真空预载型多孔质气体止推轴承静态特性研究
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摘要
为了提高孔质静压气体轴承的刚度,将负压腔引入多孔质静压气体止推轴承的设计中,运用有限元方法对真空预载型多孔质静压气体止推轴承进行数值分析,分析负压腔真空度、负压腔面积比S_a/S(负压腔横截面积与轴承横截面积比值)、多孔材料渗透率、供气压力等因素对轴承静态特性的影响。分析结果显示:负压腔中真空度的变化对轴承的刚度几乎没有影响;真空度的增大,改变了气膜的压力分布造成轴承承载能力在一定程度上的下降;在气膜间隙5～12μm之间,真空腔的引入使气膜刚度明显增加;当S_a/S≠0,气膜间隙8～10μm时,S_a/S值的变化对轴承承载能力的影响较刚度更大;在一定承载能力下,轴承刚度随负压腔面积比增大而增大,而气膜厚度随之逐渐减小。试制真空吸附型多孔质静压气体止推轴承,并对其承载能力、刚度进行试验,实验值和理论值有较好的一致性。
The porous aerostatic thrust bearing with vacuum chamber was numerically analyzed using the finite element method.The effects of the following factors on steady state characteristics of bearing were analyzed,such as the vacuum degree of vacuum chamber,vacuum chamber area ratio S_a/S(the ratio of bearing cross section area),the permeability of the porous material and the supply pressure.The analysis results show that the change of the vacuum degree in the vacuum chamber has almost no effect on the stiffness of the bearing.The increase of the vacuum degree changes the pressure distribution of the film and causes the bearing capacity decrease in certain case;When thickness of film is between 5 and 12 μm,the introduction of the vacuum chamber increases the stiffness of the film significantly.When S_a/S≠0 and the film gap is between 8 and 10 μm,the change of the S_a/S value has more influence on bearing capacity than that of the stiffness.Under the certain bearing capacity,the bearing stiffness is increased with vacuum chamber area ratio,and the film thickness is gradually decreased.Trial-produced porous aerostatic thrust bearing with vacuum chamber and its bearing capacity and stiffness were tested.The experimental values and theoretical values are in a good agreement.
The porous aerostatic thrust bearing with vacuum chamber was numerically analyzed using the finite element method.The effects of the following factors on steady state characteristics of bearing were analyzed,such as the vacuum degree of vacuum chamber,vacuum chamber area ratio S_a/S(the ratio of bearing cross section area),the permeability of the porous material and the supply pressure.The analysis results show that the change of the vacuum degree in the vacuum chamber has almost no effect on the stiffness of the bearing.The increase of the vacuum degree changes the pressure distribution of the film and causes the bearing capacity decrease in certain case;When thickness of film is between 5 and 12 μm,the introduction of the vacuum chamber increases the stiffness of the film significantly.When S_a/S≠0 and the film gap is between 8 and 10 μm,the change of the S_a/S value has more influence on bearing capacity than that of the stiffness.Under the certain bearing capacity,the bearing stiffness is increased with vacuum chamber area ratio,and the film thickness is gradually decreased.Trial-produced porous aerostatic thrust bearing with vacuum chamber and its bearing capacity and stiffness were tested.The experimental values and theoretical values are in a good agreement.
引文
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[15]章本照.流体力学中的有限元方法[M].北京:机械工业出版社,1986.
[2]王云飞.气体润滑理论与气体轴承设计[M].北京:机械工业出版社出版,1999.
[3]刘暾.一种提高静压气体轴承刚度方法的初步分析:自主式气体轴承[C]//第五届全国摩擦学学术会议论文集:下册.武汉:中国机械工程学会摩擦学分会,1992.
[4]RO S K,KIM S,KWAK Y,et al.A linear air bearing stage with active magnetic preloads for ultraprecise straight motion[J].Precision Engineering,2010,34(1):186-194.
[5]HUANG M,XU Q,LI M Y et al.A calculation method on the performance analysis of the thrust aerostatic bearing with vacuum pre-load[J].Tribology International,2017,110:125-130.
[6]张国庆.提高静压气体轴承刚度和承载能力的研究[D].哈尔滨:哈尔滨工业大学,2008.
[7]薛龙,郭德申.真空平衡型气体静压止推轴承刚度分析[J].北京石油化工学院学报,2000(1):67-70.XUE L,GUO D S.Research on the stiffness of an externally pressurized gas-lubricated thrust bearing with a vacuum-pockek[J].Journal of Beijing Institute of Petrochemical Technology,2000(1):67-70.
[8]薛龙,张宝生,周灿丰,等.真空平衡型气体静压止推轴承的数学模型研究[J].中国机械工程,2001,12(8):41-43.XUE L,ZHANG B S,ZHOU C F,et al.Research on the mathematical model of an externally pressurized gas-lubricated thrust bearing with a vacuum-pocket[J].China Mechanical Engineering,2001,12(8):41-43.
[9]陈志凌.环矩形真空吸附导轨的研究[D].长春:中国科学院研究生院(长春光学精密机械与物理研究所),2005.
[10]陈争.真空预载荷静压气体轴承的研究[D].哈尔滨:哈尔滨工业大学,2011.
[11]党根茂.气体润滑技术[M].南京:东南大学出版社,1990.
[12]刘暾,刘育华,史小文.气体静压轴承的有限元数值解法[J].光学机械,1984(2):1-13.
[13]张晓峰.大行程超精密工作台关键技术研究[D].天津:天津大学,2008.
[14]饶河清.基于FLUENT软件的多孔质静压轴承的仿真与实验研究[D].哈尔滨:哈尔滨工业大学,2006.
[15]章本照.流体力学中的有限元方法[M].北京:机械工业出版社,1986.