晶圆FAB厂罗茨真空泵用永磁电机研发设计与实验
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摘要
为满足在晶圆FAB厂内使用罗茨真空泵的工程需求及性能要求,本文设计了一台1.5 kW小体积高速永磁同步电机并将其作为罗茨真空泵用驱动电机。采用多极少槽的极槽配合方案,减少变频器及供电装置中高次谐波对电机运行性能和损耗温升的影响。基于场路耦合思想及商业有限元软件,完成了电机拓扑结构及电磁设计,仿真结果验证了电磁设计及结构的合理性;通过三维温度场研究,表明该设计可应用于真空泵类工程之中。最后对样机进行了电机性能实验,实验数据与设计指标比较吻合,对罗茨真空泵进行性能测试实验,进一步验证了罗茨真空泵驱动用高速永磁电机设计的合理性,新研发电机满足泵的各项性能指标要求,研究工作具有工程实用价值。
A novel type of permanent-magnet synchronous motor,driving Roots vacuum pumps for production line in Si-wafer fabrication,was designed in pole-slot matching scheme.The six poles and nine stator-slots,in the newly-designed small motor(1.5 kW and 9,000 r/min),significantly weaken the negative impact of the higher-order harmonics on the performance and temperature-rise of the motor.In addition,the 3-D temperature profiles in the new motor was mathematically modeled,theoretically analyzed,numerically simulated and experimentally evaluated.The simulated results show that the highest temperatures of the components are much lower than Curie temperature of N35 SH permanent-magnet(150℃).For example,the temperature ranges of the stator iron-core(38.69～40.05℃),coils(40.36～40.84℃) and permanent magnet(39.76～40.02℃) all meet the design requirements.The simulated and measured results were found to be in good agreement.
A novel type of permanent-magnet synchronous motor,driving Roots vacuum pumps for production line in Si-wafer fabrication,was designed in pole-slot matching scheme.The six poles and nine stator-slots,in the newly-designed small motor(1.5 kW and 9,000 r/min),significantly weaken the negative impact of the higher-order harmonics on the performance and temperature-rise of the motor.In addition,the 3-D temperature profiles in the new motor was mathematically modeled,theoretically analyzed,numerically simulated and experimentally evaluated.The simulated results show that the highest temperatures of the components are much lower than Curie temperature of N35 SH permanent-magnet(150℃).For example,the temperature ranges of the stator iron-core(38.69～40.05℃),coils(40.36～40.84℃) and permanent magnet(39.76～40.02℃) all meet the design requirements.The simulated and measured results were found to be in good agreement.
引文
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[10] 安跃军,张强,李文瑞,等.新型移相式屏蔽电动机屏蔽套涡流与温升分析[J].西安交通大学学报,2014,48(6):50-54
[11] 刘坤,巴德纯,王光玉,等.多级罗茨干泵泵内传热与变形的计算和实验研究[J].真空科学与技术学报,2011,31(1):100-104
[12] Etemadrezaei M,Wolmarans J,Polinder H,et al.Precise Calculation and Optimization of Rotor Eddy Current Losses in High Speed Permanent Magnet Machine[J].IET Electric Power Applications,2010,4(7):516-524
[13] 安跃军,张振厚,张强,等.干式涡旋真空泵用特种电机温度场仿真与实验[J].电机与控制学报,2017,21(8):48-52
[14] 莫丽红,全力,朱孝勇,等.定子永磁式双转子电机设计与实验研究[J].电工技术学报,2014,29(9):74-82
[15] 张以忱.关于真空泵基础压力与罗茨真空泵特征性能指标的探讨[J].真空,2016,53(02):53-56
[2] 刘敏强.真空仪器设备应用与发展[J].中国仪器仪表, 2017,(9):21-23
[3] 安跃军,温宏亮,安辉,等.磁极调制式永磁电机的磁场分析与实验[J].电工技术学报,2012,27(11):111-117
[4] Song X,Han B,Zheng S,et al.A Novel Sensorless Rotor Position Detection Method for High-Speed Surface PM Motors in a Wide Speed Range[J].IEEE Transactions on Power Electronics,2017,99:7083-7093
[5] 柴嘉南.真空干泵驱动用宽调速永磁同步电动机设计与控制研究[D].沈阳:沈阳工业大学,2018
[6] 安跃军,张志恒,张振厚,等.真空干泵用屏蔽电机无速度传感器带速重投控制系统[J].电工技术学报,2018,33(12):2665-2675
[7] 刘坤,李培印,李强,等.三轴罗茨真空泵的抽气理论和结构设计[J].真空科学与技术学报,2015,35(8):934-939
[8] 安跃军,孟昭军.电机系统及其计算机仿真[M].北京:机械工业出版社,2014:118-121
[9] Kolondzovski Z,Sallinen P,Belahcen A,et al. Rotordynamic Analysis of Different Rotor Structures for High-Speed Permanent-Magnet Electrical Machines[J].Electric Power Applications Iet,2010,4(7):516-524
[10] 安跃军,张强,李文瑞,等.新型移相式屏蔽电动机屏蔽套涡流与温升分析[J].西安交通大学学报,2014,48(6):50-54
[11] 刘坤,巴德纯,王光玉,等.多级罗茨干泵泵内传热与变形的计算和实验研究[J].真空科学与技术学报,2011,31(1):100-104
[12] Etemadrezaei M,Wolmarans J,Polinder H,et al.Precise Calculation and Optimization of Rotor Eddy Current Losses in High Speed Permanent Magnet Machine[J].IET Electric Power Applications,2010,4(7):516-524
[13] 安跃军,张振厚,张强,等.干式涡旋真空泵用特种电机温度场仿真与实验[J].电机与控制学报,2017,21(8):48-52
[14] 莫丽红,全力,朱孝勇,等.定子永磁式双转子电机设计与实验研究[J].电工技术学报,2014,29(9):74-82
[15] 张以忱.关于真空泵基础压力与罗茨真空泵特征性能指标的探讨[J].真空,2016,53(02):53-56