气化粉与湿法粉制备ITO靶材过程及性能对比研究
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摘要
分别以ITO气化粉和湿法粉为原料,在相同工艺条件下,经过球磨、造粒、成型等工序制备了ITO靶材,研究了ITO气化粉和湿法粉制靶中间品及最终靶材的主要性能。结果表明:模压和CIP后,湿法粉坯体密度均低于气化粉的,但由于ITO湿法粉原料粒径细而均匀,烧结活性更高,故在较低的烧结条件下可制备出更高密度的靶材。
Under the same technological conditions, ITO targets were prepared with gasified ITO powders and co-precipitated ITO powders by such processes as ball-milling, prilling and molding. The main performances of intermediate products and targets prepared by gasified and co-precipitated powders were studied. The result shows that after mould pressing and CIP, the density of ITO green body prepared from co-precipitated powders is lower than that of ITO green body from gasified powders. The grain size and sintering activity of the co-precipitated power are smaller and higher, so the targets of high density could be obtained under less demanding conditions.
Under the same technological conditions, ITO targets were prepared with gasified ITO powders and co-precipitated ITO powders by such processes as ball-milling, prilling and molding. The main performances of intermediate products and targets prepared by gasified and co-precipitated powders were studied. The result shows that after mould pressing and CIP, the density of ITO green body prepared from co-precipitated powders is lower than that of ITO green body from gasified powders. The grain size and sintering activity of the co-precipitated power are smaller and higher, so the targets of high density could be obtained under less demanding conditions.
引文
[1] 彭平,陈敬超,王鹏,等.高致密ITO靶材制备工艺的研究现状和发展趋势[J].热加工工艺,2012,41(24):31—32.
[2] 崔诣.浅议ITO靶材的制备方法及发展趋势[J].有色矿冶,2013,29(4):36—39.
[2] 崔诣.浅议ITO靶材的制备方法及发展趋势[J].有色矿冶,2013,29(4):36—39.