,et al.Main reason for deformation in microbridges of uncooled IRFPA and their control[J].Infrared and Laser Engineering,2012,41(10):2588-2593.(in Chinese)樊泰君,许向东,王志,等.非制冷红外焦平面微桥形变的主要原因及其控制[J].红外与激光工程,2012,41(10):2588-2593.
[9]WANG Weibing,CHEN Dapeng,YE Tianchun,et al.An optomechanical uncooled infrared imaging system based on bi-material cantilever pixels.(in Chinese)王玮冰,陈大鹏,叶甜春,等.应用光力学效应的非制冷红外成像系统[J].激光与红外,2004,34(2):83-86.
[10]Ou Y,Li Z,Qu F,et al.Investigation on performance and vacuum package of MEMS infrared focal plane arrays[J].IEEE Electron Device Letters,2013,34(3):453-455.
[11]CHENG Teng,ZHANG Qingchuan,GAO Jie,et al.Analysis of optical readout sensitivity for uncooled infrared imaging based on optical readout[J].Acta Optica Sinica,2012,32(2):204002.(in Chinese)程腾,张青川,高杰,等.光学读出非制冷红外成像技术的光学灵敏度分析[J].光学学报,2012,32(2):204002.
[12]Perazzo T,Mao M,Kwon O,et al.Infrared vision using uncooled micro-optomechanical camera[J].Appl Phys Lett,1999,74(23):3567-3569.
[13]FENG Fei,JIAO Jiwei,XIONG Bin,et al.Design and fabrication of a novel optically readable thermal imaging system based on MEMS technology[J].Journal of Infrared and Millimeter Waves,2004,23(2):125-130.(in Chinese)冯飞,焦继伟,熊斌,等.一种新颖的基于MEMS技术的光读出热成像系统性能分析与制作[J].红外与毫米波学报,2004,23(2):125-130.
[14]Guo Z Y,Zhang Q C,Dong F L,et al.Performance analysis of microcantilever arrays for optical readout uncooled infrared imaging[J].Sensor Actuat a-Phys,2007,137(1):13-19.