锥形纤毛式MEMS矢量水听器的设计
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摘要
微电子机械系统(MEMS)矢量水听器具有高灵敏度、低频探测能力和"8"字指向性等特点,在水下探测时表现出良好的性能。双层纤毛结构在相同悬臂梁负荷的前提下能够有效提高水听器的灵敏度,但在二次集成中仍然存在上纤毛发生偏斜的情况,并影响水听器的灵敏度和指向性。为了解决这一问题,提出了一种锥形纤毛式微结构。首先分析了双层纤毛式结构在实际操作中出现的一些问题,然后通过ANSYS仿真软件对锥形纤毛式微结构进行静力学分析、模态分析和流固耦合分析。最后,通过比较校准法对锥形纤毛式水听器进行灵敏度和指向性测试。测试结果显示,锥形纤毛式微结构不仅能避免二次集成中出现的问题,而且可以将灵敏度提高约0.9 dB,并将纤毛质量减小15%,展现出很好的工程应用前景。
The micro-electromechanical system(MEMS)vector hydrophone has the characteristics of high sensitivity,low frequency detection ability and "8" shape directivity,and shows a good performance in the underwater detection.The two-component cilia structure can effectively improve the sensitivity of the hydrophone under the same load of the cantilever,but the deviation of the upper cilium still exists in the secondary integration,which affects the sensitivity and directivity of the hydrophone.In order to solve the problem,a taper-shaped cilium microstructure was proposed.Firstly,some problems of the two-component cilia structure in practical operation were analyzed,and then the static analysis,modal analysis and fluid-solid coupling analysis were carried out by ANSYS simulation software.Finally,the method of the comparison calibration was used to test the sensitivity and directivity of the taper-shaped cilium hydrophone.The test results show that the taper-shaped cilium microstructure can avoid the problem in the secondary integration,improve the sensitivity by about 0.9 dB and reduce the mass of the cilium by 15%,showing good prospects for engineering applications.
The micro-electromechanical system(MEMS)vector hydrophone has the characteristics of high sensitivity,low frequency detection ability and "8" shape directivity,and shows a good performance in the underwater detection.The two-component cilia structure can effectively improve the sensitivity of the hydrophone under the same load of the cantilever,but the deviation of the upper cilium still exists in the secondary integration,which affects the sensitivity and directivity of the hydrophone.In order to solve the problem,a taper-shaped cilium microstructure was proposed.Firstly,some problems of the two-component cilia structure in practical operation were analyzed,and then the static analysis,modal analysis and fluid-solid coupling analysis were carried out by ANSYS simulation software.Finally,the method of the comparison calibration was used to test the sensitivity and directivity of the taper-shaped cilium hydrophone.The test results show that the taper-shaped cilium microstructure can avoid the problem in the secondary integration,improve the sensitivity by about 0.9 dB and reduce the mass of the cilium by 15%,showing good prospects for engineering applications.
引文
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[2]XUE C,CHEN S,ZHANG W,et al.Design,fabrication,and preliminary characterization of a novel MEMS bionic vector hydrophone[J].Microelectronics Journal,2007,38(10):1021-1026.
[3]LIU Y,WANG R,ZHANG G,et al.“Lollipop-shaped”highsensitivity microelectromechanical systems vector hydrophone based on parylene encapsulation[J].Journal of Applied Physics,2015,118(4):044501-1-044501-7.
[4]XU W,LIU Y,ZHANG G,et al.Development of cup-shaped micro-electromechanical systems-based vector hydrophone[J].Journal of Applied Physics,2016,120(12):124502-1-124502-8.
[5]XU Q,ZHANG G,DING J,et al.Design and implementation of two-component cilia cylinder MEMS vector hydrophone[J].Sensors and Actuators:A,2018,277:142-149.
[6]ZHANG G,DING J,XU W,et al.Design and optimization of stress centralized MEMS vector hydrophone with high sensitivity at low frequency[J].Mechanical Systems&Signal Processing,2018,104:607-618.
[7]刘源,王丽娟,赵鹏,等.MEMS仿生矢量水听器二次集成的误差分析测试[J].微纳电子技术,2015,52(1):42-48.
[8]MEENA K V,MATHEW R,LEELAVATHI J,et al.Performance comparison of a single element piezoresistor with a half-active Wheatstone bridge for miniaturized pressure sensors[J].Measurement,2017,111:340-350.
[9]刘源,陈丽红,张国军,等.流体对MEMS矢量水听器共振频率的影响[J].传感技术学报,2014,27(6):758-762.
[10]张晓勇,罗来源,等.参数未知的舰船辐射噪声检测方法[J].声学学报,2015,40(4):511-518.
[11]宋树平.矢量水听器低频校准装置研究[D].哈尔滨:哈尔滨工程大学,2012.
[12]徐庆达,张国军,沈倪鑫,等.标矢量一体化水听器的设计[J].微纳电子技术,2018,55(12):878-884.