基于微机电系统的微型气相色谱柱研究进展
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摘要
气相色谱柱是气相色谱仪的关键部件,主要用于混合气体组分的分离。与传统气相色谱柱相比,基于微机电系统(MEMS)技术设计制作的微型气相色谱柱具有重量轻、体积小、功耗低、分离快速等优点,便于集成到便携式气相色谱仪中,适应了目前气相色谱仪微型化的发展趋势。该文综述了MEMS微型气相色谱柱的研究进展,首先阐述了MEMS微型气相色谱柱理论基础,随后对MEMS微型气相色谱柱沟道布局及柱内结构、固定相支撑层及固定相制备等方面进行了综述,最后对其发展趋势进行了展望。
The gas chromatography( GC) column is a key component of the gas chromatographic system,which is mainly used for the separation of mixed gas components. Compared with the traditional GC column,the micro GC column based on micro-electro-mechanical systems( MEMS) technology has the advantages of lighter weight,smaller volume,lower power consumption,and faster analysis. Furthermore,it can be integrated into a portable instrument,such as a miniaturized GC. The research progress of micro GC columns based on MEMS technology is summarized in this paper. First,the theoretical basis of the MEMS micro GC column is stated. Then,the layout and inner structure of the MEMS micro GC column,the stationaryphase support,and the preparation of the stationary phase are summarized. Finally,trends in the development of MEMS micro GC columns are discussed.
The gas chromatography( GC) column is a key component of the gas chromatographic system,which is mainly used for the separation of mixed gas components. Compared with the traditional GC column,the micro GC column based on micro-electro-mechanical systems( MEMS) technology has the advantages of lighter weight,smaller volume,lower power consumption,and faster analysis. Furthermore,it can be integrated into a portable instrument,such as a miniaturized GC. The research progress of micro GC columns based on MEMS technology is summarized in this paper. First,the theoretical basis of the MEMS micro GC column is stated. Then,the layout and inner structure of the MEMS micro GC column,the stationaryphase support,and the preparation of the stationary phase are summarized. Finally,trends in the development of MEMS micro GC columns are discussed.
引文
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[2]Van Deemter J J,Zuiderw eg F J,Klinkenberg A.Chem Eng Sci,1956,5(6):271
[3]Golay M J E.Gas Chromatography,New York:Academic Press,1958
[4]Akbar M,Shakeel H,Agah M//Sirvio S,et al.2015 28th IEEE International Conference on Micro Electro Mechanical Systems(MEMS).Piscataw ay:IEEE Press,2015:771
[5]Terry S C,Jerman J H,Angell J B.IEEE Trans Electron Devices,1979,26(12):1880
[6]Noh H,Hesketh P J,Frye-Mason G C.J Microelectromech Syst,2002,11(6):718
[7]Bhushan A,Yemane D,McDaniel S,et al.Analyst,2010,135(10):2730
[8]Lu C J,Steinecker W H,Tian W C,et al.Lab Chip,2005,5(10):1123
[9]Lambertus G,Elstro A,Sensenig K,et al.Anal Chem,2004,76(9):2629
[10]Potkay J A,Lambertus G R,Sacks R D,et al.J Microelectromech Syst,2007,16(5):1071
[11]Casals O,Romano-Rodríguez A,Illa X,et al//Becker T,et al.Smart Sensors,Actuators,and MEMS III.International Society for Optics and Photonics,Vol 6589.Bellingham:SPIE Press,2007:65891A
[12]Raut R P,Thurbide K B.Chromatographia,2017,80(5):805
[13]Hou L,Feng F,You W,et al.J Chromatogr A,2018,1552:73
[14]Li Y,Du X,Wang Y,et al.RSC Adv,2014,4(8):3742
[15]Li Y,Zhang R,Wang T,et al.Chemosphere,2016,158:154
[16]Bhushan A,Yemane D,Trudell D,et al.Microsyst Technol,2007,13(3/4):361
[17]Pai R S,Mott D R,Stepnow ski J L,et al//Lennart L,et al.2008 IEEE Conference on Technologies for Homeland Security.Piscataw ay:IEEE Press,2008:150
[18]Stadermann M,McBrady A D,Dick B,et al.Anal Chem,2006,78(16):5639
[19]Radadia A D,Salehi-Khojin A,Masel R I,et al.Sens Actuat B-Chem,2010,150(1):456
[20]Radadia A D,Salehi-Khojin A,Masel R I,et al.J Micromech Microeng,2010,20(1):015002
[21]Sturmann J,Junge S,Benecke W,et al//Hosticka B J,et al.The Sixteenth Annual International Conference on Micro Electro Mechanical Systems.Piscataw ay:IEEE Press,2003:399
[22]Zampolli S,Elmi I,Stürmann J,et al.Sens Actuat B-Chem,2005,105(2):400
[23]Sun J H,Guan F Y,Zhu X F,et al.J Chromatogr A,2016,1429:311
[24]Ali S,Ashraf-Khorassani M,Taylor L T,et al.Sens Actuat B-Chem,2009,141(1):309
[25]Sun J H,Cui D,Chen X,et al.J Chromatogr A,2013,1291:122
[26]Tian B,Feng F,Hou L,et al//Anuradha S,et al.IEEE30th International Conference on Micro Electro Mechanical Systems.Piscataw ay:IEEE Press,2017:1343
[27]Akbar M,Shakeel H,Agah M.Lab Chip,2015,15(7):1748
[28]Azzouz I,Vial J,Thiébaut D,et al.Anal Bioanal Chem,2014,406(4):981
[29]Li Y,Zhang R,Wang T,et al.Talanta,2016,154:99
[30]Shakeel H,Wang D,Heflin J R,et al.Sens Actuat B-Chem,2015,216:349
[31]Yuan H,Du X,Tai H,et al.Sens Actuat B-Chem,2017,239:304
[32]Yuan H,Du X,Li Y,et al//Bhuyan M S,et al.IEEE International Conference on Manipulation,Manufacturing and Measurement on the Nanoscale(3M-NANO).Piscataw ay:IEEE Press,2016:283
[33]Shakeel H,Agah M.Sens Actuat B-Chem,2017,242:215
[34]Sidelnikov V N,Nikolaeva O A,Platonov I A,et al.Russ Chem Rev,2016,85(10):1033
[35]Chan R,Lopez A,Regmi B P,et al//Yu C L,et al.19th International Conference on Solid-State Sensors,Actuators and Microsystems(TRANSDUCERS).Piscataw ay:IEEE Press,2017:1528
[36]Haghighi F,Talebpour Z,Sanati-Nezhad A.Lab Chip,2015,15(12):2559
[37]Regmi B P,Chan R,Agah M.J Chromatogr A,2017,1510:66
[38]Azzouz I,Marty F,Bourouina T//Cavicchi R E,et al.2017Symposium on Design,Test,Integration and Packaging of MEMS/MOEMS(DTIP).Piscataw ay:IEEE Press,2017:1
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[40]Wang T.[MS Dissertation].Hangzhou:Zhejiang University,2016王涛.[硕士学位论文].杭州:浙江大学,2016
[41]Li Y.[PhD Dissertation].Chendu:University of Electronic Science and Technology of China,2014李臆.[博士学位论文].成都:电子科技大学,2014
[42]Guan Y F,Wang J W,Duan C H,Chinese Journal of Chromatography,2009,27(5):592关亚风,王建伟,段春凤.色谱,2009,27(5):592
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