机载小型化快速反射镜用微位移测量传感器设计
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摘要
为了实现机载小型化FSM的闭环控制,设计了一款小体积、高精度、高环境适应性的微位移测量传感器。首先根据位移传感器的技术原理和机载FSM的应用需求,提出了微位移测量传感器的主要设计指标。然后,分别对微位移测量传感器的发光元件、密珠滑轨、测量光栅和接收元件等进行了详细设计与选择。其中,高精度密珠滑轨的采用不仅减小了测量过程中的附加阻力,而且使光栅副的运动更加精准;光栅副通光窗口的引入、独特零件编码的设计、裂相法信号提取方式的采用,保证了微位移测量传感器的高低温性能。最后,针对微位移测量传感器在机载小型化FSM上的应用效果进行了理论分析与实验检测。结果显示:机载小型化FSM的方位指向误差不超过3.4″,俯仰指向误差不超过3.8″,证明了专用型微位移测量传感器高精度、高分辨力和高响应速度的技术特点,满足机载小型化FSM的应用需求。
To realize the close-loop control of fast steering mirror with small volume on airborne platform,a displacement sensor with small volume,high precision and prefect adaptability was designed. Main design performance parameters were presented on the basis of the principle and application requirements of the displacement sensor. Lamp,slide,metrological gratings and acceptor were designed and selected respectively. High-precision slide with plenty of balls did not only decreased friction resistance,but also made scale gratings move more accurately. Windows of the grating,zero code and picking-up signal by splitting-phase method ensured the displacement sensor adaptability to high-low temperature conditions. Finally,application impact of displacement sensors were analyzed and tested,and results show that the azimuth pointing error of fast steering mirror with 4 displacement sensors for airborne platform is not more than 3. 4″ and high-low pointing error is not more than 3. 8″,which proved the designed displacement sensor with high precision,high resolution and high resonance frequency,and application requirements of fast steering mirror with small volume could be satified.
To realize the close-loop control of fast steering mirror with small volume on airborne platform,a displacement sensor with small volume,high precision and prefect adaptability was designed. Main design performance parameters were presented on the basis of the principle and application requirements of the displacement sensor. Lamp,slide,metrological gratings and acceptor were designed and selected respectively. High-precision slide with plenty of balls did not only decreased friction resistance,but also made scale gratings move more accurately. Windows of the grating,zero code and picking-up signal by splitting-phase method ensured the displacement sensor adaptability to high-low temperature conditions. Finally,application impact of displacement sensors were analyzed and tested,and results show that the azimuth pointing error of fast steering mirror with 4 displacement sensors for airborne platform is not more than 3. 4″ and high-low pointing error is not more than 3. 8″,which proved the designed displacement sensor with high precision,high resolution and high resonance frequency,and application requirements of fast steering mirror with small volume could be satified.
引文
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[17]李晓天,齐向东,于海利,等.基于单压电执行器的光栅刻线摆角修正[J].光学精密工程,2014,22(8):2039-2046.LI X T,QI X D,YU H L,et al.Yaw angle correction of grating line based on single piezoelectric actuator[J].Optics and Precision Engineering,2014,22(8):2039-2046.
[18]吴晶,吴晗平,黄俊斌,等.光纤光栅传感信号解调技术研究进展[J].中国光学,2014,7(4):519-531.WU J,WU H P,HUANG J B,et al.Research progress in signal demodulation technology of fiber Bragg grating sensors[J].Chinese Optics,2014,7(4):519-531.
[19]常丽,许会,修国一,等.基于相关和最小二乘原理的光栅栅距动态测量[J].仪器仪表学报,2013,34(5):1001-1007.CHANG L,XU H,XIU G Y.Dynamic measurement method of grating pitch based on correlation and least square principle[J].Chinese Journal of Scientific Instrument,2013,34(5):1001-1007.
[20]贺秀娟,乔彦峰,王成龙.动态像面法测量水面落点位置及误差分析[J].中国光学,2015,8(1):130-138.HE X J,QIAO Y F,WANG CH L.Measurement of the location of projectile burst on water surface by dynamic image method and its error analysis[J].Chinese Optics,2015,8(1):130-138.
[2]周子云,高云国,邵帅,等.采用柔性铰链的快速反射镜设计[J].光学精密工程,2014,22(6):1547-1554.ZHOU Z Y,GAO Y G,SHAO SH,et al.Design of fast steering mirror using flexible hinge[J].Optics and Precision Engineering,2014,22(6):1547-1554.
[3]韩旭东,徐新行,王兵,等.快速反射镜系统用光栅测微仪[J].光电工程,2011,38(10):151-155.HAN X D,XU X H,WANG B,et al.Grating sensor for linear distance used in fast-steering mirror[J].Opto Electronic,2011,38(10):151-155.
[4]卫沛锋,刘欣悦,林旭东,等.自适应光学系统校正后实际分辨率评价指标[J].中国光学,2014,7(4):672-678.WEI P F,LIU X Y,LIN X D,et al.Evaluation index of the actual resolution after correction of adaptive optical system[J].Chinese Optics,2014,7(4):672-678.
[5]彭树萍,陈涛,刘廷霞,等.激光发射系统快速反射镜的光线反射过程[J].光学精密工程,2015,23(2):378-386.PENG SH P,CHEN T,LIU T X,et al.Reflection process of fast-steering mirror of laser launching system[J].Optics and Precision Engineering,2 0 1 5,2 3(2):3 7 8-3 8 6.
[6]崔东辉,张晓丽,刘同胜.一种高可靠性电涡流位移传感器的设计[J].电子测量技术,2013,36(12):87-91.CUI D H,ZHANG X L,LIU T SH.Design of eddy current displacement sensor with high reliability[J].Electronic Measurement Technology,2013,36(12):87-91.
[7]陈!,李秀茹,张红胜,等.高速高冲击性小型增量式光电编码器的研制[J].电子测量与仪器学报,2013,27(10):916-921.CHEN Y,LI X R,ZHANG H SH,et al.Development of miniature incremental photoelectric encoder with highspeed and high-impact property[J].Journal of Electronic Measurement and Instrument,2013,27(10):916-921.
[8]汪丽群,周翟和,沈超,等.磁致伸缩位移传感器中CPLD与单片机通信设计[J].电子测量技术,2013,36(11):71-75.WANG L Q,ZHOU Z H,SHEN CH,et al.Design of communication between CPLD and SCM in magnetostrictive displacement sensor[J].Electronic Measurement Technology,2013,36(11):71-75.
[9]周美丽,白宗文.基于2D-PSD的激光位移测量系统设计[J].国外电子测量技术,2015,34(2):64-66.ZHOU M L,BAI Z W.Design of the laser displacement measurement system based on 2D-PSD[J].Foreign Electronic Measurement Technology,2015,34(2):64-66.
[10]徐国权,熊代余.光纤光栅传感器技术在工程中的应用[J].中国光学,2013,6(3):306-317.XU G Q,XIONG D Y.Applications of fiber Bragg grating sensing technology in engineering[J].Chinese Optics,2013,6(3):306-317.
[11]李文昊,张成山,巴音贺希格,等.莫尔条纹法精确控制全息光栅光栅常数的研究[J].仪器仪表学报,2013,34(12):2867-2872.LI W H,ZHANG C S,BAYANHESHIG,et al.Study on precisely controlling the grating constant of holographic grating with Moire pattern method[J].Chinese Journal of Scientific Instrument,2013,34(12):2867-2872.
[12]瞿青,曹召良,胡立发,等.位相差值法测量大气湍流格林伍德频率[J].中国光学,2015,8(1):121-129.QU Q,CAO ZH L,HU L F et al.Greenwood frequency measurement of atmospheric turbulence by phase difference method[J].Chinese Optics,2015,8(1):121-129.
[13]刘阳,吴宏圣,杨帆,等.增量位移集成光电传感器设计[J].电子测量与仪器学报,2013,27(10):992-997.LIU Y,WU H SH,YANG F,et al.Design of the incremental displacement integrated photoelectricity[J].Journal of Electronic Measurement and Instrument,2013,27(10):992-997.
[14]杨中光,周军,黄河,等.偏振导航传感器测角误差分析与补偿[J].光学精密工程,2014,22(6):1424-1429.YANG ZH G,ZHOU J,HUANG H,et al.Analysis and compensation of angle errors of polarization navigation sensors[J].Optics and Precision Engineering,2014,22(6):1424-1429.
[15]卢荣胜,李万红,劳达宝,等.激光跟踪仪测角误差补偿[J].光学精密工程,2014,22(9):2299-2305.LU R SH,LI W H,LAO D B,et al.Angular error compensation for laser tracker[J].Optics and Precision Engineering,2014,22(9):2299-2305.
[16]潘年,马文礼.拼接式钢带光栅编码器测角误差分析与修正[J].中国光学,2014,6(5):788-794.PAN N,M W L.Error analysis and correction of scale tape grating encoder[J].Chinese Optics,2014,6(5):788-794.
[17]李晓天,齐向东,于海利,等.基于单压电执行器的光栅刻线摆角修正[J].光学精密工程,2014,22(8):2039-2046.LI X T,QI X D,YU H L,et al.Yaw angle correction of grating line based on single piezoelectric actuator[J].Optics and Precision Engineering,2014,22(8):2039-2046.
[18]吴晶,吴晗平,黄俊斌,等.光纤光栅传感信号解调技术研究进展[J].中国光学,2014,7(4):519-531.WU J,WU H P,HUANG J B,et al.Research progress in signal demodulation technology of fiber Bragg grating sensors[J].Chinese Optics,2014,7(4):519-531.
[19]常丽,许会,修国一,等.基于相关和最小二乘原理的光栅栅距动态测量[J].仪器仪表学报,2013,34(5):1001-1007.CHANG L,XU H,XIU G Y.Dynamic measurement method of grating pitch based on correlation and least square principle[J].Chinese Journal of Scientific Instrument,2013,34(5):1001-1007.
[20]贺秀娟,乔彦峰,王成龙.动态像面法测量水面落点位置及误差分析[J].中国光学,2015,8(1):130-138.HE X J,QIAO Y F,WANG CH L.Measurement of the location of projectile burst on water surface by dynamic image method and its error analysis[J].Chinese Optics,2015,8(1):130-138.