离子束溅射技术制备高性能光通信带通滤光膜的研究
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摘要
光通信以其传输速率高、信息容量大、保密性能好、抗干扰能力强等优点,在通信领域得到了广泛应用,是未来信息网络的主要通信方式。光通信的信息载体是光波,为了进一步提高光通信系统中光信号的传输质量,满足光通信系统的使用要求,对高性能的带通滤光膜进行了研制。采用离子束溅射技术,以Ta_2O_5和SiO_2作为镀膜材料,设计了含有12个谐振腔的带通滤光膜,分析并解决了耦合层膜厚监控的问题。制备的带通滤光膜在1528～1571 nm处插入损耗小于0.2 dB,1470～1521 nm和1578～1651 nm处透射隔离度大于40 dB,满足实际使用要求。
A novel type of high-performance band pass filter,comprising 12 Fabry-Perot(F-P) resonator cavities and fabricated from Ta_2O_5 and SiO_2 layers synthesized by ion beam sputtering,was developed for optical communication.The influence of the deposition conditions,particularly the layer thickness,on the characteristics of the newly-developed band pass filter was investigated.The results show that the precision control of layer-thickness has a major impact.To be specific,the combination of optical and deposition time control-schemes was capable of precisely controlling the thickness of coupling layers,grown under the optimized conditions.The properties of the newly-designed stable band pass filter included:an insertion-loss of below 0.2 dB in 1479 ～1504 nm range and a transmission-isolation of above 40 dB in 1470～1521 nm and 1578～1651 nm ranges,satisfying well the stringent requirements of optical communication.
A novel type of high-performance band pass filter,comprising 12 Fabry-Perot(F-P) resonator cavities and fabricated from Ta_2O_5 and SiO_2 layers synthesized by ion beam sputtering,was developed for optical communication.The influence of the deposition conditions,particularly the layer thickness,on the characteristics of the newly-developed band pass filter was investigated.The results show that the precision control of layer-thickness has a major impact.To be specific,the combination of optical and deposition time control-schemes was capable of precisely controlling the thickness of coupling layers,grown under the optimized conditions.The properties of the newly-designed stable band pass filter included:an insertion-loss of below 0.2 dB in 1479 ～1504 nm range and a transmission-isolation of above 40 dB in 1470～1521 nm and 1578～1651 nm ranges,satisfying well the stringent requirements of optical communication.
引文
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[15] 季一勤,姜玉刚,刘华松,等.热处理对离子束溅射SIO2薄膜结构特性的影响分析[J].红外与激光工程,2013,42(02):418-422
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[2] 张娜,李文田,周鸿喜.全光通信网——光通信的发展方向[J].现代电信科技,2001,(01):28-32
[3] 白欣,王成,刘树勇.光学薄膜在光通信和激光技术中的应用[J].首都师范大学学报:自然科学版,2012,33(04):10-13
[4] 陈旻,刘旭,顾培夫.双通道光纤通信波分复用滤光片的设计与模拟[J].光电子技术,2000,(04):249-254
[5] 高晓丹,魏纯.光通信用光纤端面截止滤光膜的研制[J].激光技术,2013,37(03):314-316
[6] 吴博琦,董连和,孙艳军,等.光纤公共电视天线传输系统中短波通截止滤光片[J].中国激光,2016,43(02):180-185
[7] 付秀华,寇雷雷,张静,等.可见与近红外激光通信系统光学滤光膜的研制[J].中国激光,2012,39(12):136-139
[8] 潘永强,陈佳.微结构窄带滤光片设计及制备工艺研究[J].应用光学,2017,(1):78-82
[9] 查家明,李斯成,唐乾隆.红外中带滤光片的结构带宽估算及调整[J].应用光学,2007,28(2):151-155
[10] MACLEOD H A.Thin Film Optical Filters(4nd ed)[M].LLC:Taylor and Francil Group,2010:13-71,156-168
[11] 袁文佳,沈伟东,郑晓雯,等.离子束溅射制备NB2O5,TA2O5和SIO2薄膜的光学、力学特性和微结构[J].光学学报,2017,37(12):364-371
[12] Kumar V S R S P,Parinam S,Kumar M,et al.Design of Single Cavity Band Pass Graded Index Optical Filter with Quintic Apodization[J].Materials Today Proceedings,2018,5(2):3755
[13] 唐晋发,顾培夫,刘旭,等.现代光学薄膜技术[M].杭州:浙江大学出版社,2006:20-23,96-102,237-242
[14] 刘华松,杨霄,王利栓,等.离子束溅射氧化钽薄膜的光学带隙特性[J].光学精密工程,2017,25(01):21-27
[15] 季一勤,姜玉刚,刘华松,等.热处理对离子束溅射SIO2薄膜结构特性的影响分析[J].红外与激光工程,2013,42(02):418-422
[16] 唐昊龙,付秀华,刘国军,等.鱼雷光纤制导系统低损耗滤光片的研制[J].光子学报,2013,42(11):1289-1294
[17] 尤大伟,黄小刚,任荆学,等.用于薄膜制备的射频宽束离子源的设计[J].真空科学与技术学报,2004,24(06):51-54