基于SOI工艺的扭转式微机械扫描光栅设计及制作
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摘要
为实现微型光谱仪在工程领域的广泛应用,研究了其核心器件——扭转式微机械扫描光栅的结构与制作方法。利用SOI工艺,设计一种无需启动电极的静电梳齿驱动结构,可以使扭转式微机械扫描光栅具有低频驱动、制作工艺简单、扫描范围广等优点。通过设计的制作工艺方法,研制出了能够初步满足性能要求的扭转式微机械扫描光栅样件。测试结果表明:该微扫描光栅在驱动电压为25V时最大转角可达到±4.8°,对应的光学扫描角为19.2°。
For the wide use of micro-spectrometer in diverse applications,its core device,torsion-type micromachined scanning gratings,were designed,fabricated and characterized.In order to obtain large scanning range and low resonant frequency at low driving voltage,the structure without additional starting electrodes was designed and studied by silicon-on-insulator(SOI)fabrication technology.The micromachined scanning gratings fabricated by SOI wafers were characterized,which prove that the micromachined scanning gratings has good modulation performances.The maximum deflection angles can reach±4.8°,corresponding to a total optical scanning range of 19.2°at a driving voltage of 25V.
For the wide use of micro-spectrometer in diverse applications,its core device,torsion-type micromachined scanning gratings,were designed,fabricated and characterized.In order to obtain large scanning range and low resonant frequency at low driving voltage,the structure without additional starting electrodes was designed and studied by silicon-on-insulator(SOI)fabrication technology.The micromachined scanning gratings fabricated by SOI wafers were characterized,which prove that the micromachined scanning gratings has good modulation performances.The maximum deflection angles can reach±4.8°,corresponding to a total optical scanning range of 19.2°at a driving voltage of 25V.
引文
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[3]Li Dachao,Wu Wengang,Yuan Yong,et al.Design,fabrication and characterization of novel micro mirror with vertical torsion comb driver[J].Nanotechnology and Precision Engineering,2006,4(2):122-127.栗大超,吴文刚,袁勇,等.基于垂直扭转梳齿驱动结构的硅微机械扭转微镜的设计加工与表征[J].纳米技术与精密工程,2006,4(2):122-127.
[4]Sun Ruikang.Study on the mirror design and fabrication process of micro mechanical torsion[D].Xi'an:Northwestern Polytechnical University,2011.孙瑞康.微机械扭转镜设计及制作工艺研究[D].西安:西北工业大学,2011.
[5]Xiao Qinghua,Tu Hailing,Zhou Qigang,et al.Prcparation of matcrials[J].Chinese Journal of Rare Metals,2002,26(6):460-466.肖清华,屠海令,周旗钢,等.SOI材料的制备技术[J].稀有金属,2002,26(6):460-466.
[6]Chen Meng,Wang Yibo.The new application and development history,development trend of SOI material[J].China Integrated Circuit,2007,98:75-79.陈猛,王一波.SOI材料的发展历史、应用现状与发展新趋势(上)[J].中国集成电路,2007,98:75-79.