功能梯度材料MEMS研究现状
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摘要
本文介绍了国内外关于功能梯度材料MEMS近年来的研究进展。分别介绍了MEMS的耗能机理以及功能梯度材料的性能,并指出研究中的难点和今后进一步研究的方向。
This paper introduces the research progress of functionally graded materials MEMS in recent years. The energy dissipation mechanism of MEMS and the performance of functionally graded materials are introduced respectively, and the difficulties in the research and the direction of further research in the future are pointed out.
This paper introduces the research progress of functionally graded materials MEMS in recent years. The energy dissipation mechanism of MEMS and the performance of functionally graded materials are introduced respectively, and the difficulties in the research and the direction of further research in the future are pointed out.
引文
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[11]Eshraghi I,Dag S,Soltani N.Consideration of spatial variation of the length scale parameter in static and dynamic analyses of functionally graded annular and circular micro-plates[J].Composites Part B:Engineering,2015,78:338-348.
[12]Salehipour H,Nahvi H,Shahidi A R.Exact closed-form free vibration analysis for functionally graded micro/nano plates based on modified couple stress and three-dimensional elasticity theories[J].Composite Structures,2015,124:283-291.
[13]Azizi S,Ghazavi M R,Rezazadeh G,Khadem S E.Thermo-elastic damping in a functionally graded piezoelectric micro-resonator.International Journal of Mechanics and Materials in Design,2015,11(4):357-369.
[14]Emami A A,Alibeigloo A.Exact solution for thermal damping of functionally graded Timoshenko microbeams[J].Journal of Thermal Stresses,2016,39(2):231-243.
[15]Emami A A,Alibeigloo A.Thermoelastic damping analysis of FG Mindlin microplates using strain gradient theory[J].Journal of Thermal Stresses,2016,39(12):1499-1522.
[16]许新,李世荣.功能梯度材料微梁的热弹性阻尼研究[J].力学学报,2017,49(2):308-316.
[17]Li S R,Xu X,Chen S.Analysis of thermoelastic damping of functionally graded material beam resonators[J].Composite Structures,2017:S0263822317319955.
[18]Zhong Z Y,Zhou J P,Zhang H L.Thermoelastic Damping in Functionally Graded Microbeam Resonators[J].IEEESensors Journal,2017,17(11):3381-3390.
[2]Fernández L J,Wiegerink R J,Flokstra J,et al.A capacitive RF power sensor based on MEMS technology[C]//Memswave.2017.
[3]黄仕远.浅谈梯度功能材料的特点及其应用[J].百科论坛电子杂志,2018(14):270.
[4]顾筠,李瑛.功能梯度材料的发展及结构力学问题研究[J].军民两用技术与产品,2018(10):138.
[5]M.Rahaeifard,M.H.Kahrobaiyan,M.T.Ahmadian,Sensitivity analysis of atomic force microscope cantilever made of functionally graded materials.In DETC2009-86254,3rd Int.Conf.on Micro-and Nanosystems(MNS3),San Diego,CA,30 August-2September 2009.
[6]Mahamood R M,Akinlabi E T,Shukla M,et al.Functionally graded material:an overview[J].2012.
[7]Sharafkhani N,Rezazadeh G,Shabani R.Study of mechanical behavior of circular FGM micro-plates under nonlinear electrostatic and mechanical shock loadings[J].Acta Mechanica,2012,223(3):579-591.
[8]Jung W Y,Park W T,Han S C.Bending and vibration analysis of S-FGM microplates embedded in Pasternak elastic medium using the modified couple stress theory[J].International Journal of Mechanical Sciences,2014,87:150-162.
[9]He L,Lou J,Zhang E,et al.A size-dependent four variable refined plate model for functionally graded microplates based on modified couple stress theory[J].Composite Structures,2015,130:107-115.
[10]Lou J,He L,Du J.A unified higher order plate theory for functionally graded microplates based on the modified couple stress theory[J].Composite Structures,2015,133:S0263822315006868.
[11]Eshraghi I,Dag S,Soltani N.Consideration of spatial variation of the length scale parameter in static and dynamic analyses of functionally graded annular and circular micro-plates[J].Composites Part B:Engineering,2015,78:338-348.
[12]Salehipour H,Nahvi H,Shahidi A R.Exact closed-form free vibration analysis for functionally graded micro/nano plates based on modified couple stress and three-dimensional elasticity theories[J].Composite Structures,2015,124:283-291.
[13]Azizi S,Ghazavi M R,Rezazadeh G,Khadem S E.Thermo-elastic damping in a functionally graded piezoelectric micro-resonator.International Journal of Mechanics and Materials in Design,2015,11(4):357-369.
[14]Emami A A,Alibeigloo A.Exact solution for thermal damping of functionally graded Timoshenko microbeams[J].Journal of Thermal Stresses,2016,39(2):231-243.
[15]Emami A A,Alibeigloo A.Thermoelastic damping analysis of FG Mindlin microplates using strain gradient theory[J].Journal of Thermal Stresses,2016,39(12):1499-1522.
[16]许新,李世荣.功能梯度材料微梁的热弹性阻尼研究[J].力学学报,2017,49(2):308-316.
[17]Li S R,Xu X,Chen S.Analysis of thermoelastic damping of functionally graded material beam resonators[J].Composite Structures,2017:S0263822317319955.
[18]Zhong Z Y,Zhou J P,Zhang H L.Thermoelastic Damping in Functionally Graded Microbeam Resonators[J].IEEESensors Journal,2017,17(11):3381-3390.