柔性触觉传感器的研制
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摘要
本文研制了一种柔性电容式触觉传感器,用来实现对法向力与切向力的测量。该传感器采用超弹性柔性电极,与传统金属电极相比具有更高的灵敏度与柔韧性。传感器采取了上下两层的四电容结构,从而对三个方向的力有不同的灵敏度,并通过对外力作用所引起的四个电容值变化进行组合运算实现对外力的检测。通过一系列实验测试了传感器的输出特性,实验结果表明传感器可以实现对法向力与切向力的测量。其中,x,y,z三个方向力的灵敏度分别可以达到2.356pf/N、2.122pf/N和0.243pf/N。此外,通过对传感器的拉伸测试表明,所研制的柔性电极传感器可以承受大于25%的拉伸率而不被损坏,而普通金属电极传感器则最大只能承受3.13%的拉伸率。
In this paper,flexible capacitive tactile sensor is developed to measure the normal and tangential forces.The sensor adopts superelastic flexible electrode,which has higher sensitivity and flexibility than traditional metal electrode.The sensor adopts a four-capacitor structure with two layers up and down,so it has different sensitivity to the forces in three directions.Through the combined operation of the four capacitance values caused by the external force,the detection of the external force can be realized.In this paper,the output characteristics of the sensor are tested through a series of experiments.The experimental results show that the sensor can measure the normal and tangential forces.The sensitivity of the three directions of x,yand zis 2.356 pf/N,2.122 pf/N and0.243 pf/N,respectively.In addition,the tensile test of the sensor shows that the flexible electrode sensor can withstand more than 25% tensile rate without damage,while the normal metal electrode sensor can only withstand 3.13%tensile rate.
In this paper,flexible capacitive tactile sensor is developed to measure the normal and tangential forces.The sensor adopts superelastic flexible electrode,which has higher sensitivity and flexibility than traditional metal electrode.The sensor adopts a four-capacitor structure with two layers up and down,so it has different sensitivity to the forces in three directions.Through the combined operation of the four capacitance values caused by the external force,the detection of the external force can be realized.In this paper,the output characteristics of the sensor are tested through a series of experiments.The experimental results show that the sensor can measure the normal and tangential forces.The sensitivity of the three directions of x,yand zis 2.356 pf/N,2.122 pf/N and0.243 pf/N,respectively.In addition,the tensile test of the sensor shows that the flexible electrode sensor can withstand more than 25% tensile rate without damage,while the normal metal electrode sensor can only withstand 3.13%tensile rate.
引文
[1]段建瑞,李斌,李帅臻,等.常用新型柔性传感器的研究进展[J].传感器与微系统,2015,34(11):1-4(DUANJianrui,LI Bing,LI Shuaizheng,et al.Research progress of new flexible sensors[J].Transducer and Microsystem Technologies,2015,34(11):1-4(in Chinese))
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[7]Lee H K,Chang S I,Yoon E.A flexible polymer tactile sensor:fabrication and modular expandability for large area deployment[J].Journal of Microelectromechanical Systems,2006,15(6):1681-1686.
[8]Lee H K,Chung J,Chang S I,et al.Normal and shear force measurement using a flexible polymer tactile sensor with embedded multiple capacitors[J].Journal of Microelectromechanical Systems,2008,17(4):934-942.
[9]Brochu P,Pei Q.Advances in dielectric elastomers for actuators and artificial muscles[J].Macromolecular Rapid Communications,2010,31(1):10-36.
[10]Rosset S,Shea H R.Flexible and stretchable electrodes for dielectric elastomer actuators[J].Applied Physics A,2013,110(2):281-307.
[2]Yoshimura K,Nakano K,Hishikawa Y.Flexible tactile sensor materials based on carbon microcoil/siliconerubber porous composites[J].Composites Science&Technology,2016,123:241-249.
[3]赵东升.PVDF压电传感器的设计及其试验研究[C].江苏大学,2005(ZHAO Dongsheng.Design and experimental study on PVDF piezoelectric sensor[C].Jiangsu University,2005(in Chinese))
[4]Lee I,Sung H J.Development of an array of pressure sensors with PVDF film[J].Experiments in Fluids,1999,26(1-2):27-35.
[5]Jang H,Yoon H,Ko Y,et al.Enhanced performance in capacitive force sensors using carbon nanotube/polydimethylsiloxane nanocomposites with high dielectric properties[J].Nanoscale,2016,8(10):5667.
[6]Choi B,Choi H R,Kang S.Development of tactile sensor for detecting contact force and slip[C].International Conference on Intelligent Robots and Systems.IEEE,2005:2638-2643.
[7]Lee H K,Chang S I,Yoon E.A flexible polymer tactile sensor:fabrication and modular expandability for large area deployment[J].Journal of Microelectromechanical Systems,2006,15(6):1681-1686.
[8]Lee H K,Chung J,Chang S I,et al.Normal and shear force measurement using a flexible polymer tactile sensor with embedded multiple capacitors[J].Journal of Microelectromechanical Systems,2008,17(4):934-942.
[9]Brochu P,Pei Q.Advances in dielectric elastomers for actuators and artificial muscles[J].Macromolecular Rapid Communications,2010,31(1):10-36.
[10]Rosset S,Shea H R.Flexible and stretchable electrodes for dielectric elastomer actuators[J].Applied Physics A,2013,110(2):281-307.