横向压电驱动变形镜的迟滞特性及其闭环校正
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摘要
横向压电驱动变形镜在自适应光学系统中应用广泛,其利用了压电陶瓷的横向逆压电效应驱动镜片实现变形。在高电场强度下变形镜迟滞曲线存在特殊的"蝴蝶形",增加了控制难度,且变形镜无法正常工作。针对这一问题利用压电陶瓷极化及铁电材料的电滞回线理论进行了分析,明确了蝶形曲线产生的原因。通过实验确定了变形镜矫顽场强度在-500~-400 V/mm之间,迟滞曲线回归一般的"柳叶"形状。根据迟滞曲线的特点设计了静态的PID闭环校正系统,并进行了校正实验。结果表明,闭环校正后线性度得到明显提升,迟滞率可降低至1.8%。
The unimorph deformable mirror(DM) is widely applied in adaptive optics, which utilizes the lateral reverse piezoelectric effect of piezoelectric ceramics to drive the mirror to deform. The hysteresis curve of the deformable mirror is a special "butterfly shape" in the high electric field strength, which increases the difficulty of control, and the deformable mirror cannot work normally. The theory of piezoelectric ceramic polarization and the hysteresis loop of ferroelectric materials were analyzed so that the cause of the butterfly curve could be confirmed. The experimental results show that the covariate field of the DM is between-500 and-400 V/mm, and the hysteresis curve is normalized willow shape. Then a static PID closed loop correction system was designed for the characteristics of the hysteresis curve, and the correction experiment was carried out. The results show that the linearity is obviously improved, and the hysteresis rate is reduced to 1.8% by the PID closed loop correction.
The unimorph deformable mirror(DM) is widely applied in adaptive optics, which utilizes the lateral reverse piezoelectric effect of piezoelectric ceramics to drive the mirror to deform. The hysteresis curve of the deformable mirror is a special "butterfly shape" in the high electric field strength, which increases the difficulty of control, and the deformable mirror cannot work normally. The theory of piezoelectric ceramic polarization and the hysteresis loop of ferroelectric materials were analyzed so that the cause of the butterfly curve could be confirmed. The experimental results show that the covariate field of the DM is between-500 and-400 V/mm, and the hysteresis curve is normalized willow shape. Then a static PID closed loop correction system was designed for the characteristics of the hysteresis curve, and the correction experiment was carried out. The results show that the linearity is obviously improved, and the hysteresis rate is reduced to 1.8% by the PID closed loop correction.
引文
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[14]Zhou Changrong, Liu Xinyu, Jiang Minhong, et al. Effect of BiCoO3on piezoelectric properties and depolarization temperature of BNT-BKT piezoelectric ceramics[J]. Journal of Central South University(Science and Technology),2010, 41(5):1796-1800.(in Chinese)周昌荣,刘心宇,江民红,等. Bi CoO3对BNT-BKT陶瓷压电性能与退极化温度的影响[J].中南大学学报(自然科学版), 2010, 41(5):1796-1800.
[15]Mao Jianbo, Yi Maoxiang. Research on the polarization technology of PZT piezoelectric ceramic[J]. Piezoelectrics&Acoustoopics, 2006, 28(6):736-740.(in Chinese)毛剑波,易茂祥. PZT压电陶瓷极化工艺研究[J].压电与声光, 2006, 28(6):736-737.
[16]豆丁网.压电陶瓷的极化详解[DB/OL].(2014-09-13)[2017-05-05]http://www.docin.com/p-913648535.html.
[17]Du Kexiang, Pan Zhongyin, Duan Yaling. Polaring principle of piezoceramic and its test method[J]. Petroleum Instruments, 2010, 24(4):34-36.(in Chinese)杜克相,潘中印,段亚玲.压电陶瓷的极化原理和测试方法[J].石油仪器, 2010, 24(4):34-36.
[18]Hu Liangliang, Mi Fengwen, Jin Weiqi, et al. Open loop control of fast steering mirror based on PI inverse model[J].Infrared and Laser Engineering, 2017, 46(8):0818001.(in Chinese)胡亮亮,米凤文,金伟其,等.基于PI逆模型的快速微摆反射镜的开环控制[J].红外与激光工程, 2017, 46(8):0818001.
[2]Zhou Hong. Reserch on bimorph deformable mirror and its application in adaptive optics[D]. Beijing:University of Chinese Academy of Sciences, 2013.(in Chinese)周虹.双压电片变形反射镜研制与应用研究[D].北京:中国科学院大学, 2013.
[3]Gerber M, Graf T, Kudryashov A. Generation of custom modes in a Nd:YAG laser with a semipassive bimorph adaptive mirror[J]. Appl Physics B, 2006, 83:43-50.
[4]Rausch P, Verpoort S, Wittrock U, et al. Unimorph deformable mirror for space telescope:design and manufacturing[J]. Opt Express, 2015, 23(15):19469-19477.
[5]Dai Y, Zhao L, Zhang Y D. Adaptive optics vision simulation and perceptual learning system based on a 35-element bimorph deformable mirror[J]. Appl Opt, 2015, 54:979-985.
[6]Priboek J, Diaci J, Sinzinger S. Simple unimorph deformable mirrors fabricated from piezo buzzers[J]. Journal of Micromechanics and Microengineering, 2016, 26:1-7.
[7]Cui Yuguo, Sun Baoyuan, Dong Weijie, et al. Causes for hysteresis and nonlinearity of piezoelectric ceramic actuators[J]. Optics and Precision Engineering, 2003, 11(3):270-275.(in Chinese)崔玉国,孙宝元,董维杰,等.压电陶瓷执行器迟滞与非线性成因分析[J].光学精密工程, 2003, 11(3):270-275.
[8]Zhu Wei. Hysteretic modeling, linearization and control method for piezoelectric ceramic stack actuators and piezoelectric ceramic stack actuators′based systems[D].Chongqing:Chongqing University, 2012.(in Chinese)朱炜.压电陶瓷叠堆执行器及其系统的迟滞现象模拟、线性化及控制方法的研究[D].重庆:重庆大学, 2012.
[9]Wang Geng. Study on correction of nonlinearity of piezoelectric actuator[D]. Beijing:University of Chinese Academy of Sciences, 2013.(in Chinese)王耿.压电驱动器非线性校正技术研究[D].北京:中国科学院大学, 2013.
[10]Wang Geng, Guan Chunlin, Zhang Xiaojun, et al. Design and control of miniature piezoelectric actuator based on strain gauge sensor[J]. Optics and Precision Engineering,2013, 21(3):709-716.(in Chinese)王耿,官春林,张小军,等.应变式微型精密压电驱动器的一体化设计及其PID控制[J].光学精密工程, 2013, 21(3):709-716.
[11]Wang Shifan. Eleetrostrietive effects in relaxed ferroelectric PZT:La[J]. Piezoelectrics&Acoustoopics, 1982(5):43-50.(in Chinese)王世蕃.弛豫铁电体PZT:La陶瓷的电致伸缩效应的研究[J].压电与声光, 1982(5):43-50.
[12]Wu Weibin, Dai Yifan, Guan Chaoliang, et al. Optimization design for transversal piezoelectric effect deformable mirror[J]. Infrared and Laser Engineering, 2016, 45(8):0818003.(in Chinese)吴伟彬,戴一帆,关朝亮,等.横向压电效应变形镜优化设计[J].红外与激光工程, 2016, 45(8):0818003.
[13]Xu Zuqian. Piezoelectric effect and electrostriction in ferrorelectric ceramics[J]. Piezoelectrics&Acoustoopics,1982(4):1-5.(in Chinese)许祖谦.铁电陶瓷中的压电效应和电致伸缩效应[J].压电与声光, 1982(4):1-5.
[14]Zhou Changrong, Liu Xinyu, Jiang Minhong, et al. Effect of BiCoO3on piezoelectric properties and depolarization temperature of BNT-BKT piezoelectric ceramics[J]. Journal of Central South University(Science and Technology),2010, 41(5):1796-1800.(in Chinese)周昌荣,刘心宇,江民红,等. Bi CoO3对BNT-BKT陶瓷压电性能与退极化温度的影响[J].中南大学学报(自然科学版), 2010, 41(5):1796-1800.
[15]Mao Jianbo, Yi Maoxiang. Research on the polarization technology of PZT piezoelectric ceramic[J]. Piezoelectrics&Acoustoopics, 2006, 28(6):736-740.(in Chinese)毛剑波,易茂祥. PZT压电陶瓷极化工艺研究[J].压电与声光, 2006, 28(6):736-737.
[16]豆丁网.压电陶瓷的极化详解[DB/OL].(2014-09-13)[2017-05-05]http://www.docin.com/p-913648535.html.
[17]Du Kexiang, Pan Zhongyin, Duan Yaling. Polaring principle of piezoceramic and its test method[J]. Petroleum Instruments, 2010, 24(4):34-36.(in Chinese)杜克相,潘中印,段亚玲.压电陶瓷的极化原理和测试方法[J].石油仪器, 2010, 24(4):34-36.
[18]Hu Liangliang, Mi Fengwen, Jin Weiqi, et al. Open loop control of fast steering mirror based on PI inverse model[J].Infrared and Laser Engineering, 2017, 46(8):0818001.(in Chinese)胡亮亮,米凤文,金伟其,等.基于PI逆模型的快速微摆反射镜的开环控制[J].红外与激光工程, 2017, 46(8):0818001.