激光诱导沉积高粘度银浆制备微结构的研究
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摘要
激光诱导向前转移是近些年来兴起的一种微加工技术,可以用来转移金属材料、生物材料和各向异性材料等。进行了利用纳秒激光诱导沉积高粘度导电银浆的实验研究,并对接收层上沉积的银浆进行观察分析,探讨了激光脉冲能量和与接收层的距离对沉积效果的影响,分析了沉积过程,沉积出连续银浆导线,并分析其导电特性。实验发现,当激光脉冲能量为87μJ,与接收层的距离为40μm时,沉积点均匀稳定,直径为一百多微米。通过调节三维平台带动靶材移动,用交叉打点的方法进行沉积,可制备出连续银浆导线,导线的宽度约100μm,电阻率达6.12×10~(-8)Ωm,与靶材的电阻率相差不大,可以用于微电路和微传感器等的制备。一维线状连续微结构的成功制备,为以后沉积二维微结构,甚至三维结构奠定了基础。
Laser induced forward transfer(LIFT) is a micro fabrication technology arising in the recent decades, which has been successfully applied in the transfer of materials including metal, biological and anisotropic materials. An experimental research on the LIFT of high-viscosity conductive silver paste was carried out. The deposited silver paste on acceptor was observed and analyzed. And the effect of pulse energy and donor-acceptor distance on experimental results was discussed, and conduction characteristics of silver paste were analyzed. The experimental results show that when laser pulse energy and donor-acceptor distance is 87 μ and 40 μm,respectively,the silver paste is uniform,stable and about 100 μm in diameter. By adjusting the three-dimensional platform with moving donor and depositing alternately,a continuous line of silver paste is achieved successfully. The width of line is about 100 μm,and the resistivity is 6. 12×10~(-8)Ωm. It is expected that the method can be applied in the fabrication of micro-circuit and micro circuits. One dimensional linear continuous micro-structure has been fabricated successfully, which lays the foundation for fabrication of two dimensional micro-structure, even three dimensional micro-structure in the next work.
Laser induced forward transfer(LIFT) is a micro fabrication technology arising in the recent decades, which has been successfully applied in the transfer of materials including metal, biological and anisotropic materials. An experimental research on the LIFT of high-viscosity conductive silver paste was carried out. The deposited silver paste on acceptor was observed and analyzed. And the effect of pulse energy and donor-acceptor distance on experimental results was discussed, and conduction characteristics of silver paste were analyzed. The experimental results show that when laser pulse energy and donor-acceptor distance is 87 μ and 40 μm,respectively,the silver paste is uniform,stable and about 100 μm in diameter. By adjusting the three-dimensional platform with moving donor and depositing alternately,a continuous line of silver paste is achieved successfully. The width of line is about 100 μm,and the resistivity is 6. 12×10~(-8)Ωm. It is expected that the method can be applied in the fabrication of micro-circuit and micro circuits. One dimensional linear continuous micro-structure has been fabricated successfully, which lays the foundation for fabrication of two dimensional micro-structure, even three dimensional micro-structure in the next work.
引文
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[15]Breckenfeld E,Kim H,Auyeung R C Y,et al.Laser-induced forward transfer of silver nanopaste for microwave interconnects[J].Applied Surface Science,2015,331:254-261.
[2]Nakata Y,Okada T,Maeda M.Transfer of Laser Dye by Laser-Induced Forward Transfer[J].Japanese Journal of Applied Physics,2002,41(41):L839-L841.
[3]Changjian S K,Ho J R,Cheng J W J,et al.Fabrication of carbon nanotube field emission cathodes in patterns by a laser transfer method[J].Nanotechnology,2006,17(5):1184-1187.
[4]Boutopoulos C,Pandis C,Giannakopoulos K,et al.Polymer/carbon nanotube composite patterns via laser induced forward transfer[J].Applied Physics Letters,2010,96(4):041104-041104-3.
[5]Alloncle A P,Delaporte P,Sentis M.Experimental investigations of laser-induced forward transfer process of organic thin films[J].Applied Surface Science,2007,254(4):1206-1210.
[6]Zergioti I,Karaiskou A,Papazoglou D G,et al.Time resolved schlieren study of sub-pecosecond and nanosecond laser transfer of biomaterials[J].Applied Surface Science,2005,247(1-4):584-589.
[7]Veiko V P,Shakhno E A,Smirnov V N,et al.Laser-induced film deposition by LIFT:Physical mechanisms and applications[J].Laser&Particle Beams,2006,24(2):203-209.
[8]Claeyssens F,Klini A,Mourka A,et al.Laser patterning of Zn for ZnO nanostructure growth:Comparison between laser induced forward transfer in air and in vacuum[J].Thin Solid Films,2007,515(24 SPEC.ISS.):8529-8533.
[9]PiquéA,Kim H,Auyeung R C Y,et al.Laser forward transfer of functional materials for Digital Fabrication of Microelectronics[J].Journal of Imaging Science&Technology,2013,57(4):1-8.
[10]Mathews S A,Charipar N A,Auyeung R C,et al.Laser forward transfer of solder paste for microelectronics fabrication[J].Proceedings of SPIE-The International Society for Optical Engineering,2015,9351:93510Y-93510Y-9.
[11]Florian C,Caballero-Lucas F,Fernández-Pradas J M,et al.Conductive silver ink printing through the laser-induced forward transfer technique[J].Applied Surface Science,2014,336:304-308.
[12]Inui T.Laser-induced forward transfer of high-viscosity silver precursor ink for non-contact printed electronics[J].Rsc Advances,2015,5(95):77942-77947.
[13]Munoz-Martin D,Brasz C F,Chen Y,et al.Laser-induced forward transfer of high-viscosity silver pastes[J].Applied Surface Science,2016,366:389-396.
[14]Morales M,Chen Y,Munoz-Martin D,et al.High volume transfer of high viscosity silver pastes using laser directwrite processing for screen printing of c-Si cells[J].Proceedings of SPIE-The International Society for Optical Engineering,2015,9351:93510B-93510B-7.
[15]Breckenfeld E,Kim H,Auyeung R C Y,et al.Laser-induced forward transfer of silver nanopaste for microwave interconnects[J].Applied Surface Science,2015,331:254-261.