尺蠖式直线微驱动器的设计
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摘要
针对普通尺蠖式直线微驱动器运动速度低和输出力小等问题,基于柔顺机构设计了一种新型尺蠖式直线微驱动器。微驱动器由箝位机构、驱动机构和输出轴组成,其运动特点是驱动机构驱动箝位机构进行往复直线运动,箝位机构带动输出轴作直线运动。箝位机构和驱动机构均采用柔性杠杆结构,保证了微驱动器所需的箝位力与驱动力,并提高了其运动速度。采用伪刚体方法建立了驱动电压与箝位力、驱动机构输入位移与输出位移之间的关系,根据功能原理建立了输入力与驱动力之间的关系并制作了样机,搭建了实验测试系统进行性能测试,测试结果表明,驱动器最大箝位力为216.43N,最大驱动力为13.5N,在驱动电压120V,频率95Hz时,达到最大速度48.91mm/s。
In consideration of the issues of small output force and low speed of inchworm linear actuator,a novel inchworm linear micro actuator based on compliant mechanism was presented.The micro actuator was composed of two clamping mechanisms,a driving mechanism and an output shaft.The movement was characterized by the drive mechanism,which drives the clamping mechanism to create reciprocating linear motion,and the clamping mechanism,which was driven by linear motion from the output shaft.The flexible lever structure was adopted to design both the clamping mechanism and the driving mechanism in order to offer enough clamping force and driving force and improve the speed of the micro actuator.The relationship between the driving voltage and clamping force of the clamping mechanism,and the relationship between input displacement and output displacement of the driving mechanism were established by the pseudo rigid body method.The relationship between the input force and the driving force was established based on the function principle.The prototype of micro actuator was made and an experimental platform was set up to testthe performance of the micro actuator.The experimental results show that,when the driving voltage is120 V,frequency is 95 Hz,and maximum speed is 48.91 mm/s;the maximum clamping and driving forces are 216.43 Nand 13.5 N.
In consideration of the issues of small output force and low speed of inchworm linear actuator,a novel inchworm linear micro actuator based on compliant mechanism was presented.The micro actuator was composed of two clamping mechanisms,a driving mechanism and an output shaft.The movement was characterized by the drive mechanism,which drives the clamping mechanism to create reciprocating linear motion,and the clamping mechanism,which was driven by linear motion from the output shaft.The flexible lever structure was adopted to design both the clamping mechanism and the driving mechanism in order to offer enough clamping force and driving force and improve the speed of the micro actuator.The relationship between the driving voltage and clamping force of the clamping mechanism,and the relationship between input displacement and output displacement of the driving mechanism were established by the pseudo rigid body method.The relationship between the input force and the driving force was established based on the function principle.The prototype of micro actuator was made and an experimental platform was set up to testthe performance of the micro actuator.The experimental results show that,when the driving voltage is120 V,frequency is 95 Hz,and maximum speed is 48.91 mm/s;the maximum clamping and driving forces are 216.43 Nand 13.5 N.
引文
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[2]LI J Q,ZHAO H W,QU H,et al..A piezoelectric-driven rotary actuator by means of inchworm motion[J].Sensors and Actuators A:Physical,2013,194:269-276.
[3]胡俊峰,徐贵阳,郝亚洲.基于响应面法的微操作平台多目标优化[J].光学精密工程,2015,23(4):1096-1104.HU J F,XU G Y,HAO Y ZH.Multi-objective optimization of micro-manipulation stage based on response surface method[J].Opt.Precision Eng.,2015,23(4):1096-1104.(in Chinese)
[4]LEE J,DEDE E M,BANERJEE D,et al..Magnetic force enhancement in a linear actuator by airgap magnetic field distribution optimization and design[J].Finite Elements in Analysis and Design,2012,58:44-52.
[5]LI J P,ZHAO H W,QU X T,et al..Development of a compact 2-DOF precision piezoelectric positioning platform based on inchworm principle[J].Sensors and Actuators A:Physical,2015,222:87-95.
[6]张兆成,胡泓.尺蠖驱动器箝位机构的优化设计[J].纳米技术与精密工程,2010,8(3):251-256.ZHANG ZH CH,HU H.Optimum design of clamp device for inchworm actuator[J].Nanotechnology and Precision Engineering,2010,8(3):251-256.(in Chinese)
[7]曲建俊,郭文峰,胡志勇,等.被动箝位蠕动直线压电驱动器数学模型及仿真[J].机械工程学报,2015,51(18):13-19.QU J J,GUO W F,HU ZH Y,et al..Mathematical model and Simulation of a kind of inverse piezoelectric linear inchworm motor[J].Journal of Mechanical Engineering,2015,51(18):13-19.(in Chinese)
[8]温建明,马继杰,曾平,等.新型摩擦变化式压电惯性驱动器[J].压电与声光,2012,34(2):214-217.WEN J M,MA J J,ZENG P,et al..Novel piezoelectric inertial actuator based on changing frictional force[J].Piezoelectrics&Acoustooptics,2012,34(2):214-217.(in Chinese)
[9]陈培洪,王寅,黄卫清.一种新型直动式压电直线电机的设计[J].压电与声光,2011,33(2):239-243.CHEN P H,WANG Y,HUANG W Q.The design of a new direct action piezoelectric linear motor[J].Piezoelectrics&Acoustooptics,2011,33(2):239-243.(in Chinese)
[10]LI J,SEDAGHATI R,DARGAHI J,et al..Design and development of a new piezoelectric linear inchworm actuator[J].Mechatronics,2005,15(6):651-681.
[11]马立,周莎莎,王坤.行走式尺蠖压电直线驱动器研究现状及关键技术综述[J].微电机,2012,45(7):82-85.MA L,ZHOU SH SH,WANG K.State-of-theart and key technologies in piezoelectric linear actuator of walker inchworm[J].Micromotors,2012,45(7):82-85.(in Chinese)
[12]马立,肖金涛,周莎莎,等.杠杆式尺蠖压电直线驱动器[J].光学精密工程,2015,23(1):184-190.MA L,XIAO J T,ZHOU SH SH,et al..Linear lever-type piezoelectric inchworm actuator[J].Opt.Precision Eng.,2015,23(1):184-190.(in Chinese)
[13]SUN X T,CHEN W H,ZHANG J B,et al..A novel piezo-driven linear-rotary inchworm actuator[J].Sensors and Actuators A:Physical,2015,224:78-86.
[14]王社良,刘敏,樊禹江.新型压电陶瓷驱动器的特性分析[J].材料导报,2012,26(22):153-156.WANG SH L,LIU M,FAN Y J.Analysis on characteristics of new type piezoelectric ceramic actuators[J].Materials Review,2012,26(22):153-156.(in Chinese)
[15]卢倩,黄卫清,孙梦馨.基于柔度比优化设计杠杆式柔性铰链放大机构[J].光学精密工程,2016,24(1):102-111.LU Q,HUANG W Q,SUN M X.Optimization design of amplification mechanism for level flexure hinge based on compliance ratio[J].Opt.Precision Eng.,2016,24(1):102-111.(in Chinese)
[16]吴鹰飞,周兆英.柔性铰链转动刚度计算公式的推导[J].仪器仪表学报,2004,25(1):125-128,137.WU Y F,ZHOU ZH Y.Deduction of design equation of flexure hinge[J].Chinese Journal of Scientific Instrument,2004,25(1):125-128,137.(in Chinese)
[17]任宁,田国豪,欧开良,等.倒圆角直梁型柔性铰链刚度研究[J].机械强度,2012,34(3):366-370.REN N,TIAN G H,OU K L,et al..Research on rigidity of Corner-filleted flexural hinges[J].Journal of Mechanical Strength,2012,34(3):366-370.(in Chinese)