基于光栅位移测量的反射镜设计
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摘要
针对集成光栅-反射镜位移测试中工艺及装配误差导致反射镜与光栅不能平行的问题,本文设计了一种可自主调节的反射镜.与传统的工艺精度控制不同,方案重点对可调节反射镜结构进行设计,反射镜的偏转采用电容板来调节.建立了单层光栅与反射镜测量位移的理论模型,分析了两者不平行导致的测量误差,通过Ansys软件进行静力学分析,施加0～50V电压,仿真得到静电力作用下反射镜偏转最大位移为7μm,提取的最大应力35MPa.仿真结果表明所设计的反射镜可调节范围大于不平行误差,从理论上验证了反射镜调节的可行性.
A reflector for grating displacement detection is designed.The theoretical model of singlelayer grating and reflector is established.The measurement error caused by unparallelism is analyzed.Emphasis is placed on the design of adjustable mirror structure.The deflection of the reflector is adjusted by electrostatic regulation.Static analysis is carried out with Ansys software.0～50 V voltage is applied.Simulation results show that the maximum deflection displacement is 7μm,and the extracted maximum stress is 35 MPa.The adjustable range of the designed reflector is larger than the unparallel error,the feasibility of reflector adjustment is verified theoretically.
A reflector for grating displacement detection is designed.The theoretical model of singlelayer grating and reflector is established.The measurement error caused by unparallelism is analyzed.Emphasis is placed on the design of adjustable mirror structure.The deflection of the reflector is adjusted by electrostatic regulation.Static analysis is carried out with Ansys software.0～50 V voltage is applied.Simulation results show that the maximum deflection displacement is 7μm,and the extracted maximum stress is 35 MPa.The adjustable range of the designed reflector is larger than the unparallel error,the feasibility of reflector adjustment is verified theoretically.
引文
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[13]赵双双.微光学集成的高精度MOEMS加速度传感器研究[D].杭州:浙江大学,2013.
[2]Kim J A,Kim K C,Bae E W,et al.Six-degree-offreedom displacement measurement system using a diffraction grating[J].Review of Scientific Instruments,2000,71(8):3214-3219.
[3]Wu Kang,Ye Xiongying,Chen Feng,et al.Micromachined interferometric accelerometer fabricated using SGADER process[C].Nano/Micro Engineered and Molecular Systems,2009.NEMS 2009.4th IEEE International Conference on.IEEE,2009:1058-1061.
[4]Kim D,Garcia C T,Avenson B,et al.Design and experimental evaluation of a low-noise backplate for a grating-based optical interferometric sensor[J].Journal of Microelectromechanical Systems,2014,23(5):1101-1111.
[5]Lu Qianbo,Wang Chen,Bai Jian,et al.Subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation[J].Applied Optics,2015,54(13):4188-4196.
[6]Lu Qianbo,Wang Chen,Bai Jian,et al.Minimizing cross-axis sensitivity in grating-based optomechanical accelerometers[J].Optics express,2016,24(8):9094-9111.
[7]Lu Qianbo,Bai Jian,Wang Kaiwei,et al.Design,optimization,and realization of a high-performance MOEMS accelerometer from a double-device-layer SOI wafer[J].Journal of Microelectromechanical Systems,2017,26(4):859-869.
[8]Bai Jian,Wang Kaiwei,Lou Shuqi,et al.Analysis and amelioration about the cross-sensitivity of a high resolution MOEMS accelerometer based on diffraction grating[C]8th International Symposium on Advanced Optical Manufacturing and Testing Technologies:Design,Manufacturing,and Testing of Micro-and NanoOptical Devices and Systems;and Smart Structures and Materials.International Society for Optics and Photonics,2016,9685:968504.
[9]张志良,冯丽爽,张宇,等.微米光栅加速度计力反馈系统设计[J].导航与控制,2016,15(4):44-49.Zhang Zhiliang,Feng Lishuang,Zhang Yu,et al.The force feedback system of micro grating accelerometer[J].Navigation and Control,2016,15(4):44-49.(in Chinese)
[10]冯丽爽,刘惟芳,姚保寅.基于静电刚度的微米光栅加速度计灵敏度特性分析[J].导航与控制,2015,14(6):70-74.Feng Lishuang,Liu Weifang,Yao Baoyin.Sensitivity analusis of micro-grating accelerometer based on electrostatic rigidity[J]. Navigation and Control,2015,14(6):70-74.(in Chinese)
[11]张群雁,周震,冯丽爽,等.新型微米光栅加速度计光学结构研究[J].光学学报,2010,30(6):1796-1799.Zhang Qunyan,Zhou Zhen,Feng Lishuang,et al.Research on optical structure of the novel microngrating accelerometer[J].Acta Optica Sinica,2010,30(6):1796-1799.(in Chinese)
[12]Zhao Shuangshaung,Zhang Juan,Hou Changlun,et al.Optical tilt sensor with direct intensity-modulated scheme[J].Optical Engineering,2011,50(11):114405.
[13]赵双双.微光学集成的高精度MOEMS加速度传感器研究[D].杭州:浙江大学,2013.