基于量子遗传算法的宽带离散化极紫外多层膜的研制
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摘要
提出了一种基于量子遗传算法的宽带极紫外多层膜的离散化设计方法,解决了在膜系设计中普遍采用的遗传算法存在求解精度低的问题.同时在基于量子遗传算法的膜系设计方法中对膜系进行了离散化设计,解决了在仅由时间控制膜厚且沉积速率较大的镀膜系统中的膜厚高精度控制的问题.依据量子遗传算法的膜系设计结果采用磁控溅射镀膜系统镀制宽带极紫外多层膜.测试结果表明,宽角度极紫外多层膜的入射角为0°~15°,反射率达45%以上;宽光谱极紫外多层膜的入射波长为13~15nm,反射率达20%以上.相关研究工作为宽带极紫外多层膜的研发提供了另一种可供选择的且较优的搜索优化算法,同时该算法结合实验,实现膜厚的离散化设计,使镀制出的多层膜具有较好的光谱性能.
Quantum state genetic algorithm was applied into the discrete design of broadband extremeultraviolet multilayer to solve the problem of solving accuracy in genetic algorithm.And the discrete design of layer thickness can be achieved in the process of quantum state genetic algorithm.It solves the problem that the layer can be accurately fabricated when the magnetron sputtering system is controlled by the deposition time.According to the results designed by quantum state genetic algorithm,broadband extreme-ultraviolet multilayers have been fabricated by magnetron sputtering system.The measured results show two kinds of multilayers designed by quantum state genetic algorithm were fabricated,one has a reflectivity of more than 45% in the 0°~15° range of incidence angle,and the other reaches the reflectivity of more than 20% for the wavelength range from 13 nm to 15 nm.The relative work shows the potential value of quantum state genetic algorithm and offers another alternative optimizing algorithm in the field of broadband extreme-ultraviolet multilayer design.And then the algorithm can achieve the discrete design of multilayer,which makes fabricated multilayer have better spectral properties.
Quantum state genetic algorithm was applied into the discrete design of broadband extremeultraviolet multilayer to solve the problem of solving accuracy in genetic algorithm.And the discrete design of layer thickness can be achieved in the process of quantum state genetic algorithm.It solves the problem that the layer can be accurately fabricated when the magnetron sputtering system is controlled by the deposition time.According to the results designed by quantum state genetic algorithm,broadband extreme-ultraviolet multilayers have been fabricated by magnetron sputtering system.The measured results show two kinds of multilayers designed by quantum state genetic algorithm were fabricated,one has a reflectivity of more than 45% in the 0°~15° range of incidence angle,and the other reaches the reflectivity of more than 20% for the wavelength range from 13 nm to 15 nm.The relative work shows the potential value of quantum state genetic algorithm and offers another alternative optimizing algorithm in the field of broadband extreme-ultraviolet multilayer design.And then the algorithm can achieve the discrete design of multilayer,which makes fabricated multilayer have better spectral properties.
引文
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[16]WANG Hong-chang,WANG Zhan-shan.The optimizing and designing method of multilayer film[J].Journal of Applied Optics,2005,26(5):50-53.王洪昌,王占山.多层膜优化设计方法[J].应用光学,2005,26(5):50-53.
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[19]KUANG Shang-qi,ZHANG Chao,WANG Yi-ming,et al.Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer[J].Optics and Precision Engineering,2017,25(8):2046-2056.匡尚奇,张超,王一名,等.改进型量子进化算法在宽带EUV多层膜设计中的应用[J].光学精密工程,2017,25(8):2046-2056.
[20]LI P,LI S.Quantum-inspired evolutionary algorithm for continuous space optimization based on Bloch coordinates of qubits[J].Neurocomputing,2008,72(1-3):581-591.
[21]ZHOU Xiang-yan,ZHANG Chao,KUANG Shang-qi,et al.Analysis of the structure of optical thin film based on quantum-inspired genetic algorithm[J].Chinese Journal of Lasers,2017,44(12):1203002.周祥燕,张超,匡尚奇,等.基于量子衍生遗传算法的光学薄膜结构分析[J].中国激光,2017,44(12):1203002.
[22]HAN K H,KIM J H.Quantum-inspired evolutionary algorithm for a class of combinatorial optimization[J].IEEE Transactions on Evolutionary Computation,2002,6(6):580-593.
[23]DAI H,YANG Y,LI C,et al.Quantum interference crossover-based clonal selection algorithm and its application to traveling salesman problem[J].Ieice Transactions on Information And Systems,2009,92(1):78-85.
[24]HENKE B L,GULLIKSON E M,DAVIS J C.X-ray interactions:photoabsorption,scattering,transmission,and reflection at E=50-30,000eV,Z=1-92[J].Atomic Data and Nuclear Data Tables,1993,54(4):181-342.
[25]HAN K H,KIM J H.Genetic quantum algorithm and its application to combinatorial optimization problem[J].Institute of Electrical and Electronics Engineers,2000,2:1354-1360.
[26]WANG X,WANG X D,KUI L U.Optical thin film optimization design using adaptive real-coded genetic algorithm[J].Chinese Journal of Quantum Electronics,2004,21(1):51-55.
[2]WONISCH A,WESTERWALBESLOH T,HACHMANN W,et al.Aperiodic nanometer multilayer systems as optical key components for attosecond electron spectroscopy[J].Thin Solid Films,2004,s464-465(1):473-477.
[3]CHEN Hong,LAN Hui,CHEN Zi-qi,et al.Experimental study on laser produced tin droplet plasma extreme ultraviolet light source[J].Acta Physica Sinica,2015,64(7):75202-075202.陈鸿,兰慧,陈子琪,等.脉冲激光辐照液滴锡靶等离子体极紫外辐射的实验研究[J].物理学报,2015,64(7):75202-075202.
[4]HUANG Q,MEDVEDEV V,ROBBERT V D K,et al.Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics[J].Applied Physics Reviews,2017,4(1):011104.
[5]SZENTGYORGYI A,CHRISTENSEN F E,ROLL J,et al.Design of grazing-incidence multilayer supermirrors for hard-x-rayreflectors[J].Applied Optics,1995,34(34):7935-44.
[6]KOZHEVNIKOV I V,BUKREEVA I N,ZIEGLER E.Design of X-ray supermirrors[J].Nuclear Inst and Methods in Physics Research A,2001,460(2):424-443.
[7]ZHAO Yong-peng,XU Qiang,XIAO De-long,et al.Time behavior and optimum conditions for the Xe gas extreme ultraviolet source[J].Acta Physica Sinica,2013,62(24):1706-1721.赵永蓬,徐强,肖德龙,等.Xe介质极紫外光源时间特性及最佳条件研究[J].物理学报,2013,62(24):215-221.
[8]AQUILA A L,SALMASSI F,DOLLAR F,et al.Developments in realistic design for aperiodic Mo/Si multilayer mirrors.[J].Optics Express,2006,14(21):10073-10078.
[9]YAKSHIN A E,KOZHEVNIKOV I V,ZOETHOUT E,et al.Properties of broadband depth-graded multilayer mirrors for EUV optical systems[J].Optics Express,2010,18(7):6957-71.
[10]CHEN Zhao-quan,LIU Ming-hai,LIU Yu-ping,et al.Fabrication of transparent conductive AZO(ZnO:Al)film by plasma enhanced chemical vapor deposition[J].Acta Physica Sinica,2009,58(6):4260-4266.陈兆权,刘明海,刘玉萍,等.PECVD制备AZO(ZnO:Al)透明导电薄膜[J].物理学报,2009,58(6):4260-4266.
[11]CHEN Ming,ZHOU Xi-ying,MAO Xiu-juan,et al.Inuence of external magneticeld on properties of aluminumdoped zinc oxidelms prepared by RF magnetron sputtering[J].Acta Physica Sinica,2014,63(9):98103-098103.陈明,周细应,毛秀娟,等.外加磁场对射频磁控溅射制备铝掺杂氧化锌薄膜影响的研究[J].物理学报,2014,63(9):98103-098103.
[12]CHEN Chao,JI Yong,GAO Xiao-yong,et al.Study on the deposition of aluminum-doped zinc oxide films using directcurrent pulse magnetron reactive sputtering technique[J].Acta Physica Sinica,2012,61(3):036104.陈超,冀勇,郜小勇,等.直流脉冲磁控反应溅射技术制备掺铝氧化锌薄膜的研究[J].物理学报,2012,61(3):036104.
[13]HAN Jun,ZHANG Peng,GONG Hai-bo.Influence of the growth conditions on the transparent conductive properties of Zn O:Al thin films grown by pulsed laser deposition[J].Acta Physica Sinica,2013,62(21):216102.韩军,张鹏,巩海波,等.生长条件对脉冲激光沉积制备ZnO:Al薄膜光电性能的影响[J].物理学报,2013,62(21):216102.
[14]LIANG Shuang,HUANG Zeng-xia,DU Xiao-long.Modulation of electrical and optical properties of gallium-doped ZnO films by radio frequency magnetron sputtering[J].Chinese Physics B,2012,21(6):478-484.
[15]CHENG Xin-bin,WANG Zhan-shan,ZHANG Zhong,et al.Design of X-ray super-mirrors using simulated annealing algorithm[J].Acta Optica Sinica,2006,26(5):787-791.程鑫彬,王占山,张众,等.基于模拟退火算法的宽角度X射线超反射镜设计研究[J].光学学报,2006,26(5):787-791.
[16]WANG Hong-chang,WANG Zhan-shan.The optimizing and designing method of multilayer film[J].Journal of Applied Optics,2005,26(5):50-53.王洪昌,王占山.多层膜优化设计方法[J].应用光学,2005,26(5):50-53.
[17]HAUPT R L,HAUPT S E.The binary genetic algorithm[M].Practical Genetic Algorithms,Second Edition.John Wiley&Sons,Inc.2004.
[18]ZHANG Chao,ZHANG Jie-rui,WANG Yi-ming,et al.Design of broad-angle extreme ultraviolet multilayer coatings based on quantum evolutionary algorithm[J].Acta Optica Sinica,2017,37(6):0631001.张超,张杰瑞,王一名,等.基于量子进化算法的宽角度极紫外多层膜设计[J].光学学报,2017,37(6):0631001.
[19]KUANG Shang-qi,ZHANG Chao,WANG Yi-ming,et al.Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer[J].Optics and Precision Engineering,2017,25(8):2046-2056.匡尚奇,张超,王一名,等.改进型量子进化算法在宽带EUV多层膜设计中的应用[J].光学精密工程,2017,25(8):2046-2056.
[20]LI P,LI S.Quantum-inspired evolutionary algorithm for continuous space optimization based on Bloch coordinates of qubits[J].Neurocomputing,2008,72(1-3):581-591.
[21]ZHOU Xiang-yan,ZHANG Chao,KUANG Shang-qi,et al.Analysis of the structure of optical thin film based on quantum-inspired genetic algorithm[J].Chinese Journal of Lasers,2017,44(12):1203002.周祥燕,张超,匡尚奇,等.基于量子衍生遗传算法的光学薄膜结构分析[J].中国激光,2017,44(12):1203002.
[22]HAN K H,KIM J H.Quantum-inspired evolutionary algorithm for a class of combinatorial optimization[J].IEEE Transactions on Evolutionary Computation,2002,6(6):580-593.
[23]DAI H,YANG Y,LI C,et al.Quantum interference crossover-based clonal selection algorithm and its application to traveling salesman problem[J].Ieice Transactions on Information And Systems,2009,92(1):78-85.
[24]HENKE B L,GULLIKSON E M,DAVIS J C.X-ray interactions:photoabsorption,scattering,transmission,and reflection at E=50-30,000eV,Z=1-92[J].Atomic Data and Nuclear Data Tables,1993,54(4):181-342.
[25]HAN K H,KIM J H.Genetic quantum algorithm and its application to combinatorial optimization problem[J].Institute of Electrical and Electronics Engineers,2000,2:1354-1360.
[26]WANG X,WANG X D,KUI L U.Optical thin film optimization design using adaptive real-coded genetic algorithm[J].Chinese Journal of Quantum Electronics,2004,21(1):51-55.