采用化学腐蚀法制备光纤Fabry-Perot应变传感器
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摘要
提出了一种采用化学腐蚀方法制备光纤Fabry-Perot(F-P)传感器的方法,采用浓度为40%的氢氟酸溶液对单模光纤端面进行腐蚀处理,并通过电弧放电对光纤端面进行熔接,制作光纤F-P传感器。实验中,将单模光纤端面在40%浓度的氢氟酸中腐蚀20 min制作出深度21μm的凹槽,并将该腐蚀过的光纤和端面切平的单模光纤相对熔接,通过电弧放电进行熔接构成F-P腔结构,条纹对比度为8 d B;对制备的光纤F-P传感器的应变特性及温度特性进行了实验和分析,结果表明采用化学腐蚀法制作的光纤F-P传感器对应变具有良好的灵敏度,加载灵敏度可达到3.78 pm/με,线性度为0.999;卸载灵敏度为-4.25 pm/με,线性度为0.985。
An optical fiber Fabry-Perot sensor was fabricated by chemical etching and discharge splicing. A groove depth of 21 μm was fabricated on the single-mode fiber end through 40% hydrofluoric acid corrosion during 20 min.The fiber after chemical corrosion processing was spliced with another fiber that ending face is plane.Through optimizing splicing parameters of fusion splicer,an all-fiber Fabry-Perot structure was realized in the experiment,and the interference fringe contrast was 8 d B,the wavelength interval was 14 nm. In the experiment,the measurement system was designed,and strain characteristics were experimentally investigated.The load strain sensitivity and its linearity are3.78 pm/με and 0.999 respectively; the unload strain sensitivity and its linearity are-4.25 pm/με and 0.985 respectively.
An optical fiber Fabry-Perot sensor was fabricated by chemical etching and discharge splicing. A groove depth of 21 μm was fabricated on the single-mode fiber end through 40% hydrofluoric acid corrosion during 20 min.The fiber after chemical corrosion processing was spliced with another fiber that ending face is plane.Through optimizing splicing parameters of fusion splicer,an all-fiber Fabry-Perot structure was realized in the experiment,and the interference fringe contrast was 8 d B,the wavelength interval was 14 nm. In the experiment,the measurement system was designed,and strain characteristics were experimentally investigated.The load strain sensitivity and its linearity are3.78 pm/με and 0.999 respectively; the unload strain sensitivity and its linearity are-4.25 pm/με and 0.985 respectively.
引文
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[19]JIANG Yi,TANG Caijie.Principle and application of optical fiber Fabry-Perot interferometer[M].Beijing:National Defence Industry Press,2009.(in Chinese)江毅,唐才杰.光纤Fabry-Perot干涉仪原理及应用[M].北京:国防工业出版社,2009.
[2]WU Peng,QIN Shuijie.Study on fiber optic biosensors based on refractive index modulation[J].Laser&Infrared,2011,41(9):1006-1009.(in Chinese)吴鹏,秦水介.基于折射率调制原理的光纤生物传感器的研制[J].激光与红外,2011,41(9):1006-1009.
[3]CHANG Xinlong,LI Ming,WANG Weiping,et al.Analyses of parameters influencing strain transfer of embeddedpolymer optical fiber sensors[J].Laser&Infrared,2010,40(5):515-519.(in Chinese)常新龙,黎明,王渭平,等.埋入式聚合物光纤传感器应变传递影响参数分析[J].激光与红外,2010,40(5):515-519.
[4]LI Litong,ZHANG Dongsheng,WEN Xiaoyan,et al.Micro fiber F-P sensor used in the measurement of thermal expansion coefficient[J].Journal of Optoelectronics Laser,2014,25(11):2130-2135.(in Chinese)李立彤,张东生,文晓艳,等.微型光纤F-P传感器用于材料热膨胀系数的测量[J].光电子·激光,2014(11):2130-2135.
[5]Jiang Y,Xu J,Yang D,et al.Miniaturized fiber FabryPerot interferometer for strain sensing[J].Microwave&Optical Technology Letters,2016,58(6):1510-1514.
[6]LIU Bo,LI Jie SUN Lipeng,et al.Refractive index sensing characteristics of microdroplet-etched micro-nano fiber Fabry-Perot resonator[J].Chinese Journal of Quantum Electronic,2016(3):356-362.(in Chinese)刘博,李杰,孙立朋,等.基于微滴腐蚀微纳光纤FarbyPerot谐振腔的折射率传感特性[J].量子电子学报,2016(3):356-362.
[7]Mathew J,Schneller O,Polyzos D,et al.In-Fibre FabryPerot Cavity Sensor for High Temperature Applications[J].Journal of Lightwave Technology,2015:1-1.
[8]Li Jie,Shen Xiang,Sun Lipeng,et al.Characteristics of microfiber Pabry-Perot resonators fabricated by UV exposure[J].Optics Express,2013,21(10):12111-12121.
[9]ZHOU Guangfu,DAI Yutang,HU Huadong,et al.Study on fabrication of fiber 3D microstructures based on femtosecond laser[J].Laser&Infrared,2013,43(1):19-23.(in Chinese)周广福,戴玉堂,胡华东,等.基于飞秒激光的光纤三维微结构制备研究[J].激光与红外,2013,43(1):19-23.
[10]WU Mingyi,LI Ming,CHENG Guanghua,et al.Fabricating micro fiber fabry-perot sensor with femtosecond laser pulses[J].Acta Photonica Sinica,2010,39(4):584-587.(in Chinese)吴易明,李明,程光华,等.飞秒激光制造微型光纤法布里-珀罗干涉传感器[J].光子学报,2010,39(4):584-587.
[11]Rao Yunjiang,XU Bing,Ran Zengling,et al.Micro Extrinsic Fiber-Optic Fabry-Perot Interferometric Sensor Based on Erbium and Boron-Doped Fibers[J].Chinese Physics Letters,2010,27(2):024208.
[12]LIU Xinglin,WANG Guanjun,AN Yongquan.Research on stress characteristics of Fabry-Perot sensor with center microbubble structure[J].Journal of Measurement Science and Instrumentation,2016(3):286-290.(in Chinese)刘星麟,王冠军,安永泉.基于中心微泡结构的光纤FP传感器应力特性研究[J].测试科学与仪器,2016(3):286-290.
[13]Wang R,Qiao X.Micro Fabry-Perot interferometer based on suspended core created by etching microstructure fiber[C].Ofs 2014,International Conference on Optical Fiber Sensors.2014:915780.
[14]LAN Ruoming,JIANG Mingshun.Optical fiber FabryPerot refractive-index sensor fabricated by femtosecond laser etching[J].Journal of Optoelectronics·Laser,2013,(2):221-225.(in Chinese)蓝若明,姜明顺.基于飞秒激光制备的光纤Fabry-Perot折射率传感器[J].光电子·激光,2013,(2):221-225.
[15]Li L,Feng Z,Qiao X,et al.Ultrahigh Sensitive Temperature Sensor Based on Fabry-Perot Interference Assisted by a Graphene Diaphragm[J].IEEE Sensors Journal,2015,15(1):505-509.
[16]Andre R M,Warren-Smith S C,Becker M,et al.Simultaneous measurement of temperature and refractive index using focused ion beam milled Fabry-Perot cavities in optical fiber micro-tips.[J].Optics Express,2016,24(13):14053.
[17]Liu X,Jiang M,Sui Q,et al.Temperature sensitivity characteristics of HCPCF-based Fabry-Perotinterferometer[J].Optics Communications,2016,359:322-328.
[18]Chen Xiaopei,Yu Bing,Zhu Yizheng,et al.Deep Wet Etching on Fused Silica Material for Fiber Optic Sensors[C].SP1E,2003,5342:128-136.
[19]JIANG Yi,TANG Caijie.Principle and application of optical fiber Fabry-Perot interferometer[M].Beijing:National Defence Industry Press,2009.(in Chinese)江毅,唐才杰.光纤Fabry-Perot干涉仪原理及应用[M].北京:国防工业出版社,2009.