1064nm分振幅光偏振测量仪的多层介质分束镜的设计和制备
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摘要
设计和制备了一种用于1064nm分振幅光偏振测量仪(DOAP)的具有多层介质薄膜结构的差分相移分束镜。通过理论分析该DOAP系统的仪器矩阵参数,得到分束镜的最优参数,并用离子束溅射沉积方法制备了分束镜样品及其背面的减反射膜,其实测结果与设计值吻合较好。与单层薄膜分束镜相比,多层介质薄膜分束镜不受基板、膜层材料,以及入射角和工作波长的限制,具有更广泛的应用。
A differential phase shift beam splitter with a multi-layer dielectric film structure which is used for a division-of-amplitude photopolarimeter(DOAP)with an operating wavelength of 1064 nm is designed and prepared.The optimal parameters of beam splitter are obtained by analyzing instrument matrix parameters of the DOAP system.The beam splitter sample and its anti-reflection coating on the backside are prepared with the ion beam sputtering(IBS)deposition method.The experimental results are well consistent with the designed value.Comparing with single-layer film beam splitters,this multilayer dielectric film beam splitters possess a wider application,which is not limited by the substrate,layer materials,incident angle,and operating wavelength.
A differential phase shift beam splitter with a multi-layer dielectric film structure which is used for a division-of-amplitude photopolarimeter(DOAP)with an operating wavelength of 1064 nm is designed and prepared.The optimal parameters of beam splitter are obtained by analyzing instrument matrix parameters of the DOAP system.The beam splitter sample and its anti-reflection coating on the backside are prepared with the ion beam sputtering(IBS)deposition method.The experimental results are well consistent with the designed value.Comparing with single-layer film beam splitters,this multilayer dielectric film beam splitters possess a wider application,which is not limited by the substrate,layer materials,incident angle,and operating wavelength.
引文
[1]Berry H G,Gabrielse G,Livingston A E.Measurement of the Stokes parameters of light[J].Appl Opt,1977,16(12):3200-3205.
[2]Gori F.Measuring Stokes parameters by means of a polarization grating[J].Opt Lett,1999,24(9):584-586.
[3]Kihara T.Measurement method of Stokes parameters using aquarter-wave plate with phase difference errors[J].Appl Opt,2011,50(17):2582-2587.
[4]Tang Feilong,Li Zhongliang,Bu Yang,et al.Method of improving measurement accuracy of parameters[J].Chinese JLasers,2013,40(4):0408066.汤飞龙,李中梁,步扬,等.一种提高偏振光斯托克斯参量测量精度的方法[J].中国激光,2013,40(4):0408066.
[5]Zhang Xuebing,Li Yanqiu,Zheng Meng,et al.Calibration and error compensation of an imaging polarimeter based on rotating quarter-wave plate method[J].Chinese J Lasers,2015,42(7):0708007.张雪冰,李艳秋,郑猛,等.旋转波片法成像斯托克斯偏振仪误差标定和补偿[J].中国激光,2015,42(7):0708007.
[6]Kanseri B,Rath S,Kandpal H C.Direct determination of the generalized Stokes parameters from the usual Stokes parameters[J].Opt Lett,2009,34(6):719-721.
[7]Azzam R M A.Division-of-amplitude photopolarimeter(DOAP)for the simultaneous measurement of all four Stokes parameters of light[J].Optica Acta:International Journal of Optics,1982,29(5):685-689.
[8]Du Xiliang,Dai Jingmin.Review of division-of-amplitude photopolarimeter[J].Acta Metrologica Sinica,2006,27(4):325-330.杜西亮,戴景民.分振幅光偏振测量仪[J].计量学报,2006,27(4):325-330.
[9]Li Li,Liu Xu,Li Haifeng.A study of division-of-amplitude photopolarimetrical system using prism beam splitter[J].Optical Instruments,1999,21(4-5):159-165.李力,刘旭,李海峰.分光棱镜型分振幅光度式偏振测量系统的研究[J].光学仪器,1999,21(4-5):159-165.
[10]Azzam R M A,De A.Optimal beam splitters for the division-of-amplitude photopolarimeter[J].J Opt Soc Am A,2003,20(5):955-958.
[11]Azzam R M A,Sudradjat F F.Single-layer-coated beam splitters for the division-of-amplitude photopolarimeter[J].Appl Opt,2005,44(2):190-196.
[12]Born M,Wolf E.Principles of optics[M].7th ed.Cambridge:Cambridge University Press,1999.
[13]Azzam R M A,Lopez A G.Accurate calibration of the four-detector photopolarimeter with imperfect polarizing optical elements[J].J Opt Soc Am A,1989,6(10):1513-1521.
[14]Azzam R M A.Arrangement of four photo-detectors for measuring the state of polarization of light[J].Opt Lett,1985,10(7):309-311.
[15]Wang Yonghui,Zheng Chunlong,Zhao Zhentang.Multi-point calibration method based on Stokes ellipsometry system[J].Chinese J Lasers,2012,39(11):1108013.王勇辉,郑春龙,赵振堂.基于斯托克斯椭偏测量系统的多点定标法[J].中国激光,2012,39(11):1108013.
[2]Gori F.Measuring Stokes parameters by means of a polarization grating[J].Opt Lett,1999,24(9):584-586.
[3]Kihara T.Measurement method of Stokes parameters using aquarter-wave plate with phase difference errors[J].Appl Opt,2011,50(17):2582-2587.
[4]Tang Feilong,Li Zhongliang,Bu Yang,et al.Method of improving measurement accuracy of parameters[J].Chinese JLasers,2013,40(4):0408066.汤飞龙,李中梁,步扬,等.一种提高偏振光斯托克斯参量测量精度的方法[J].中国激光,2013,40(4):0408066.
[5]Zhang Xuebing,Li Yanqiu,Zheng Meng,et al.Calibration and error compensation of an imaging polarimeter based on rotating quarter-wave plate method[J].Chinese J Lasers,2015,42(7):0708007.张雪冰,李艳秋,郑猛,等.旋转波片法成像斯托克斯偏振仪误差标定和补偿[J].中国激光,2015,42(7):0708007.
[6]Kanseri B,Rath S,Kandpal H C.Direct determination of the generalized Stokes parameters from the usual Stokes parameters[J].Opt Lett,2009,34(6):719-721.
[7]Azzam R M A.Division-of-amplitude photopolarimeter(DOAP)for the simultaneous measurement of all four Stokes parameters of light[J].Optica Acta:International Journal of Optics,1982,29(5):685-689.
[8]Du Xiliang,Dai Jingmin.Review of division-of-amplitude photopolarimeter[J].Acta Metrologica Sinica,2006,27(4):325-330.杜西亮,戴景民.分振幅光偏振测量仪[J].计量学报,2006,27(4):325-330.
[9]Li Li,Liu Xu,Li Haifeng.A study of division-of-amplitude photopolarimetrical system using prism beam splitter[J].Optical Instruments,1999,21(4-5):159-165.李力,刘旭,李海峰.分光棱镜型分振幅光度式偏振测量系统的研究[J].光学仪器,1999,21(4-5):159-165.
[10]Azzam R M A,De A.Optimal beam splitters for the division-of-amplitude photopolarimeter[J].J Opt Soc Am A,2003,20(5):955-958.
[11]Azzam R M A,Sudradjat F F.Single-layer-coated beam splitters for the division-of-amplitude photopolarimeter[J].Appl Opt,2005,44(2):190-196.
[12]Born M,Wolf E.Principles of optics[M].7th ed.Cambridge:Cambridge University Press,1999.
[13]Azzam R M A,Lopez A G.Accurate calibration of the four-detector photopolarimeter with imperfect polarizing optical elements[J].J Opt Soc Am A,1989,6(10):1513-1521.
[14]Azzam R M A.Arrangement of four photo-detectors for measuring the state of polarization of light[J].Opt Lett,1985,10(7):309-311.
[15]Wang Yonghui,Zheng Chunlong,Zhao Zhentang.Multi-point calibration method based on Stokes ellipsometry system[J].Chinese J Lasers,2012,39(11):1108013.王勇辉,郑春龙,赵振堂.基于斯托克斯椭偏测量系统的多点定标法[J].中国激光,2012,39(11):1108013.