同步辐射光源光束线光学元件碳污染原位清洗研究
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摘要
通过采用射频等离子体对由于表面碳污染减少光通量的同步辐射光学元件进行原位清洗实验,利用质谱仪、X射线电子能谱对清洗过程以及表面变化进行监测,并对清洗过程截止点进行研究。结果表明射频等离子体清洗方法可有效去除严重影响光束线使用效率的碳污染,提高光束线使用效率;通过监测气体成分变化能为截止点判断提供有效依据。
A novel technique,in-situ cleaning with RF plasma,was developed to effectively remove the carbon contaminant,which was deposited on surfaces of the optical components in the beam-line of the synchrotron radiation light source,and which significantly reduced the photon flux.The whole process of in-situ cleaning and the associated changes in the surface contents in the cleaning were monitored and evaluated with residue gas analyzer and X-ray photoelectron spectroscopy.The results show that the newly-developed in-situ cleaning of carbon contaminant with RF plasma effectively removed the carbon contamination,and completely restored the high efficiency of the beam-line.
A novel technique,in-situ cleaning with RF plasma,was developed to effectively remove the carbon contaminant,which was deposited on surfaces of the optical components in the beam-line of the synchrotron radiation light source,and which significantly reduced the photon flux.The whole process of in-situ cleaning and the associated changes in the surface contents in the cleaning were monitored and evaluated with residue gas analyzer and X-ray photoelectron spectroscopy.The results show that the newly-developed in-situ cleaning of carbon contaminant with RF plasma effectively removed the carbon contamination,and completely restored the high efficiency of the beam-line.
引文
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