提高稀土掺杂光波导放大器增益的技术进展
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摘要
稀土掺杂光波导放大器(RDWA)是继光纤放大器(RDFA)之后的新一代稀土掺杂光放大器,其更适用于未来光放大器集成化、小型化的要求,并且在降低成本方面优势明显。提高RDWA性能通常从提高稀土离子发光效率和降低波导损耗两个方面进行探究,这就要求更加合适的掺杂材料和高性能的波导结构,以及尽可能低的传输损耗。总结了稀土掺杂玻璃基、聚合物基、硅基及低损耗材料基质光波导放大器的研究进展,最后展望了本领域的发展前景。
With the advantages in integration,miniaturization and economical efficiency,the rare-earth doped waveguide amplifier(RDWA)is developed as an amplifier of new generation.Two feasible ways to optimize RDWA are to improve luminous efficiency of rare-earth doped in the material as well as to reduce the loss of the amplifier.This optimization of RDWA requires more applicable materials,high performance waveguide structure and ultra-low loss materials.This paper reviews glass-based,polymer-based,silicon-based and low-loss material based RDWA,and pictured the prospects of practical applications and possible development of RDWA.
With the advantages in integration,miniaturization and economical efficiency,the rare-earth doped waveguide amplifier(RDWA)is developed as an amplifier of new generation.Two feasible ways to optimize RDWA are to improve luminous efficiency of rare-earth doped in the material as well as to reduce the loss of the amplifier.This optimization of RDWA requires more applicable materials,high performance waveguide structure and ultra-low loss materials.This paper reviews glass-based,polymer-based,silicon-based and low-loss material based RDWA,and pictured the prospects of practical applications and possible development of RDWA.
引文
1 Teem Photonics.http://www.teemphotonics.com/
2 Shen L F,Chen B J,Lin H,et al.Praseodymium ion doped phosphate glasses for integrated broadband ion-exchanged waveguide amplifier[J].J Alloys Compd,2015,622:1093
3 Oswald J,KuldováK,FrumarováB,et al.Near and mid-infrared luminescence of new chalcohalide glasses doped with Pr3+ions[J].Mater Sci Eng B,2008,146(1):107
4 Della Valle G,Taccheo S,Laporta P,et al.Compact high gain erbium-ytterbium doped waveguide amplifier fabricated by Ag-Na ion exchange[J].Electronics Lett,2006,42(11):632
5 Tian Y,Wei T,Chen F,et al.Fluorescence characteristics and energy transfer of ytterbium-sensitized erbium-doped fluorophosphate glass for amplifier applications[J].J Quantitative Spectroscopy Radiative Transfer,2014,133:311
6 Strohhfer C,Polman A.Absorption and emission spectroscopy in Er3+-Yb3+doped aluminum oxide waveguides[J].Optical Mater,2003,21(4):705
7 Kenyon A J,Trwoga P F,Federighi M,et al.Optical properties of PECVD erbium-doped silicon-rich silica:Evidence for energy transfer between silicon microclusters and erbium ions[J].J Phys:Condensed Matter,1994,6(21):L319
8 Kik P G,Brongersma M L,Polman A.Strong exciton-erbium coupling in Si nanocrystal-doped SiO2[J].Appl Phys Lett,2000,76(17):2325
9 Lin G R,Lian C W,Wu C L,et al.Gain analysis of opticallypumped Si nanocrystal waveguide amplifiers on silicon substrate[J].Optics Express,2010,18(9):9213
10 Podhorodecki A,Zatryb G,Golacki L W,et al.On the origin of emission and thermal quenching of SRSO∶Er3+films grown by ECR-PECVD[J].Nanoscale Res Lett,2013,8(1):1
11 Franzo G,Vinciguerra V,Priolo F.The excitation mechanism of rare-earth ions in silicon nanocrystals[J].Appl Phys A,1999,69(1):3
12 Izeddin I,Gregorkiewicz T,Fujii M.Non-radiative sub-microsecond recombination of excited Er3+ions in SiO2sensitized with Si nanocrystals[J].Physica E:Low-dimensional Systems Nanostructures,2007,38(1):144
13 Daldosso N,Navarro-Urrios D,Melchiorri M,et al.Absorption cross section and signal enhancement in Er-doped Si nanocluster ribloaded waveguides[J].Appl Phys Lett,2005,86(26):261103
14 Loh W H,Kenyon A J.Excited state absorption in the Si nanocluster-Er material system[J].IEEE Photonics Technol Lett,2006,18(1-4):289
15 Bradley J D B,Pollnau M.Erbium-doped integrated waveguide amplifiers and lasers[J].Laser Photon Rev,2011,5(3):368
16 Nazabal V,Camy P,Nemec P,et al.Erbium-doped germaniumbased sulphide optical waveguide amplifier for near-and mid-IR[C]//SPIE Europe Microtechnologies for the New Millennium.International Society for Optics and Photonics,2009:73661T
17 Nazabal V,Poulain M,Olivier M,et al.Fluoride and oxyfluoride glasses for optical applications[J].J Fluorine Chem,2012,134:18
18 Yang S,Wang X,Guo H,et al.Broadband near-infrared emission in Tm3+-Dy3+codoped amorphous chalcohalide films fabricated by pulsed laser deposition[J].Optics Express,2011,19(27):26529
19 Del Cacho V D,da Silva D M,de Assumpo T A A,et al.Fabrication of Yb3+/Er3+codoped Bi2O3-WO3-TeO2 pedestal type waveguide for optical amplifiers[J].Optical Mater,2014,38:198
20 Zhang D,Zheng L B,Liang X,et al.Research progress on rareearth-doped polymer optical waveguide amplifiers[J].Laser Infrared,2011,41(10):1076(in Chinese)张丹,郑礼炳,梁旭,等.有机光波导放大器最新进展[J].激光与红外,2011,41(10):1076
21 Zhang D,Li X,Huang X,et al.Optical amplification at 1064nm in Nd(TTA)3(TPPO)2complex doped SU-8polymer waveguide[J].Photonics J IEEE,2015,7(5):1
22 Dekker R,Klunder D J W,Borreman A,et al.Stimulated emission and optical gain in LaF3∶Nd nanoparticle-doped polymer-based waveguides[J].Appl Phys Lett,2004,85(25):6104
23 Zhai X,Li J,Liu S,et al.Enhancement of 1.53μm emission band in NaYF4∶Er3+,Yb3+,Ce3+nanocrystals for polymer-based optical waveguide amplifiers[J].Optical Mater Express,2013,3(2):270
24 Zhai X,Liu S,Liu X,et al.Sub-10nm BaYF5∶Yb3+,Er3+coreshell nanoparticles with intense 1.53μm fluorescence for polymerbased waveguide amplifiers[J].J Mater Chem C,2013,1(7):1525
25 Liu X,Chen X,Zhai X,et al.NaYF4 nanocrystals with intense1530nm fluorescence for polymer optical waveguide amplifiers[J].J Nanosci Nanotechnol,2014,14(5):3499
26 Wang Y,Guo X,Liu S,et al.Controllable synthesis ofβ-NaLuF4∶Yb3+,Er3+nanocrystals and their application in polymer-based optical waveguide amplifiers[J].J Fluorine Chem,2015,175:125
27 Wang T,Zhao D,Zhang M,et al.Optical waveguide amplifiers based on NaYF4∶Er3+,Yb3+NPs-PMMA covalent-linking nanocomposites[J].Optical Mater Express,2015,5(3):469
28 Liu T,Li Z S,Jiang Z,et al.Fabrication process of organic polymer optical waveguide[J].Laser Infrared,2015,45(6):599(in Chinese)刘涛,李志山,蒋志,等.有机聚合物光波导制作工艺综述[J].激光与红外,2015,45(6):599
29 Zhou B,Shi B,Jin D,et al.Controlling upconversion nanocrystals for emerging applications[J].Nature Nanotechnol,2015,10(11):924
30周治平(美).硅基光电子学[M].北京:北京大学出版社,2012:1
31 余金中.硅光子学[M].北京:科学出版社,2011:98
32 Fischer U,Zinke T,Kropp J,et al.0.1dB/cm waveguide losses in single-mode SOI rib waveguides[J].Photonics Technol Lett,IEEE,1996,8(5):647
33 Mashanovich G Z,Miloevc'M M,Nedeljkovic M,et al.Low loss silicon waveguides for the mid-infrared[J].Optics Express,2011,19(8):7112
34 Loureno M A,Gwilliam R M,Homewood K P.Extraordinary optical gain from silicon implanted with erbium[J].Appl Phys Lett,2007,91(14):141122
35 Hattasan N,Kuyken B,Leo F,et al.High-efficiency SOI fiber-tochip grating couplers and low-loss waveguides for the short-wave infrared[J].IEEE Photonics Technol Lett,2012,24(17):1536
36 Vázquez-Córdova S A,Dijkstra M,Bernhardi E H,et al.Erbiumdoped spiral amplifiers with 20dB of net gain on silicon[J].Optics Express,2014,22(21):25993
37 Xu Q,Almeida V R,Panepucci R R,et al.Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material[J].Optics Lett,2004,29(14):1626
38 Almeida V R,Xu Q,Barrios C A,et al.Guiding and confining light in void nanostructure[J].Optics Lett,2004,29(11):1209
39 Guo R,Wang B,Wang X,et al.Optical amplification in Er/Yb silicate slot waveguide[J].Optics Lett,2012,37(9):1427
40 Barrios C A,Sánchez B,Gylfason K B,et al.Demonstration of slotwaveguide structures on silicon nitride/silicon oxide platform[J].Optics Express,2007,15(11):6846
41 Vivien L,Marris-Morini D,Griol A,et al.Vertical multiple-slot waveguide ring resonators in silicon nitride[J].Optics Express,2008,16(22):17237
42 Serna S,Zhang W,Leroux X,et al.Potential for large optical gain improvement of erbium-doped slot waveguide amplifiers in silicon photonics[J].J Optical Soci America B,2014,31(9):2021
43 Barrios C A,Lipson M.Electrically driven silicon resonant light emitting device based on slot-waveguide[J].Optics Express,2005,13(25):10092
44 Zou C L,Dong C H,Cui J M,et al.Whispering gallery mode optical microresonators:Fundamentals and applications[J].Scientia Sinica(Physica,Mechanica&Astronomica),2012,42(11):1155(in Chinese)邹长铃,董春华,崔金明,等.回音壁模式光学微腔:基础与应用[J].中国科学:物理学力学天文学,2012,42(11):1155
45 Li L Y.Low loss and ultra-low loss optical fiber review[J].Modern Transmission,2015(3):10(in Chinese)李琳莹.低损耗、超低损耗单模光纤的应用现状综述[J].现代传输,2015(3):10
46 Zheng S X.Study on the loss mechanism of optical fibers[J].J Northwestern Institute of Architectural Engineering,1995(4):55(in Chinese)郑书信.光纤损耗机理研究[J].西北建筑工程学院学报,1995(4):55
47 Barwicz T,Haus H A.Three-dimensional analysis of scattering losses due to sidewall roughness in microphotonic waveguides[J].J Lightwave Technol,2005,23(9):2719
48 Hao Y L,Zheng W W,Jiang S H,et al.Manufacturing and analysis of low-loss ion-exchanged glass-based waveguide[J].J Inorg Mater,2009,24(5):1041(in Chinese)郝寅雷,郑伟伟,江舒杭,等.低损耗离子交换玻璃基光波导制备与分析[J].无机材料学报,2009,24(5):1041
49 Li K,Pang F F,Wu J H,et al.Fabrication and performance testing of the low-loss interconnect polymer optical waveguide[J].J Optoelectronics Laser,2013(4):017(in Chinese)李康,庞拂飞,吴金华,等.低损耗聚合物互连光波导的制备及性能测试[J].光电子·激光,2013(4):017
50 Harke A,Krause M,Mueller J.Low-loss singlemode amorphous silicon waveguides[J].Electronics Lett,2005,41(25):1377
51 Heck M J R,Bauters J F,Davenport M L,et al.Ultra-low loss waveguide platform and its integration with silicon photonics[J].Laser Photonics Rev,2014,8(5):667
52 Huang Y,Song J,Luo X,et al.CMOS compatible monolithic multi-layer Si3N4-on-SOI platform for low-loss high performance silicon photonics dense integration[J].Optics Express,2014,22(18):21859
53 Li G,Yao J,Thacker H,et al.Ultralow-loss,high-density SOI optical waveguide routing for macrochip interconnects[J].Optics Express,2012,20(11):12035
54 Terrel M,Digonnet M J F,Fan S.Performance comparison of slowlight coupled-resonator optical gyroscopes[J].Laser Photonics Rev,2009,3(5):452
2 Shen L F,Chen B J,Lin H,et al.Praseodymium ion doped phosphate glasses for integrated broadband ion-exchanged waveguide amplifier[J].J Alloys Compd,2015,622:1093
3 Oswald J,KuldováK,FrumarováB,et al.Near and mid-infrared luminescence of new chalcohalide glasses doped with Pr3+ions[J].Mater Sci Eng B,2008,146(1):107
4 Della Valle G,Taccheo S,Laporta P,et al.Compact high gain erbium-ytterbium doped waveguide amplifier fabricated by Ag-Na ion exchange[J].Electronics Lett,2006,42(11):632
5 Tian Y,Wei T,Chen F,et al.Fluorescence characteristics and energy transfer of ytterbium-sensitized erbium-doped fluorophosphate glass for amplifier applications[J].J Quantitative Spectroscopy Radiative Transfer,2014,133:311
6 Strohhfer C,Polman A.Absorption and emission spectroscopy in Er3+-Yb3+doped aluminum oxide waveguides[J].Optical Mater,2003,21(4):705
7 Kenyon A J,Trwoga P F,Federighi M,et al.Optical properties of PECVD erbium-doped silicon-rich silica:Evidence for energy transfer between silicon microclusters and erbium ions[J].J Phys:Condensed Matter,1994,6(21):L319
8 Kik P G,Brongersma M L,Polman A.Strong exciton-erbium coupling in Si nanocrystal-doped SiO2[J].Appl Phys Lett,2000,76(17):2325
9 Lin G R,Lian C W,Wu C L,et al.Gain analysis of opticallypumped Si nanocrystal waveguide amplifiers on silicon substrate[J].Optics Express,2010,18(9):9213
10 Podhorodecki A,Zatryb G,Golacki L W,et al.On the origin of emission and thermal quenching of SRSO∶Er3+films grown by ECR-PECVD[J].Nanoscale Res Lett,2013,8(1):1
11 Franzo G,Vinciguerra V,Priolo F.The excitation mechanism of rare-earth ions in silicon nanocrystals[J].Appl Phys A,1999,69(1):3
12 Izeddin I,Gregorkiewicz T,Fujii M.Non-radiative sub-microsecond recombination of excited Er3+ions in SiO2sensitized with Si nanocrystals[J].Physica E:Low-dimensional Systems Nanostructures,2007,38(1):144
13 Daldosso N,Navarro-Urrios D,Melchiorri M,et al.Absorption cross section and signal enhancement in Er-doped Si nanocluster ribloaded waveguides[J].Appl Phys Lett,2005,86(26):261103
14 Loh W H,Kenyon A J.Excited state absorption in the Si nanocluster-Er material system[J].IEEE Photonics Technol Lett,2006,18(1-4):289
15 Bradley J D B,Pollnau M.Erbium-doped integrated waveguide amplifiers and lasers[J].Laser Photon Rev,2011,5(3):368
16 Nazabal V,Camy P,Nemec P,et al.Erbium-doped germaniumbased sulphide optical waveguide amplifier for near-and mid-IR[C]//SPIE Europe Microtechnologies for the New Millennium.International Society for Optics and Photonics,2009:73661T
17 Nazabal V,Poulain M,Olivier M,et al.Fluoride and oxyfluoride glasses for optical applications[J].J Fluorine Chem,2012,134:18
18 Yang S,Wang X,Guo H,et al.Broadband near-infrared emission in Tm3+-Dy3+codoped amorphous chalcohalide films fabricated by pulsed laser deposition[J].Optics Express,2011,19(27):26529
19 Del Cacho V D,da Silva D M,de Assumpo T A A,et al.Fabrication of Yb3+/Er3+codoped Bi2O3-WO3-TeO2 pedestal type waveguide for optical amplifiers[J].Optical Mater,2014,38:198
20 Zhang D,Zheng L B,Liang X,et al.Research progress on rareearth-doped polymer optical waveguide amplifiers[J].Laser Infrared,2011,41(10):1076(in Chinese)张丹,郑礼炳,梁旭,等.有机光波导放大器最新进展[J].激光与红外,2011,41(10):1076
21 Zhang D,Li X,Huang X,et al.Optical amplification at 1064nm in Nd(TTA)3(TPPO)2complex doped SU-8polymer waveguide[J].Photonics J IEEE,2015,7(5):1
22 Dekker R,Klunder D J W,Borreman A,et al.Stimulated emission and optical gain in LaF3∶Nd nanoparticle-doped polymer-based waveguides[J].Appl Phys Lett,2004,85(25):6104
23 Zhai X,Li J,Liu S,et al.Enhancement of 1.53μm emission band in NaYF4∶Er3+,Yb3+,Ce3+nanocrystals for polymer-based optical waveguide amplifiers[J].Optical Mater Express,2013,3(2):270
24 Zhai X,Liu S,Liu X,et al.Sub-10nm BaYF5∶Yb3+,Er3+coreshell nanoparticles with intense 1.53μm fluorescence for polymerbased waveguide amplifiers[J].J Mater Chem C,2013,1(7):1525
25 Liu X,Chen X,Zhai X,et al.NaYF4 nanocrystals with intense1530nm fluorescence for polymer optical waveguide amplifiers[J].J Nanosci Nanotechnol,2014,14(5):3499
26 Wang Y,Guo X,Liu S,et al.Controllable synthesis ofβ-NaLuF4∶Yb3+,Er3+nanocrystals and their application in polymer-based optical waveguide amplifiers[J].J Fluorine Chem,2015,175:125
27 Wang T,Zhao D,Zhang M,et al.Optical waveguide amplifiers based on NaYF4∶Er3+,Yb3+NPs-PMMA covalent-linking nanocomposites[J].Optical Mater Express,2015,5(3):469
28 Liu T,Li Z S,Jiang Z,et al.Fabrication process of organic polymer optical waveguide[J].Laser Infrared,2015,45(6):599(in Chinese)刘涛,李志山,蒋志,等.有机聚合物光波导制作工艺综述[J].激光与红外,2015,45(6):599
29 Zhou B,Shi B,Jin D,et al.Controlling upconversion nanocrystals for emerging applications[J].Nature Nanotechnol,2015,10(11):924
30周治平(美).硅基光电子学[M].北京:北京大学出版社,2012:1
31 余金中.硅光子学[M].北京:科学出版社,2011:98
32 Fischer U,Zinke T,Kropp J,et al.0.1dB/cm waveguide losses in single-mode SOI rib waveguides[J].Photonics Technol Lett,IEEE,1996,8(5):647
33 Mashanovich G Z,Miloevc'M M,Nedeljkovic M,et al.Low loss silicon waveguides for the mid-infrared[J].Optics Express,2011,19(8):7112
34 Loureno M A,Gwilliam R M,Homewood K P.Extraordinary optical gain from silicon implanted with erbium[J].Appl Phys Lett,2007,91(14):141122
35 Hattasan N,Kuyken B,Leo F,et al.High-efficiency SOI fiber-tochip grating couplers and low-loss waveguides for the short-wave infrared[J].IEEE Photonics Technol Lett,2012,24(17):1536
36 Vázquez-Córdova S A,Dijkstra M,Bernhardi E H,et al.Erbiumdoped spiral amplifiers with 20dB of net gain on silicon[J].Optics Express,2014,22(21):25993
37 Xu Q,Almeida V R,Panepucci R R,et al.Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material[J].Optics Lett,2004,29(14):1626
38 Almeida V R,Xu Q,Barrios C A,et al.Guiding and confining light in void nanostructure[J].Optics Lett,2004,29(11):1209
39 Guo R,Wang B,Wang X,et al.Optical amplification in Er/Yb silicate slot waveguide[J].Optics Lett,2012,37(9):1427
40 Barrios C A,Sánchez B,Gylfason K B,et al.Demonstration of slotwaveguide structures on silicon nitride/silicon oxide platform[J].Optics Express,2007,15(11):6846
41 Vivien L,Marris-Morini D,Griol A,et al.Vertical multiple-slot waveguide ring resonators in silicon nitride[J].Optics Express,2008,16(22):17237
42 Serna S,Zhang W,Leroux X,et al.Potential for large optical gain improvement of erbium-doped slot waveguide amplifiers in silicon photonics[J].J Optical Soci America B,2014,31(9):2021
43 Barrios C A,Lipson M.Electrically driven silicon resonant light emitting device based on slot-waveguide[J].Optics Express,2005,13(25):10092
44 Zou C L,Dong C H,Cui J M,et al.Whispering gallery mode optical microresonators:Fundamentals and applications[J].Scientia Sinica(Physica,Mechanica&Astronomica),2012,42(11):1155(in Chinese)邹长铃,董春华,崔金明,等.回音壁模式光学微腔:基础与应用[J].中国科学:物理学力学天文学,2012,42(11):1155
45 Li L Y.Low loss and ultra-low loss optical fiber review[J].Modern Transmission,2015(3):10(in Chinese)李琳莹.低损耗、超低损耗单模光纤的应用现状综述[J].现代传输,2015(3):10
46 Zheng S X.Study on the loss mechanism of optical fibers[J].J Northwestern Institute of Architectural Engineering,1995(4):55(in Chinese)郑书信.光纤损耗机理研究[J].西北建筑工程学院学报,1995(4):55
47 Barwicz T,Haus H A.Three-dimensional analysis of scattering losses due to sidewall roughness in microphotonic waveguides[J].J Lightwave Technol,2005,23(9):2719
48 Hao Y L,Zheng W W,Jiang S H,et al.Manufacturing and analysis of low-loss ion-exchanged glass-based waveguide[J].J Inorg Mater,2009,24(5):1041(in Chinese)郝寅雷,郑伟伟,江舒杭,等.低损耗离子交换玻璃基光波导制备与分析[J].无机材料学报,2009,24(5):1041
49 Li K,Pang F F,Wu J H,et al.Fabrication and performance testing of the low-loss interconnect polymer optical waveguide[J].J Optoelectronics Laser,2013(4):017(in Chinese)李康,庞拂飞,吴金华,等.低损耗聚合物互连光波导的制备及性能测试[J].光电子·激光,2013(4):017
50 Harke A,Krause M,Mueller J.Low-loss singlemode amorphous silicon waveguides[J].Electronics Lett,2005,41(25):1377
51 Heck M J R,Bauters J F,Davenport M L,et al.Ultra-low loss waveguide platform and its integration with silicon photonics[J].Laser Photonics Rev,2014,8(5):667
52 Huang Y,Song J,Luo X,et al.CMOS compatible monolithic multi-layer Si3N4-on-SOI platform for low-loss high performance silicon photonics dense integration[J].Optics Express,2014,22(18):21859
53 Li G,Yao J,Thacker H,et al.Ultralow-loss,high-density SOI optical waveguide routing for macrochip interconnects[J].Optics Express,2012,20(11):12035
54 Terrel M,Digonnet M J F,Fan S.Performance comparison of slowlight coupled-resonator optical gyroscopes[J].Laser Photonics Rev,2009,3(5):452