基于磁致伸缩多层膜的磁声表面波传感器
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摘要
研究了一种基于FeCoSiB/SiO_2多层膜的磁声表面波(MSAW)传感器,其中FeCoSiB/SiO_2多层膜制备在石英声表面波(SAW)谐振器上。在外加磁场发生变化时,FeCoSiB/SiO_2多层膜通过巨杨氏模量效应影响压电衬底表层的相速度,进而改变SAW的谐振频率。通过设计和优化磁致伸缩多薄膜的结构和软磁性能,不仅获得磁致伸缩层总厚度与谐振器品质因数的关系,而且成功使磁敏传感器的灵敏度(Δf/H,即施加单位磁场时的谐振频率的变化量)提升了2个数量级,达到419 Hz/μT。在此基础下,探讨了Δf-H曲线在难、易轴方向表现出蝴蝶型和回线型特性的机理。由于该传感器具有很高的磁场灵敏度和良好的方向选择性,在微弱磁场(如地磁场)检测领域将具有极高的实用价值。
In current work, a magnetic surface acoustic wave(MSAW) sensor composed of FeCoSiB/SiO_2 multilayer film is studied. The FeCoSiB/SiO_2 multilayer film is deposited on a traditional quartz surface acoustic wave resonator. When the applied magnetic field changes, the FeCoSiB/SiO_2 multilayer film affects the phase velocity of the surface layer of the piezoelectric substrate by the giant Young's modulus effect, thereby changing the resonant frequency of the SAW. By optimizing the soft magnetic properties and designing the structure of the magnetostrictive multilayer film, not only the relationship between the total thickness of the magnetostrictive layer and the quality factor of the resonator is obtained, but also the sensitivity of the magnetic sensor(Δf/H, i.e., the variation of the resonance frequency when the unit magnetic field is applied) is improved by 2 orders of magnitude to 419 Hz/μT. On this basis, the mechanism of butterfly-like and loop-like Δf-H curves showing along the hard and the easy axis was studied. Because of its high magnetic field sensitivity and good directional selectivity, the MSAW sensor will be of extremely high practical value in the field of weak magnetic field(such as geomagnetic field) detection.
In current work, a magnetic surface acoustic wave(MSAW) sensor composed of FeCoSiB/SiO_2 multilayer film is studied. The FeCoSiB/SiO_2 multilayer film is deposited on a traditional quartz surface acoustic wave resonator. When the applied magnetic field changes, the FeCoSiB/SiO_2 multilayer film affects the phase velocity of the surface layer of the piezoelectric substrate by the giant Young's modulus effect, thereby changing the resonant frequency of the SAW. By optimizing the soft magnetic properties and designing the structure of the magnetostrictive multilayer film, not only the relationship between the total thickness of the magnetostrictive layer and the quality factor of the resonator is obtained, but also the sensitivity of the magnetic sensor(Δf/H, i.e., the variation of the resonance frequency when the unit magnetic field is applied) is improved by 2 orders of magnitude to 419 Hz/μT. On this basis, the mechanism of butterfly-like and loop-like Δf-H curves showing along the hard and the easy axis was studied. Because of its high magnetic field sensitivity and good directional selectivity, the MSAW sensor will be of extremely high practical value in the field of weak magnetic field(such as geomagnetic field) detection.
引文
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[2] NAN Tianxiang,HUI Yu,RINALDI M,et al.Self-biased 215 MHz magnetoelectric NEMS resonator for ultra-sensitive DC magnetic field detection[J].Scientific Reports,2013,3(6):1985.
[3] KADOTA M,ITO S.Sensitivity of surface acoustic wave magnetic sensors composed of various Ni electrode structures[J].Japanese Journal of Applied Physics,2012,51(7S):07GC21.
[4] ELHOSNI M,SéBASTIEN P W,MICHEL H,et al.Experimental study of multilayer piezo-magnetic SAW delay line for magnetic sensor[J].Procedia Engineering,2015,120:870-873.
[5] 何鹏举.声表面波网络传感器及其在国防工业中的应用[M].西安:西北工业大学出版社,2011.
[6] JAKUBIK W P.Surface acoustic wave-based gas sensors[J].Thin Solid Films,2011,520(3):986-993.
[7] JIN Hao,ZHOU Jian,HE Xingli,et al.Flexible surface acoustic wave resonators built on disposable plastic film for electronics and lab-on-a-chip applications[J].Scientific Reports,2013,3(7):2140.
[8] XUAN Weipeng,HE Mei,MENG Nan,et al.Fast response and high sensitivity ZnO/glass surface acoustic wave humidity sensors using graphene oxide sensing layer[J].Scientific Reports,2014,4:7206.
[9] HUI Yu,NAN Tianxiang,SUN Nianxiang,et al.High resolution magnetometer based on a high frequency magnetoelectric MEMS-CMOS oscillator[J].Journal of Microelectromechanical Systems,2015,24(1):134-143.
[10] BENETTI M,CANNATA D,VERONA E,et al.Highly selective surface acoustic wave e-nose implemented by laser direct writing[J].Sensors and Actuators B:Chemical,2019,283:154-162.
[11] MATATAGUI D,MARTí J,FERNáNDEZ M J,et al.Chemical warfare agents simulants detection with an optimized SAW sensor array[J].Sensors and Actuators:B Chemical,2011,154(2):199-205.
[12] PIETRANTONIO F D,CANNATà D,BENETTI M,et al.Detection of odorant molecules via surface acoustic wave biosensor array based on odorant-binding proteins[J].Biosensors & Bioelectronics,2012,41(1):328-334.
[13] PIORRA A,JAHNS R,TELIBAN I,et al.Magnetoelectric thin film composites with interdigital electrodes[J].Applied Physics Letters,2013,103(3):032902.
[14] WANG Yao,HU Jiamian,LIN Yuanhua,et al.Multiferroic magnetoelectric composite nanostructures[J].Npg Asia Materials,2010,2(2):61-68.
[15] ELHOSNI M,ELMAZRIA O,TALBI A,et al.FEM modeling of multilayer piezo-magnetic structure based surface acoustic wave devices for magnetic sensor[J].Procedia Engineering,2014,87:408-411.
[16] ZHOU Hao,TALBI A,TIERCELIN N,et al.Multilayer magnetostrictive structure based surface acoustic wave devices[J].Applied Physics Letters,2014,104(11):114101.
[17] 姜建利,杨雪梅,刘婉,等.基于ScAlN/FeGa结构的磁电声表面波谐振器 [J].压电与声光,2019,41(1):4-8.JIANG Jianli,YANG Xuemei,LIU Wan,et al.Magnetoelectric surface acoustic wave resonator based on ScAlN/FeGa structure[J].Piezoelectrics & Acoustooptics,2019,41(1):4-8.
[18] ZHAI Junyi,XING Zengping,DONG Shuxiang,et al.Detection of Pico-Tesla magnetic fields using magneto-electric sensors at room temperature[J].Applied Physics Letters,2006,88(6):062510.
[19] CHU Zhaoqiang,SHI Huaduo,POURHOSSEINIASL M J,et al.A magnetoelectric flux gate:new approach for weak DC magnetic field detection[J].Scientific Reports,2017,7(1):8592.
[20] JIANG Hui,ZHU Jie,MU Xing.The anisotropy of ΔE effect of Fe-Ga single crystal[J].IEEE Transactions on Magnetics,2018(99):1-6.
[21] JIANG Hui,ZHU Jie,MU Xing.Grain orientation dependence of ΔE effect and magnetomechanical coupling factor in polycrystalline galfenol alloy[J].Computational Materials Science,2019,156:67-76.
[22] LUDWIG A,QUANDT E.Optimization of the /spl Delta/E-effect in thin films and multilayers by magnetic field annealing[C]//S.l.:IEEE International Magnetics Conference,2002.
[23] LIU Xangli,BEI Tong,JUN Ouyang,et al.Self-biased vector magnetic sensor based on a Love-type surface acoustic wave resonator[J].Applied Physics Letters,2018,113(8):4.
[24] WEN Dandan,BAI Feiming,WANG Yicheng,et al.Tailoring of the soft magnetic property and uniaxial anisotropy of magnetostrictive films by interlayer[J].Journal of Applied Physics,2013,113(17):07E732.
[25] SMOLE P,RUILE W,KORDEN C,et al.Magnetically tunable SAW-resonator[C]//S.l.:IEEE International Frequency Control Symposium & Pda Exhibition Jointly with the European Frequency & Time Forum,2003.
[26] SáRK?ZI Z S,MACKAY K,PEUZIN J C.Elastic properties of magnetostrictive thin films using bending and torsion resonances of a bimorph[J].Journal of Applied Physics,2000,88(10):5827-5832.