微型化半球陀螺制备工艺发展现状及趋势分析
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摘要
因低噪声、高性能、无磨损的优势,半球陀螺已成为航空、航天领域内的最佳导航陀螺。半球陀螺的微型化是微机电陀螺领域的研究热点,全球各研究单位设计了多种形态的谐振器结构,开发了各具特色的加工工艺,其选用的材质也各不相同,并研制出了形态各异的微半球陀螺结构。对半球陀螺微型化的历程和方式进行了综述,着重对微型化半球陀螺壳体谐振器的结构形态、工艺制备方法和选材进行了对比和分析,并对各微型化途径的特点进行了讨论和展望。
Hemispherical gyroscope is the best navigation gyroscope in aerospace field because of its low noise, high performance and no wear-out. The microscale hemispherical gyroscope is a research hotspot in the field of micro electro mechanical gyroscope. Various types of resonator structures have been designed by various research institutes in the world,and different fabrication technologies have been developed. Different materials have been selected and different types of microscale hemispherical gyroscope structures have been developed. In this paper, the process and mode of microscale hemispherical gyroscope are reviewed. The structure, process preparation method and material selection of microscale hemispherical gyroscope shell resonators are compared and analyzed. The characteristics of each microscale approach are discussed and prospected.
Hemispherical gyroscope is the best navigation gyroscope in aerospace field because of its low noise, high performance and no wear-out. The microscale hemispherical gyroscope is a research hotspot in the field of micro electro mechanical gyroscope. Various types of resonator structures have been designed by various research institutes in the world,and different fabrication technologies have been developed. Different materials have been selected and different types of microscale hemispherical gyroscope structures have been developed. In this paper, the process and mode of microscale hemispherical gyroscope are reviewed. The structure, process preparation method and material selection of microscale hemispherical gyroscope shell resonators are compared and analyzed. The characteristics of each microscale approach are discussed and prospected.
引文
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[2]Shao P, Tavassoli V, Mapberry C L, et al. A 3DHARPSS Polysilicon micro-hemispherical shell resonating gyroscope:design, fabrication and characterization[J].IEEE Sensors Journal, 2015, 15(9):4974-4985.
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[10]Kanik M, Bordeenithikasem P, Schroers J, et al. Microscale three-dimensional hemispherical shell resonators fabricated from metallic glass[C].International Symposium on Inertial Sensors and Systems, 2014.
[11]Xie Y, Hsieh H C,Pai P, et al. Precision curved micro hemispherical resonator shells fabricated by poached-egg micro-molding[C].Proceedings of IEEE Sensors, 2012.
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[13]Mehanathan N, Tavassoli V, Shao P,et al. Invar-36micro hemispherical shell resonators[J].Proceedings of the 27~(th)IEEE International Conference on Micro Electro Mechanical Systems, 2014:40-43.
[14]Robbjins H, Schwartz B. Chemical etching of Silicon I.the system HF, HNO_3 and H_2O[J].Journal of the Electrochemical Society, 1959, 106(6):505-508.
[15]Fegely L C,Hutchison D N, Bhave S A. Isotropic etching of 111 SCS for wafer-scale manufacturing of perfectly hemispherical Silicon molds[C].The 16~(th)International Conference on Solid-State Sensors, Actuators and Microsystems, 2011:2295-2298.
[16]Pai P,Chowdhury F K, Mastrangelo C H, et al. MEMSbased hemispherical resonator gyroscopes[C].Proceedings of IEEE Sensors, 2012.
[17]Heidari A, Chan M L, Yang H A, et al. Hemispherical wineglass resonators fabricated from the microcrystalline diamond[J]. Journal of Micromechanics and Microengineering, 2013,23(12):125016.
[18]Saito D, Yang C,Heidari A, et al. Microcrystalline diamond cylindrical resonators with quality-factor up to 0.5million[J].Applied Physics Letters, 2016, 108(5):051904.
[19]Zhuang X Y, Chen B G, Wang X L, et al. Microsacle Polysilicon hemispherical shell resonating gyroscopes with integrated three-dimensional curved electrodes[J].Journal of Physics Conference Series, 2018, 986(1):012022.
[20]Schroers J, Pham Q, Peker A, et al. Blow molding of bulk metallic glass[J].Scripta Materialia, 2007, 57(4):341-344.
[21]Sarac B, Kumar G, Hodges T, et al. Three-dimensional shell fabrication using blow molding of bulk metallic glass[J].Journal of Microelectromechanical Systems, 2011,20(1):28-36.
[22]Senkal D, Ahamed M J, Askari S, et al. 1 million Q-factor demonstrated on micro-glassblown fused Silica wineglass resonators with out-of-plane electrostatic transduction[C].Solid-State Sensors, Actuators and Microsystems Workshop, 2014:68-71.
[23]Singh S, Nagourney T, Cho J Y, et al. Design and fabrication of high-Q birdbath resonator for MEMS gyroscopes[C].Proceedings of IEEE/ION Position, Location and Navigation Symposium, 2018:15-19.
[24]Li W,Hou Z Q,Lu K, et al. Micro shell resonator with T-shape masses fabricated by micro blow-torching using whirling platform[C].Proceedings of the 19~(th)International Conference on Solid-State Sensors, Actuators and Microsystems, 2017.
[25]Li T, Visvanathan K, Gianchandani Y B. A batch-mode micromachining process for spherical structures[J].Journal of Micromechanics and Microengineering, 2014, 24(2):025002.
[26]易剑,江南,庄须叶,等.MEMS固体波动陀螺谐振子现状及发展[J].微纳电子技术,2018, 55(10):738-745.YI Jian, JIANG Nan, ZHUANG Xu-ye, et al. Status and development of MEMS solid wave gyroscope resonators[J].Micronanoelectronic Technology, 2018, 55(10):738-745.
[2]Shao P, Tavassoli V, Mapberry C L, et al. A 3DHARPSS Polysilicon micro-hemispherical shell resonating gyroscope:design, fabrication and characterization[J].IEEE Sensors Journal, 2015, 15(9):4974-4985.
[3]Zhuang X Y, Yu L, Wang X L, et al. Development of spherical capacitive electrodes of ME MS Silicon hemispherical gyros[J]. Optics and Precision Engineering,2016, 24(11):2746-2752.
[4]Cho J Y, Najafi K. A high-Q all-fused Silica solid-stemwineglass hemispherical r-esonator formed using micro blow torching and welding[C]. Proceedings of the 28~(th)IEEE International Conference on Micro Electro Mechanical Systems, 2015:821-824.
[5]Nagourney T, Cho J Y, Shiari B, et al. 259 second ringdown time and 4.45 million quality factor in 5. 5 kHz fused Silica birdbath shell resonator[C]. Proceedings of the 19~(th)International Conference on Solid-State Sensors,Actuators and Microsystems, 2017:790-793.
[6]Bernstein J, Bancu M G, Bauer J M, et al. High Q diamond hemispherical resonators:fabrication and energy loss mechanisms[J]. Journal of Micromechanics and Microengineering, 2015, 25(8):085006.
[7]Shao P, Tavassoli V, Liu C S, et al. Electrical character-ization of ALD-coated Silicon dioxide micro-hemispherical shell resonators[C].Proceedings of the 27~(th)IEEE International Conference on Micro Electro Mechanical Systems,2014:612-615.
[8]Prikhodko I P,Zotov S A,Trusov A A, et al. Microscale glass-blown three-dimensional spherical shell resonators[J].Journal of Microelectromechanical Systems, 2011,20(3):691-701.
[9]Senkal D, Ahamed M J, Trusov A A, et al. High temperature micro-glassblowing process demonstrated on fused quartz and ULE TSG[J].Sensors and Actuators A:Physical, 2013,201:525-531.
[10]Kanik M, Bordeenithikasem P, Schroers J, et al. Microscale three-dimensional hemispherical shell resonators fabricated from metallic glass[C].International Symposium on Inertial Sensors and Systems, 2014.
[11]Xie Y, Hsieh H C,Pai P, et al. Precision curved micro hemispherical resonator shells fabricated by poached-egg micro-molding[C].Proceedings of IEEE Sensors, 2012.
[12]Gray J M, Houlton J P,Gertsch J C,et al. Hemispherical micro-resonators from atomic layer deposition[J].Journal of Micromechanics and Microengineering, 2014,24(12):125028.
[13]Mehanathan N, Tavassoli V, Shao P,et al. Invar-36micro hemispherical shell resonators[J].Proceedings of the 27~(th)IEEE International Conference on Micro Electro Mechanical Systems, 2014:40-43.
[14]Robbjins H, Schwartz B. Chemical etching of Silicon I.the system HF, HNO_3 and H_2O[J].Journal of the Electrochemical Society, 1959, 106(6):505-508.
[15]Fegely L C,Hutchison D N, Bhave S A. Isotropic etching of 111 SCS for wafer-scale manufacturing of perfectly hemispherical Silicon molds[C].The 16~(th)International Conference on Solid-State Sensors, Actuators and Microsystems, 2011:2295-2298.
[16]Pai P,Chowdhury F K, Mastrangelo C H, et al. MEMSbased hemispherical resonator gyroscopes[C].Proceedings of IEEE Sensors, 2012.
[17]Heidari A, Chan M L, Yang H A, et al. Hemispherical wineglass resonators fabricated from the microcrystalline diamond[J]. Journal of Micromechanics and Microengineering, 2013,23(12):125016.
[18]Saito D, Yang C,Heidari A, et al. Microcrystalline diamond cylindrical resonators with quality-factor up to 0.5million[J].Applied Physics Letters, 2016, 108(5):051904.
[19]Zhuang X Y, Chen B G, Wang X L, et al. Microsacle Polysilicon hemispherical shell resonating gyroscopes with integrated three-dimensional curved electrodes[J].Journal of Physics Conference Series, 2018, 986(1):012022.
[20]Schroers J, Pham Q, Peker A, et al. Blow molding of bulk metallic glass[J].Scripta Materialia, 2007, 57(4):341-344.
[21]Sarac B, Kumar G, Hodges T, et al. Three-dimensional shell fabrication using blow molding of bulk metallic glass[J].Journal of Microelectromechanical Systems, 2011,20(1):28-36.
[22]Senkal D, Ahamed M J, Askari S, et al. 1 million Q-factor demonstrated on micro-glassblown fused Silica wineglass resonators with out-of-plane electrostatic transduction[C].Solid-State Sensors, Actuators and Microsystems Workshop, 2014:68-71.
[23]Singh S, Nagourney T, Cho J Y, et al. Design and fabrication of high-Q birdbath resonator for MEMS gyroscopes[C].Proceedings of IEEE/ION Position, Location and Navigation Symposium, 2018:15-19.
[24]Li W,Hou Z Q,Lu K, et al. Micro shell resonator with T-shape masses fabricated by micro blow-torching using whirling platform[C].Proceedings of the 19~(th)International Conference on Solid-State Sensors, Actuators and Microsystems, 2017.
[25]Li T, Visvanathan K, Gianchandani Y B. A batch-mode micromachining process for spherical structures[J].Journal of Micromechanics and Microengineering, 2014, 24(2):025002.
[26]易剑,江南,庄须叶,等.MEMS固体波动陀螺谐振子现状及发展[J].微纳电子技术,2018, 55(10):738-745.YI Jian, JIANG Nan, ZHUANG Xu-ye, et al. Status and development of MEMS solid wave gyroscope resonators[J].Micronanoelectronic Technology, 2018, 55(10):738-745.