非焊接式纳米线机械性能测试器件结构设计
|
摘要
纳米线机械性能测试中,常见MEMS器件大都采用焊接或沉积方式固定纳米线,限制了器件寿命和测试重复性。针对焊接方式测试的不足,设计了一种非焊接式纳米线机械性能测试MEMS器件。在静电叉指和支撑梁结构的基础上,设计了利用梁刚度差进行夹紧和拉伸操作的结构,其中设计了V型结构以避免焊接纳米线。利用有限元仿真软件进行了仿真验证,确定了最优结构尺寸,V型缝隙夹角小于22.5°时能满足纳米线机械性能测试要求,所设计器件提高了测试器件的重复利用率。
In researches about mechanical properties of nanowires,welding methods,such as FIB and EBID which are most common methods used to fixed nanowires,reduce devices lifetime and repeatability.In order to overcome the shortcomings of the welding method,a new MEMS device without need of welding or depositing was designed in this paper.Basing on the electrostatic interdigital structure and bearing beam structure,a clamping and stretching structure using the rigidity difference was designed,in which a V-shaped structure is designed to avoid welding or depositing.It was simulated and validated by FEA,and the optimal structure was obtained.When the angle of V-shaped gap is less than 22.5°,it can meet the requirements of the mechanical properties of nanowires,and improve application repeatability.
In researches about mechanical properties of nanowires,welding methods,such as FIB and EBID which are most common methods used to fixed nanowires,reduce devices lifetime and repeatability.In order to overcome the shortcomings of the welding method,a new MEMS device without need of welding or depositing was designed in this paper.Basing on the electrostatic interdigital structure and bearing beam structure,a clamping and stretching structure using the rigidity difference was designed,in which a V-shaped structure is designed to avoid welding or depositing.It was simulated and validated by FEA,and the optimal structure was obtained.When the angle of V-shaped gap is less than 22.5°,it can meet the requirements of the mechanical properties of nanowires,and improve application repeatability.
引文
[1]赵继成.材料基因组计划简介[J].自然杂志,2014,36(2):89-105.
[2]汪红,汤俊,刘瑞,等.单轴微拉伸MEMS材料力学性能测试的系统集成[J].光学精密工程,2010,18(5):1204-1211.
[3]Zhang D F,Breguet J M,Clavel R,et al.In Situ Tensile Testing of Individual Co Nanowires Inside a Scanning Electron Microscope[J].Nanotechnology,2009,20(36):365706.
[4]Celik E,Guven I,Madenci E.Mechanical Characterization of Nickel Nanowires by Using a Customized Atomic Force Microscope[J].Nanotechnology,2011,22(15):155702.
[5]Zhang Y,Liu X Y,Ru C H,et al.Piezoresistivity Characterization of Synthetic Silicon Nanowires Using a MEMS Device[J].Journal of Microelectromechanical Systems,2011,20(4):959-967.
[6]Bhanushali S,Ghosh P,Ganesh A,et al.1D Copper Nanostructures:Progress,Challenges and Opportunities[J].small,2015,11(11):1232-1252.
[7]Zeng H,Li T,Bartenwerfer M,et al.Simultaneous Characterization of Mechanical and Electrical Properties of Nanowire Using MEMS Device:Transducers 2013[Z].Barcelona,SPAIN:2013,776-779.
[8]郝永平,张磊,刘双杰.MEMS万向惯性开关工艺研究[J].仪表技术与传感器,2013(10):14-15.
[9]Johnson W A,Warne L K.Electrophysics of Micromechanical Comb Actuators[J].Journal of Microelectromechanical Systems.1995,4(1):49-59.
[10]邵亚琪,郇勇,代玉静,等.基于全场位移测量技术的微悬臂梁面内弯曲性能测试[J].实验力学,2014,29(4):441-446.
[11]刘瑞,汪红,丁桂甫,等.一种用于微拉伸系统的MEMS弹簧设计与制作[J].微细加工技术,2008(4):62-64.
[12]薛纭,刘延柱,陈立群.超细长弹性杆的分析力学问题[J].力学学报,2005(4):485-493.
[13]周军乐,王玉皞,王晓磊,等.一种新型的平面叉指电极传感器的设计与实现[J].传感技术学报,2016,29(3):356-361.
[14]彭鹏.一种新结构介观压光型机电器件设计[D].太原:中北大学,2014.
[15]张鉴,黄庆安.ICP刻蚀技术与模型[J].微纳电子技术,2005(6):288-296.
[16]卓敏,贾世星,朱健,等.用于微惯性器件的ICP刻蚀工艺技术[J].传感技术学报,2006(5):1381-1383.
[17]陈德鹅,吴志明,李伟,等.图形反转工艺用于金属层剥离的研究[J].半导体技术,2009,34(6):535-538.
[18]李建华,徐立新,陈和峰,等.基于MEMS技术的新型太赫兹混频器设计与制作[J].传感技术学报.2015,28(1):9-12.
[19]乔大勇,杨璇,夏长锋,等.梳齿分布结构对静电驱动二维微扫描镜机械转角的影响[J].传感技术学报,2014,27(2):172-177.
[20]明安杰,李铁,王跃林.大位移MEMS静电梳齿驱动器的设计及制作[J].功能材料与器件学报,2009,15(1):7-14.
[21]吴秋平,高钟毓,王永梁,等.纳米级变间隙半球电容计算及其测量电路研究[J].南京理工大学学报(自然科学版),2004,28(1):42-47.
[22]Mori K,Misawa K,Ihida S,et al.A MEMS Electrostatic Roll-Up Window Shade Array for House Energy Management System[J].IEEE Photonics Technology Letters,2016,28(5):593-596.
[23]张亮.MEMS微观摩擦磨损测试装置研制[D].中国矿业大学,2014.
[2]汪红,汤俊,刘瑞,等.单轴微拉伸MEMS材料力学性能测试的系统集成[J].光学精密工程,2010,18(5):1204-1211.
[3]Zhang D F,Breguet J M,Clavel R,et al.In Situ Tensile Testing of Individual Co Nanowires Inside a Scanning Electron Microscope[J].Nanotechnology,2009,20(36):365706.
[4]Celik E,Guven I,Madenci E.Mechanical Characterization of Nickel Nanowires by Using a Customized Atomic Force Microscope[J].Nanotechnology,2011,22(15):155702.
[5]Zhang Y,Liu X Y,Ru C H,et al.Piezoresistivity Characterization of Synthetic Silicon Nanowires Using a MEMS Device[J].Journal of Microelectromechanical Systems,2011,20(4):959-967.
[6]Bhanushali S,Ghosh P,Ganesh A,et al.1D Copper Nanostructures:Progress,Challenges and Opportunities[J].small,2015,11(11):1232-1252.
[7]Zeng H,Li T,Bartenwerfer M,et al.Simultaneous Characterization of Mechanical and Electrical Properties of Nanowire Using MEMS Device:Transducers 2013[Z].Barcelona,SPAIN:2013,776-779.
[8]郝永平,张磊,刘双杰.MEMS万向惯性开关工艺研究[J].仪表技术与传感器,2013(10):14-15.
[9]Johnson W A,Warne L K.Electrophysics of Micromechanical Comb Actuators[J].Journal of Microelectromechanical Systems.1995,4(1):49-59.
[10]邵亚琪,郇勇,代玉静,等.基于全场位移测量技术的微悬臂梁面内弯曲性能测试[J].实验力学,2014,29(4):441-446.
[11]刘瑞,汪红,丁桂甫,等.一种用于微拉伸系统的MEMS弹簧设计与制作[J].微细加工技术,2008(4):62-64.
[12]薛纭,刘延柱,陈立群.超细长弹性杆的分析力学问题[J].力学学报,2005(4):485-493.
[13]周军乐,王玉皞,王晓磊,等.一种新型的平面叉指电极传感器的设计与实现[J].传感技术学报,2016,29(3):356-361.
[14]彭鹏.一种新结构介观压光型机电器件设计[D].太原:中北大学,2014.
[15]张鉴,黄庆安.ICP刻蚀技术与模型[J].微纳电子技术,2005(6):288-296.
[16]卓敏,贾世星,朱健,等.用于微惯性器件的ICP刻蚀工艺技术[J].传感技术学报,2006(5):1381-1383.
[17]陈德鹅,吴志明,李伟,等.图形反转工艺用于金属层剥离的研究[J].半导体技术,2009,34(6):535-538.
[18]李建华,徐立新,陈和峰,等.基于MEMS技术的新型太赫兹混频器设计与制作[J].传感技术学报.2015,28(1):9-12.
[19]乔大勇,杨璇,夏长锋,等.梳齿分布结构对静电驱动二维微扫描镜机械转角的影响[J].传感技术学报,2014,27(2):172-177.
[20]明安杰,李铁,王跃林.大位移MEMS静电梳齿驱动器的设计及制作[J].功能材料与器件学报,2009,15(1):7-14.
[21]吴秋平,高钟毓,王永梁,等.纳米级变间隙半球电容计算及其测量电路研究[J].南京理工大学学报(自然科学版),2004,28(1):42-47.
[22]Mori K,Misawa K,Ihida S,et al.A MEMS Electrostatic Roll-Up Window Shade Array for House Energy Management System[J].IEEE Photonics Technology Letters,2016,28(5):593-596.
[23]张亮.MEMS微观摩擦磨损测试装置研制[D].中国矿业大学,2014.