磁控溅射法制备柔性纺织面料基纳米薄膜的研究与进展
详细信息    查看全文 | 推荐本文 |
  • 英文篇名:Latest Progress in Magnetron Sputtered Nanocoatings on Flexible Textile Fabric Substrate
  • 作者:黄美林 ; 鲁圣国 ; 杜文琴 ; 蔡珍 ; 任永聪
  • 英文作者:Huang Meilin;Lu Shengguo;Du Wenqin;Cai zhen;Ren Yongcong;Guangdong Provincial Key Laboratory of Functional Soft Condensed Matter,Guangdong Provincial Engineering Technology Research and Development Center of Smart Material and Energy Conversion Devices,School of Materials and Energy,Guangdong University of Technology;Engineering Technology Research Center for Functional Fiber and Fabric of Guangdong Province,School of Textile Material and Engineering,Wuyi University;
  • 关键词:磁控溅射 ; 功能纺织品 ; 纳米 ; 薄膜
  • 英文关键词:Magnetron sputtering;;Functional textile;;Nanoscale;;Thin film
  • 中文刊名:ZKKX
  • 英文刊名:Chinese Journal of Vacuum Science and Technology
  • 机构:广东工业大学材料与能源学院广东省智能材料与能量转化器件工程技术研究开发中心广东省功能软凝聚态物质重点实验室;五邑大学纺织材料与工程学院广东省功能性纤维与纺织品工程技术研究中心广东省高校功能纺织品工程技术研究中心;
  • 出版日期:2017-12-15
  • 出版单位:真空科学与技术学报
  • 年:2017
  • 期:v.37
  • 语种:中文;
  • 页:ZKKX201712012
  • 页数:7
  • CN:12
  • ISSN:11-5177/TB
  • 分类号:72-78
摘要
磁控溅射工艺技术是一种重要的镀膜技术,广泛应用于薄膜材料制备和材料的表面处理,应用于柔性纺织材料的表面镀膜也越来越广。本文主要介绍磁控溅射法在柔性纺织面料上制备纳米薄膜的研究和发展情况,包括镀制金属、合金、化合物或陶瓷、高分子材料等单层或多层薄膜,用以开发功能性纺织品的研究情况。介绍的镀膜包括银膜、铜膜、铝膜、钛膜及其金属氧化膜、聚四氟乙烯膜等。
        The latest advance in deposition of nano-coatings by magnetron sputtering on flexible textile fabric substrate was tentatively reviewed. The discussions with specific examples centered on: i) the types of coatings,including but not limited to Ag,Cu,Al,Ti,Pt,Co Fe,Zn O,Ti O2,ITO,La B6 alloys,polymers,ceramics and multilayers;ii) the favorable properties of the modified flexible textile fabric substrates include the good electrical conductivity,high wear resistance,shielding of electromagnetic fields,effective disinfection,hydrophobicity,waterproof,gas sensitivity,heat-resistance or warmth retention,anti-static electricity,anti-ultraviolet irradiation and etc. In addition,the development trends,existing problems and possible solutions in synthesis of nano-coatings on textile fabric substrates were briefly discussed in a thought provoking way.
引文
[1]李芬,朱颖,李刘合,等.磁控溅射技术及其发展[J].真空电子技术,2011(03):49-54
    [2]Kelly P J,Arnell R D.Magnetron Sputtering:A Review of Recent Developments and Applications[J].Vacuum,2000,56(3):159-172
    [3]Yuan X,Wei Q,Chen D,et al.Electrical and Optical Properties of Polyester Fabric Coated with Ag/Ti O2Composite Films by Magnetron Sputtering[J].Textile Research Journal,2016,86(8):887-894
    [4]Chen Y,Hsu C,He J.Antibacterial Silver Coating on Poly(Ethylene Tterephthalate)Fabric by Using High Power Impulse Magnetron Sputtering[J].Surface and Coatings Technology,2013,232:868-875
    [5]Baghriche O,Kiwi J,Pulgarin C,et al.Antibacterial Ag–Zr N Surfaces Promoted by Subnanometric Zr N-Clusters deposited by Reactive Pulsed Magnetron Sputtering[J].Journal of Photochemistry and Photobiology A:Chemistry,2012,229(1):39-45
    [6]Shahidi S,Ghoranneviss M.Plasma Sputtering for Fabrication of Antibacterial and Ultraviolet Protective Fabric[J].Clothing and Textiles Research Journal,2015,34(1):37-47
    [7]Wu Y,Zhang L,Min G,et al.Surface Functionalization of Nanostructured La B6-Coated Poly Trilobal Fabric by Magnetron Sputtering[J].Applied Surface Science,2016,384:413-418
    [8]Depla D,Segers S,Leroy W,et al.Smart Textiles:An Explorative Study of the Use of Magnetron Sputter Deposition[J].Textile Research Journal,2011,81(17):1808-1817
    [9]Yip J,Jiang S,Wong C.Characterization of Metallic Textiles Deposited by Magnetron Sputtering and Traditional Metallic Treatments[J].Surface&Coatings Technology,2009,204(3):380-385
    [10]Osorio-Vargas P,Sanjines R,Ruales C,et al.Antimicrobial Cu-Functionalized Surfaces Prepared by Bipolar Asymmetric DC-Pulsed Magnetron Sputtering(DCP)[J].Journal of Photochemistry and Photobiology A:Chemistry,2011,220(1):70-76
    [11]Hegemann D,Hossain M M,Balazs D J.Nanostructured Plasma Coatings to Obtain Multifunctional Textile Surfaces[J].Progress in Organic Coatings,2007,58(2-3):237-240
    [12]师艳丽,李娜娜,付元静,等.用于纺织品表面改性的磁控溅射技术研究进展[J].纺织学报,2016(04):165-169
    [13]陈向标,江凯鹏,何剑江,等.磁控溅射技术在织物整理上的研究进展[J].纺织导报,2011,(10):120-122
    [14]张一鸣.气相沉积技术在纺织行业中的应用[J].棉纺织技术,2010,38(10):63-65
    [15]邓炳耀,晏雄,魏取福.非织造布表面光电功能纳米结构材料的开发[J].纺织导报,2006,(4):81-84
    [16]Putnina A,Kukle S.Textile Surface Modification of Materials by Sputtering Technology[J].Scientific Journal of Riga Technical University.2010,(5):153-156
    [17]孟灵灵,黄新民,王春霞.溅射镀膜技术在织物金属化中应用[J].天津纺织科技,2009,(4):25-27
    [18]黄新民,孟灵灵.丙纶基纳米金属薄膜的导电性能[J].印染,2013,39(3):13-15
    [19]洪剑寒,王鸿博.非织造布磁控溅射镀银的导电和抗紫外性能[J].印染,2008,34(6):10-11,35
    [20]肖居霞,魏取福.沉积纳米尺度金属膜制备电子纺织材料[Z].西安:2007:64-68
    [21]王鸿博,魏取福,高卫东.PET基纳米Ag薄膜导电及电磁屏蔽性能研究[J].真空科学与技术学报,2008,28(1):37-41
    [22]王鸿博,王曦,高卫东,等.磁控溅射PET非织造基银膜的微结构及性能[Z].西安:2007:192-197
    [23]王鸿博,何艳丽,高卫东,等.PLA基纳米结构银薄膜的抗菌性能[J].纺织学报,2008,29(6):52-55
    [24]Jiang S X,Qin W F,Guo R H,et al.Surface Functionalization of Nanostructured Silver-Coated Polyester Fabric by Magnetron Sputtering[J].Surface and Coatings Technology,2010,204(21-22):3662-3667
    [25]Miao D,Li A,Jiang S,et al.Fabrication of Ag and AZO/Ag/AZO Ceramic Films on Cotton Fabrics for Solar Control.[J].Ceramics International.2015,41(5-Part-A):6312-6317
    [26]王盼盼,葛明桥,朱亚楠,等.基底的结构形态与磁控溅射织物导电性能的关系[J].化工新型材料,2015,(10):141-143
    [27]黄新民,孟灵灵.涤纶基表面溅射纳米铜膜的导电性能[J].印染,2013,39(11):8-10
    [28]Scholz J,Nocke G,Hollstein F,et al.Investigations on Fabrics Coated with Precious Metals Using the Magnetron Sputter Technique with Regard to Their Anti-Microbial Properties[J].Surface and Coatings Technology,2005,192(2-3):252-256
    [29]邓炳耀,晏雄,魏取福.沉积铝纳米结构薄膜非织造布的制备和导电性[J].纺织学报,2006,27(11):44-47
    [30]徐晓峰,陈小立,郭玉良,等.磁控溅射法研制防紫外纳米铝膜涤纶织物[J].印染,2007,(12):10-12
    [31]Esen M,Ilhan I,Karaaslan M,et al.Electromagnetic Absorbance Properties of a Textile Material Coated Using Filtered arc-Physical Vapor Deposition Method[J].Journal of Industrial Textiles,2015,45(2):298-309
    [32]李强林,黄方千,任建华,等.磁控溅射镀铜钛织物及其电磁屏蔽性能[J].天津纺织科技,2015,(02):7-9
    [33]王磊.织物的钛金属化镀膜的制备和耐磨性的研究[D].天津工业大学,2011
    [34]徐秋香,魏取福,汤倩,等.Co Fe合金薄膜的制备及原子力表征[J].材料导报,2009,23(z1):109-111
    [35]Chen Y H,Wu G W,He J L.Antimicrobial Brass Coatings Prepared on Poly(Ethylene Terephthalate)Textile by High Power Impulse Magnetron Sputtering[J].Materials Science&Engineering,2015,48:41-47
    [36]Shahidi S,Ghoranneviss M.Investigation on Dye Ability and Antibacterial Activity of Nanolayer Platinum Coated Polyester Fabric Using DC Magnetron Sputtering[J].Progress in Organic Coatings,2011,70(4):300-303
    [37]邓炳耀,魏取福,高卫东,等.非织造材料表面生长Zn O薄膜的特性研究[J].高分子材料科学与工程,2007,23(6):101-104
    [38]侯大寅,李良飞,魏取福.PET基纳米Zn O溅射成膜及其紫外线通透性能[J].纺织学报,2007,28(2):48-51
    [39]李良飞,侯大寅.溅射沉积纳米Zn O膜的表征及其性能[J].东华大学学报(自然科学版),2007,33(1):120-124
    [40]李良飞,侯大寅,魏取福.PET基纳米Zn O膜的溅射沉积及AFM表征[J].安徽工程科技学院学报(自然科学版),2006,21(3):42-45
    [41]赵绍英.沉积掺铝氧化锌涤纶非织造材料的性能研究[D].无锡:江南大学,2009
    [42]赵绍英,邓炳耀,高卫东,等.PET纤维基AZO透明导电薄膜溅射工艺参数的优化[J].真空科学与技术学报,2009,29(4):419-422
    [43]徐阳.表面沉积纳米二氧化钛纺织材料的制备及其性能研究[D],无锡:江南大学,2009
    [44]储长流,毕松梅,鲍进跃.磁控溅射纳米Ti O2抗菌PBT/PET面料的制备及性能[J].化工新型材料,2012,40(5):31-33
    [45]徐阳,魏取福,汪莹莹,等.负载纳米Ti O2的纯棉抗菌织物[J].江南大学学报(自然科学版),2007,6(4):474-477
    [46]Miao D,Hu H,Li A,et al.Fabrication of Porous and Amorphous Ti O2thin Films on Flexible Textile Substrates[J].Ceramics International,2015,41(7):9177-9182
    [47]汪莹莹.ITO功能纺织材料结构表征及其光电性能研究[D].无锡:江南大学,2008
    [48]吴艳.有机织物基La B6薄膜的制备工艺及其性能研究[D].济南:山东大学,2015
    [49]黄美林,狄剑锋,齐宏进.磁控溅射法制备防紫外线PET织物的研究[J].棉纺织技术,2008,(04):7-9
    [50]黄美林,狄剑锋,齐宏进.磁控溅射法在涤纶织物上制备氟碳薄膜[J].高分子材料科学与工程,2008,(02):148-151
    [51]刘增机,纪全,张浴晖,等.靶基距对射频磁控溅射法制备氟碳膜的结构与性能影响[J].功能材料,2011,42(5):918-920
    [52]王东,矫丽珍,昃向君,等.PET基底上碳氟膜纳米结构及均匀性研究[J].纺织学报,2007,28(12):48-50,57
    [53]盛澄成,徐阳,乔辉,等.Zn O/Cu多层膜的制备及电磁屏蔽性能研究[J].功能材料,2016,47(8):8089-8093
    [54]吴家斌,侯大寅,徐文正.磁控溅射PP基氧化锌/铜层状膜性能研究[J].安徽工程大学学报,2013,28(4):31-35
    [55]刘江峰.纤维基Zn O/Ag/Zn O多层膜的制备、形貌及光电性能研究[D].无锡:江南大学,2008
    [56]张浴晖,齐宏进,谭金山.溅射沉积Zn O/FC多功能有机-无机杂化膜[J].高分子材料科学与工程,2008,24(8):151-154
    [57]张浴晖,齐宏进.射频磁控溅射法制备FC/Zn O杂化材料及其基本性质[J].化工学报,2008,59(6):1584-1589
    [58]庄明宇.高性能面料磁控溅射镀膜工艺与性能研究[D].上海:上海工程技术大学,2014
    [59]叶丽华,杜文琴.磁控溅射工艺参数对涤纶织物结构色出色效果的影响[J].五邑大学学报(自然科学版),2015,(03):16-22
    [60]叶丽华,杜文琴.结构色织物的光学性能[J].纺织学报,2016,37(08):83-88
    [61]Yuan X,Wei Q,Chen D,et al.Electrical and Optical Properties of Polyester Fabric Coated with Ag/Ti O2Composite Films by Magnetron Sputtering[J].Textile Research Journal,2016,86(8):887-894
    [62]王鸿博,李颖,陈艳,等.PET非织造基溅射Ti O2/Nd/Ti O2及其抗菌性[J].印染,2010,36(15):5-7
    [63]赵晓燕,王鸿博,高卫东,等.磁控溅射制备稀土激活Ti O2复合抗菌非织造布[J].纺织学报,2008,29(3):38-41,55
    [64]赵晓燕.磁控溅射制备稀土激活功能性抗菌纺织材料的研究[D].无锡:江南大学,2008

© 2004-2018 中国地质图书馆版权所有 京ICP备05064691号 京公网安备11010802017129号

地址:北京市海淀区学院路29号 邮编:100083

电话:办公室:(+86 10)66554848;文献借阅、咨询服务、科技查新:66554700