微小型MEMS测试标定实验仪伺服系统设计
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摘要
以实验教学为使用背景设计了一台多功能微机电系统(Micro-Electro-Mechanical Systems,MEMS)测试标定平台,主要实现平台稳定控制功能和转台测试功能.针对中低精度MEMS惯性器件的测试标定需求,提出了设计的关键技术及指标,分析了陀螺伺服稳定平台原理,从坐标系变化的角度分析了干扰信号的耦合机理,同时解释了稳定平台隔离震动的工作原理.对陀螺稳定平台常用的双闭环控制原理进行建模和Simulink仿真,结果表明所设计的陀螺稳定平台伺服系统的控制策略能满足陀螺稳定平台控制需求.
Based on experimental teaching,a multi-functional MEMS(Micro-Electro-Mechanical Systems,MEMS)test calibration platform was designed,which mainly realized the platform stability control function and turntable test function.Aiming at the test calibration requirements of low-and medium-precision MEMS inertial devices,the key technology and index of design were put forward,the principle of gyro servo stability platform was analyzed,the coupling mechanism of jamming signal was analyzed from the angle of coordinate system change,and the working principle of isolated vibration of stable platform was explained.Modeling and Simulink simulation of double closed-loop control principle commonly used in gyro stabilization platform,the simulation results show that the control strategy of Gyro stable platform servo system can meet the control requirements of gyro stable platform.
Based on experimental teaching,a multi-functional MEMS(Micro-Electro-Mechanical Systems,MEMS)test calibration platform was designed,which mainly realized the platform stability control function and turntable test function.Aiming at the test calibration requirements of low-and medium-precision MEMS inertial devices,the key technology and index of design were put forward,the principle of gyro servo stability platform was analyzed,the coupling mechanism of jamming signal was analyzed from the angle of coordinate system change,and the working principle of isolated vibration of stable platform was explained.Modeling and Simulink simulation of double closed-loop control principle commonly used in gyro stabilization platform,the simulation results show that the control strategy of Gyro stable platform servo system can meet the control requirements of gyro stable platform.
引文
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[2]Rodolff P K.A lase gyro with optimized resonator geometry[J].IEEE Journal of Quantum Electronics,1987,23(4):21-30.
[3]高文.机载光电平台目标跟踪技术的研究[D].北京:中国科学院研究生院(长春光学精密机械与物理研究所),2012.
[4]Hilkert J M.Inertially stabilized platform technology concepts and principles[J].Control Systems,2008,28(1):26-46.
[5]Masten M K.Inertially stabilized platforms for optical imaging systems[J].Control Systems,2008,28(1):47-64.
[6]鲍国强.三轴转台控制系统的研究[D].哈尔滨:哈尔滨工业大学,2016.
[7]Li H X.An improved robust FUZZY-PID controller with optional fuzzy reasoning[J].IEEE Transactions on System,Man and Cybernetic,2005,35(6):1283-1294.
[8]夏静萍.多框架稳定跟踪伺服平台控制技术研究[D].南京:南京航空航天大学,2010.
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