高纯电子级SiF_4中氟硅醚阻聚剂的设计及其性能
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摘要
在高纯电子级四氟化硅生产与纯化中,很容易产生氟硅醚杂质,甚至可以与四氟化硅进一步聚合生成氟硅醚高聚物。该高聚物可从胶体迅速聚集成颗粒,很容易堵塞管道和吸附剂,极易发生安全事故。根据硅醚键氟化断裂的化学性质,设计了一系列基于金属氟化物组成的氟硅醚阻聚剂。结果显示,Ag F2阻聚剂具有阻聚热力学效率高、动力学速率快的特点,可以使氟硅醚杂质有效控制浓度在20×10-6以下。四氟化硅重复50次(每次用量10kg)通过Ag F2阻聚剂仍然具有优秀的阻聚性能,故该阻聚剂具有良好的长期稳定性。
In the manufacture and purification of high purity silicon tetrafluoride in electronic grade,the impurity of fluorinatedsilyl ether is easily formed,or worse its polyether can be severely generated. Due to the fast aggregation from the colloid to the particle,this polyether will easily block pipes and adsorbents,even leading to security incidents. Based on the chemical bond rupture of silyl ether,this paper designed a series of metal fluorides for novel polymerization retarders.The results show that Ag F2 polymerization retarder has the good performances of high efficiency and rate for both thermodynamics and kinetics,which can effectively control the impurity into a low concentration of below 20 × 10-6. Furthermore,when Ag F2 is repeatedly passed by silicon tetrafluoride for 50 times( 10 kg/time),it still exhibits a good inhibition performance,which indicates that our proposed Ag F2 polymerization retarder has a good stability.
In the manufacture and purification of high purity silicon tetrafluoride in electronic grade,the impurity of fluorinatedsilyl ether is easily formed,or worse its polyether can be severely generated. Due to the fast aggregation from the colloid to the particle,this polyether will easily block pipes and adsorbents,even leading to security incidents. Based on the chemical bond rupture of silyl ether,this paper designed a series of metal fluorides for novel polymerization retarders.The results show that Ag F2 polymerization retarder has the good performances of high efficiency and rate for both thermodynamics and kinetics,which can effectively control the impurity into a low concentration of below 20 × 10-6. Furthermore,when Ag F2 is repeatedly passed by silicon tetrafluoride for 50 times( 10 kg/time),it still exhibits a good inhibition performance,which indicates that our proposed Ag F2 polymerization retarder has a good stability.
引文
[1]张妙鹤,唐安江,汤正河,等.四氯化硅和四氟化硅的研究比较[J].现代化工,2012(6):34-38.
[2]陈学航,李焱,张建刚,等.四氟化硅的制备与提纯[J].硅酸盐通报,2015(7):1891-1895.
[3]韦德举,唐安江,张妙鹤,等. Si F4气体中(Si F3)2O的净化方法[J].广州化工,2014(15):11-12.
[4]杨师棣.论醚键的酸催化断裂反应[J].渭南师专学报,1999(2):36-38.
[5]纪晓洋.苯胺阻聚剂的作用原理及应用[J].化工管理,2017(21):220.
[6]许艾娜.异戊二烯阻聚剂进展[J].石油化工技术与经济,2018(1):49-54.
[7]尹彦冰,金洺函,宫晶,等. Keggin型Si-Mo-V杂多酸的催化、阻聚性能研究[J].化学研究与应用,2018(1):123-126.
[2]陈学航,李焱,张建刚,等.四氟化硅的制备与提纯[J].硅酸盐通报,2015(7):1891-1895.
[3]韦德举,唐安江,张妙鹤,等. Si F4气体中(Si F3)2O的净化方法[J].广州化工,2014(15):11-12.
[4]杨师棣.论醚键的酸催化断裂反应[J].渭南师专学报,1999(2):36-38.
[5]纪晓洋.苯胺阻聚剂的作用原理及应用[J].化工管理,2017(21):220.
[6]许艾娜.异戊二烯阻聚剂进展[J].石油化工技术与经济,2018(1):49-54.
[7]尹彦冰,金洺函,宫晶,等. Keggin型Si-Mo-V杂多酸的催化、阻聚性能研究[J].化学研究与应用,2018(1):123-126.