基于微位移定位系统MEMS梳齿位移传感器的研究
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摘要
MEMS梳齿位移传感器是一种基于MEMS技术电容理论的传感器,具有体积小、重量轻、性能稳定、功耗低和易于集成等特点。首先探讨了梳齿传感器的工作原理,随后介绍了使用梳齿传感器有效检测微动工作台位移的方法,并进行了结构失效和梳齿电极不平行失效的可靠性分析。通过采用这种传感器可以达到提高微位移定位平台系统的集成度、精度、分辨率和减小定位平台系统体积的目的。
Based on MEMS technology and capacitance theory,MEMS comb displacement sensors have the features of small size,light weight,stable performance,low power consumption,ease of integration and so on.Firstly,the working principle of MEMS comb displacement sensors is discussed.And then the effective methods for detecting the displacements of micro platforms using comb sensors are introduced.Finally,reliability analysis of structural failure and the unparallel-comb-electrode failure are discussed.By means of this kind of sensor,the purposes of increasing integration,accuracy,resolution of micro-positioning platforms and decreasing the volume of platform systems can be achieved.
Based on MEMS technology and capacitance theory,MEMS comb displacement sensors have the features of small size,light weight,stable performance,low power consumption,ease of integration and so on.Firstly,the working principle of MEMS comb displacement sensors is discussed.And then the effective methods for detecting the displacements of micro platforms using comb sensors are introduced.Finally,reliability analysis of structural failure and the unparallel-comb-electrode failure are discussed.By means of this kind of sensor,the purposes of increasing integration,accuracy,resolution of micro-positioning platforms and decreasing the volume of platform systems can be achieved.
引文
[1]陶惠峰.超精密微位移系统研究[D].浙江:浙江大学,2003.
[2]王宏伟,张伟,林宇,张朝民.差动电容敏感式力学传感器的信号提取电路[J].电子元件与材料,2003,22(3):10-12.
[3]陈涛.基于复合振动的粘着控制微操作技术及其实验研究[D].黑龙江:哈尔滨工业大学,2011.
[4]Yu Sun,Steven N.Rry,D.P.Potasek,Dominik J.Bell,Brad J.Nelson.Charactorizing Fruit fly flight behavior using a microforce sensor with a new comb-drive configuration[J].Journal of Microelectromechanical Systems,2005,14:4-11.
[5]董林玺,车录锋,王跃林.梳齿的不平行对电容式微机械传感器可靠工作范围的影响[J].半导体学报,2005,26(2):373-378.
[6]张洋.微位移定位平台系统的拓扑优化及其闭环控制研究[D].黑龙江:哈尔滨工业大学,2010.
[2]王宏伟,张伟,林宇,张朝民.差动电容敏感式力学传感器的信号提取电路[J].电子元件与材料,2003,22(3):10-12.
[3]陈涛.基于复合振动的粘着控制微操作技术及其实验研究[D].黑龙江:哈尔滨工业大学,2011.
[4]Yu Sun,Steven N.Rry,D.P.Potasek,Dominik J.Bell,Brad J.Nelson.Charactorizing Fruit fly flight behavior using a microforce sensor with a new comb-drive configuration[J].Journal of Microelectromechanical Systems,2005,14:4-11.
[5]董林玺,车录锋,王跃林.梳齿的不平行对电容式微机械传感器可靠工作范围的影响[J].半导体学报,2005,26(2):373-378.
[6]张洋.微位移定位平台系统的拓扑优化及其闭环控制研究[D].黑龙江:哈尔滨工业大学,2010.