化学气相沉积制备块体ZnS缺陷综述
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摘要
介绍了CVDZnS的应用背景及国内生产研发现状,并主要论述了CVDZnS中存在的各类缺陷。虽然相关学者已对六方相,Zn-H络合物,异常大晶粒,微裂纹等缺陷进行过相关研究,并提出了各缺陷可能的产生机理及抑制方法,但国内学术领域对CVDZnS部分缺陷问题仍停留在经验上的认识,存在诸多争议。本文除对以上缺陷进行总结补充外,还对关注相对较少的新型缺陷进行阐述与分析,共对六大类缺陷的影响及其产生机理进行界定,旨在为实际生产过程中改进生产工艺参数,探究各类缺陷抑制方法提供理论参考。涉及的材料表征手段包括XRD、SEM以及金相显微镜等。
This article disscusses the application background and the development of CVDZnS in china.The possible defects in CVDZnS are also been studied. Although the possible mechanism and controling methods of some defects,such as wurtizte,Zn-H clathrate,abnormal large grain and micro-cracks,have been studied,the overall defects have not been summarized systematically in domestic academic field. In this paper,the above defects have been summarized and supplied. In addition,some newfound and unfamillar defects are also stated and analysed. Some experiment methods such as XRD,SEM and metallscopy were adopted to study the defects. The purpose of this paper was to offer theories to promote the techological parameters and control defects in CVDZnS.
This article disscusses the application background and the development of CVDZnS in china.The possible defects in CVDZnS are also been studied. Although the possible mechanism and controling methods of some defects,such as wurtizte,Zn-H clathrate,abnormal large grain and micro-cracks,have been studied,the overall defects have not been summarized systematically in domestic academic field. In this paper,the above defects have been summarized and supplied. In addition,some newfound and unfamillar defects are also stated and analysed. Some experiment methods such as XRD,SEM and metallscopy were adopted to study the defects. The purpose of this paper was to offer theories to promote the techological parameters and control defects in CVDZnS.
引文
[1]杨海,霍承松,余怀之,等.红外用CVDZn S多晶材料的研制[J].应用光学,2008,29(1):57-61.
[2]余怀之.红外光学材料第二版[M].北京:国防工业出版社,2015:287-296.
[3]Scott S D,Bames H L.Sphalerite-wurtzite equilibria and stoichiometry[J].Geochimica and Cosmochimica Acta,1972,36:1275-1295.
[4]John M,Randal T.Chemical vapor deposited zinc sulfide[M].Washington:SPIE,2013:10-25.
[5]憨勇,吴慧卓,刘正堂,等.CVD-Zn S中与锌有关的晶体缺陷及其对光学性能的影响[J].硅酸盐学报,1997,25(4):447-451.
[6]憨勇,吴慧卓.化学气相沉积法制备Zn S块材料的相结构[J].材料工程,1992(2):56-61.
[7]付立刚,霍承松,张福昌,等.化学气相沉积硫化锌中六方相形成机制及抑制方法分析[J].红外与激光工程,2010,39(6):1100-1104.
[8]Myers S M.Hydrogen interactions with defects in crystalline solids[J].Rev.Mod.Phys,1992,64(2):559-617.
[9]Lewis K L,Arthur G S,Banyard S A.Hydrogen-related defects in vapour-deposited zinc sulphide[J].Crystal Growth,1984,66:125-136.
[10]Iwat A,Suzuki H S,Saski Y.Iodine related grain growth in vapour deposited Zn S[J].Crystal Growth,1992,125:425-430.
[11]余怀之.红外光学材料第二版[M].北京:国防工业出版社,2015:295.
[12]Zscheckel T,Wisniewski W,Gebhaedt A,et al.Mechanisms counteracting the growth of large grains in industrial Zn S grown by chemical vapor deposition[J].Applied materials&interfaces,2014(6):394-400.
[13]John M,Randal T.Chemical vapor deposited zinc sulfide[M].Washington:SPIE,2013:74-75.
[2]余怀之.红外光学材料第二版[M].北京:国防工业出版社,2015:287-296.
[3]Scott S D,Bames H L.Sphalerite-wurtzite equilibria and stoichiometry[J].Geochimica and Cosmochimica Acta,1972,36:1275-1295.
[4]John M,Randal T.Chemical vapor deposited zinc sulfide[M].Washington:SPIE,2013:10-25.
[5]憨勇,吴慧卓,刘正堂,等.CVD-Zn S中与锌有关的晶体缺陷及其对光学性能的影响[J].硅酸盐学报,1997,25(4):447-451.
[6]憨勇,吴慧卓.化学气相沉积法制备Zn S块材料的相结构[J].材料工程,1992(2):56-61.
[7]付立刚,霍承松,张福昌,等.化学气相沉积硫化锌中六方相形成机制及抑制方法分析[J].红外与激光工程,2010,39(6):1100-1104.
[8]Myers S M.Hydrogen interactions with defects in crystalline solids[J].Rev.Mod.Phys,1992,64(2):559-617.
[9]Lewis K L,Arthur G S,Banyard S A.Hydrogen-related defects in vapour-deposited zinc sulphide[J].Crystal Growth,1984,66:125-136.
[10]Iwat A,Suzuki H S,Saski Y.Iodine related grain growth in vapour deposited Zn S[J].Crystal Growth,1992,125:425-430.
[11]余怀之.红外光学材料第二版[M].北京:国防工业出版社,2015:295.
[12]Zscheckel T,Wisniewski W,Gebhaedt A,et al.Mechanisms counteracting the growth of large grains in industrial Zn S grown by chemical vapor deposition[J].Applied materials&interfaces,2014(6):394-400.
[13]John M,Randal T.Chemical vapor deposited zinc sulfide[M].Washington:SPIE,2013:74-75.