MPCVD金刚石膜的品质对其在K-Ka波段微波介电性能的影响
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摘要
针对MPCVD金刚石膜K-Ka波段(18～40 GHz)微波电子器件领域的应用需求,以及探索金刚石膜介电性能与品质之间的关系的需要,制备了5个金刚石膜样品,并建立了一套K波段分体圆柱谐振腔微波介电性能测试装置。使用Raman光谱表征金刚石膜质量,采用K波段分体圆柱谐振腔测量金刚石膜的介电性能,并与Ka波段的结果进行比较。结果表明,不同品质的样品介电损耗在3.8×10~(-5)～76.8×10~(-5)范围内,且介电损耗与Raman半峰宽密切相关。同时,高品质金刚石膜K波段介电损耗高于Ka波段,而低品质的则呈现相反的结果。这是由于高品质金刚石膜介电损耗主要由导电性引起,而低品质金刚石膜内较高的缺陷密度导致单声子声学振动吸收和瑞利散射较大。
A K band split-cylinder resonator device was developed to measure dielectric properties of diamond films prepared by microwave plasma chemical vapor deposition(MPCVD), and the results were compared with the measured by using Ka band split-cylinder resonator device. The quality of diamond films was analyzed by Raman spectroscopy. It shows that, dielectric loss ranges from 3.8×10~(-5)～76.8×10~(-5), depending on the quality measured by Raman spectroscopy. Moreover, due to electrical conductivity of diamond film, the dielectric loss of high quality diamond film at K band is obviously higher than that at Ka band, and due to one-phonon excitation of acoustic vibrations or Rayleigh scatterings, the dielectric loss of poor quality diamond film presents a contrary tendency.
A K band split-cylinder resonator device was developed to measure dielectric properties of diamond films prepared by microwave plasma chemical vapor deposition(MPCVD), and the results were compared with the measured by using Ka band split-cylinder resonator device. The quality of diamond films was analyzed by Raman spectroscopy. It shows that, dielectric loss ranges from 3.8×10~(-5)～76.8×10~(-5), depending on the quality measured by Raman spectroscopy. Moreover, due to electrical conductivity of diamond film, the dielectric loss of high quality diamond film at K band is obviously higher than that at Ka band, and due to one-phonon excitation of acoustic vibrations or Rayleigh scatterings, the dielectric loss of poor quality diamond film presents a contrary tendency.
引文
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[2]KUMAR A,SHARAN S,KUMAR N,et al.Design of a RF window for 170 GHz,1 MW gyrotron for ECRH application[J].Infrared Phys Technol,2012,55(1):93-97.
[3]TAKAHASHI K,KAJIWARA K,ODA Y,et al.High power millimeter wave experiment of torus diamond window prototype for ITER EC H&CD system[J].Fusion Eng Des,2013,88(2):85-93.
[4]MOLLA J,IBARRA A,MAFFIOTTE C.Dielectric losses of self-supporting chemically vapour deposited diamond materials[J].Diamond Relat Mater,2000,9(3):1071-1075.
[5]KASUGAI A,SAKAMOTO K,TAKAHASHI K,et al.Chemical vapor deposition diamond window for high-power and long pulse millimeter wave transmission[J].Rev Sci Instrum,1998,69(5):2160-2165.
[6]THUMM M.MPACVD-diamond windows for high-power and long-pulse millimeter wave transmission[J].Diamond Relat Mater,2001,10(9/10):1692-1699.
[7]HEIDINGER R,DAMMERTZ G,MEIER A,et al.CVD diamond windows studied with low-and high-power millimeter waves[J].IEEE Trans Plasma Sci,2002,30(3):800-807.
[8]PRAWER S,NEMANICH R J.Raman spectroscopy of diamond and doped diamond[J].Philos Trans R Soc A,2004,362(1824):2537-2565.
[9]NASIEKA I,STRELCHUK V,BOYKO M,et al.Raman and photoluminescence characterization of diamond films for radiation detectors[J].Sens Actuators A,2015,223:18-23.
[10]JANEZIC M D,KUESTER E F,JARVIS J B.Broadband complex permittivity measurements of dielectric substrates using a split-cylinder resonator[C]//Microwave Symposium Digest,2004 IEEE MTT-S International.NY,USA:IEEE,2004:1817-1820.
[11]苏静杰,梓杨,李义锋,等.分体圆柱谐振腔法用于金刚石膜微波介电性能测试的研究[J].无机材料学报,2015,30(7):751-756.
[12]ORTIZ S C,HUBERT J,MIRTH L,et al.A high-power Ka-band quasi-optical amplifier array[J].IEEE Trans Microwave Theory Tech,2002,50(2):487-494.
[13]LI B,ZHU X F,LIAO L,et al.Study of novel slow wave circuit for miniaturized millimeter wave helical traveling wave tube[J].Int J Infrared Millimeter Waves,2006,27(7):941-947.
[14]CALAME J P,ABE D.Applications of advanced materials technologies to vacuum electronic devices[J].Proc IEEE,1999,87(5):840-864.
[15]TAMASHIRO R N,ALDANA S L.60 percent efficient K-band TWT using a new diamond rod technology[C]//Electron Devices Meeting,1989.IEDM'89.Technical Digest,International.NY,USA:IEEE,1990:187-190.
[16]ALDANA S L,TAMASHIRO R N.K-band TWT using new diamond rod technology[C]//13th AIAA International Communication Satellite Systems Conference and Exhibit.Washington,DC,USA:AIAA,1990:766-770.
[17]PARSHIN V V,MYASNIKOVA S E,DERKACH V N,et al.Dielectric losses in CVD diamonds at frequencies 1k Hz-360 GHz and temperatures 0.9-900 K[C]//Infrared and Millimeter Waves and 13th International Conference on Terahertz Electronics,2005.IRMMW-THz 2005.The Joint30th International Conference on.NY,USA:IEEE,2005:22-23.
[18]GARIN B M,PARSHIN V V,MYASNIKOVA S E,et al.Nature of millimeter wave losses in low loss CVD diamonds[J].Diamond Relat Mater,2003,12(10):1755-1759.
[19]JANEZIC M D.Nondestructive relative permittivity and loss tangent measurements using a split-cylinder resonator[D].Colorado:University of Colorado,2003.
[20]SU J J,LI Y F,DING M H,et al.A dome-shaped cavity type microwave plasma chemical vapor deposition reactor for diamond films deposition[J].Vacuum,2014,107(3):51-55.
[21]SUSSMANN R S,BRANDON J R,SCARSBROOK G A,et al.Properties of bulk polycrystalline CVD diamond[J].Diamond Relat Mater,1994,3(4/5/6):303-312.
[22]IBARRA A,GONZALEZ M,VILA R,et al.Wide frequency dielectric properties of CVD diamond[J].Diamond Relat Mater,1997,6(5/6/7):856-859.
[23]GARIN B M,PARSHIN V V,POLYAKOV V I,et al.Dielectric properties and applications of CVD diamonds in the millimeter and terahertz ranges[M]//KALMYKOV Y P.Recent Advances in Broadband Dielectric Spectroscopy.Dordrecht,Netherlands:Springer,2013:79-87.
[24]BOGDANOV S,VIKHAREV A,GORBACHEV A,et al.Growth-rate enhancement of high-quality,low-loss CVD-produced diamond disks grown for microwave windows application[J].Chem Vap Deposition,2014,20(1/2/3):32-38.
[25]GARIN B M,PARSHIN V V,POLYAKOV V I,et al.Dielectric loss at MM range and deep level transient spectroscopy of the diamond grown by DC arc plasma jet technique[J].ECS Trans,2012,45(7):251-261.
[26]SCHERER T A,STRAUSS D,MEIER A,et al.Investigations of microwave and THz radiation losses in CVD diamond and chemically modified diamond[C]//MRS Online Proceeding Library Archive.UK:Cambridge University Press,2015:1282.